Method for achieving a desired semiconductor wafer surface profile via selective polishing pad conditioning

• US 6,607,423 B1
• Filed: 09/25/2001
• Issued: 08/19/2003
• Est. Priority Date: 03/03/1999
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Arcayan, Rigel G., Pineda-Garcia, Jose M., Burleson, Michael K.
• Primary Examiner(s): Eley, Timothy V.
• Application Number:
  US09/963,336
• Time in Patent Office: 693 Days
• Field of Search: 438/691, 438/692, 438/693, 451/5, 451/8, 451/9, 451/10, 451/21, 451/41, 451/56, 451/72, 451/443, 451/444
• US Class Current: 451/8
• CPC Class Codes: B24B 49/10 involving electrical means B24B49/02, B24B49/08 take precedence
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools

Abstract

A system and method are presented for selectively conditioning a surface of a polishing pad of a CMP apparatus in order to achieve a desired surface profile of a semiconductor wafer. The semiconductor wafer may be subjected to a CMP operation using the CMP apparatus following the conditioning. The present CMP apparatus includes a polishing pad having an underside surface mechanically coupled to a substantially planar surface of a platen, an abrasive surface, and a measurement system. The platen and abrasive surface may be rotatable about respective rotational axes. The present conditioning method includes selecting a region of an upper “polishing” surface of the polishing pad (e.g., a CMP region) encircling a rotational axis of the platen and bounded by first and second radial distances from the rotational axis of the platen. An existing first radial profile of the polishing surface within the selected region may be determined using the measuring system, and a desired second radial profile of the polishing surface within the selected region may be chosen based upon the desired surface profile of the semiconductor wafer. During the conditioning, the abrasive surface may contact the polishing surface within the selected region at a radial distance from the rotational axis of the platen dependent upon the existing first and desired second radial profiles of the polishing surface such that the desired second radial profile is achieved during the conditioning.

Claims

1. A method for conditioning a polishing surface of a polishing pad mounted upon a platen, comprising:

selecting a region of the polishing surface extending between a first and second radial distances from a rotational axis of the platen;

determining a first radial profile of the polishing surface within the selected region, wherein said determining a first radial profile comprises;

measuring a first existing distance between the polishing surface and a surface of the platen at the first radial distance; and

measuring a second existing distance between the polishing surface and the surface of the platen at the second radial distance;

determining a desired second radial profile of the polishing surface within the selected region;

rotating the platen about the rotational axis of the platen;

rotating an abrasive surface about a rotational axis of the abrasive surface while contacting the abrasive surface with the polishing surface such that the rotational axis of the abrasive surface is located at a third radial distance from the rotational axis of the platen, between the first and second radial distances, and wherein the third radial distance is selected depending on the first and second radial profiles.

2. The method as recited in claim 1, wherein the rotational axis of the platen is normal to the surface of the platen, wherein the surface of the platen is substantially planar, and wherein the selected region of the polishing surface encircles the rotational axis of the platen.

3. The method as recited in claim 1, wherein the abrasive surface is substantially planar, and wherein the rotational axis of the abrasive surface is normal to the substantially planar surface of the abrasive surface.

4. The method as recited in claim 1, wherein during the contacting, the rotational axis of the abrasive surface is parallel to the rotational axis of the platen.

5. The method as recited in claim 1, wherein the first radial profile of the polishing surface exists in a plane perpendicular to the surface of the platen and contains the rotational axis of the platen, wherein the surface of the platen is substantially planar.

6. The method as recited in claim 1, wherein the polishing pad comprises a first and second polishing pads, wherein an underside surface of the first polishing pad is mechanically coupled to the surface of the platen, and wherein an underside surface of the second polishing pad is mechanically coupled to an upper surface of the first polishing pad.

7. The method as recited in claim 6, wherein the second polishing pad has a hole in a center portion of the second polishing pad such that the second polishing pad comprises the polishing surface that extends from the first radial distance to the second radial distance.

8. The method as recited in claim 1, wherein the desired second radial profile comprises:

a first desired distance between the polishing surface and the surface of the platen at the first radial distance; and

a second desired distance between the polishing surface and the surface of the platen at the second radial distance.

9. The method as recited in claim 8, wherein if a difference between the second existing distance and the second desired distance is greater than a difference between the first existing distance and the first desired distance, then the third radial distance is made greater than a radial distance midway between the first and second radial distances, or the third radial distance is made closer to the second radial distance than the first radial distance.

10. The method as recited in claim 8, wherein if a difference between the second existing distance and the second desired distance is equal to a difference between the first existing distance and the first desired distance, then the third radial distance is made equal to a radial distance midway between the first and second radial distances.

11. The method as recited in claim 8, wherein if a difference between the second existing distance and the second desired distance is less than a difference between the first existing distance and the first desired distance, then the third radial distance is made less than a radial distance midway between the first and second radial distances, or the third radial distance is made closer to the first radial distance than the second radial distance.

12. The method as recited in claim 1, wherein said determining the first radial profile further comprises:

measuring a third existing distance between the polishing surface and the surface of the platen at a radial distance from the rotational axis of the platen midway between the first and second radial distances; and

determining if the polishing pad is eligible for conditioning dependent upon the third existing distance.

13. The method as recited in claim 12, wherein if the third existing distance is between the first and second existing distances, the polishing pad is eligible for conditioning.

14. The method as recited in claim 1, wherein the contact between the abrasive surface and the polishing surface causes the polishing surface to be abraded, and wherein the contact is continued until the desired second radial profile is achieved.

15. The method as recited in claim 1, wherein the polishing surface is adapted for placement upon a semiconductor wafer.

16. The method as recited in claim 1, further comprising applying the polishing surface against a semiconductor wafer.

17. A method for conditioning a polishing surface of a polishing pad mounted upon a platen that is rotatable about a rotational axis of the platen, the method comprising:

measuring a first distance between the polishing surface and the platen at a first radial distance;

measuring a second distance between the polishing surface and the platen at a second radial distance; and

contacting the polishing surface with an abrasive surface rotatable about an axis central to and perpendicular to the abrasive surface such that a rotational axis of the abrasive surface is configured at a third radial distance from the rotational axis of the platen, wherein the third radial distance is dependent upon the first and second measured distances between the polishing surface and the platen.