Modular gridless ion source

• US 6,608,431 B1
• Filed: 05/24/2002
• Issued: 08/19/2003
• Est. Priority Date: 05/24/2002
• Status: Active Grant

• Current Assignee: Kaufman & Robinson, Inc.
• Original Assignee: Kaufman & Robinson, Inc.
• Inventors: Kaufman, Harold R.
• Primary Examiner(s): LE, HOANGANH T
• Application Number:
  US10/154,753
• Time in Patent Office: 452 Days
• Field of Search: F03/H.500, 313/231.31, 313/161, 313/230, 313/359.1, 313/231.61, 313/111.9, 315/111.41, 315/111.61, 315/111.81, 250/427, 602/02
• US Class Current: 313/231.31
• CPC Class Codes: H01J 27/146 End-Hall type ion sources, wherein the magnetic field confines the electrons in a central cylinder

Abstract

In accordance with one embodiment of the present invention, the ion-beam apparatus takes the form of an end-Hall ion source in which the detachable anode module incorporates the outer pole piece and includes an enclosure around the anode that both minimizes the loss of working gas and confines sputter contamination to the interior of this enclosure. This detachable anode module is substantially smaller than the entire end-Hall ion source, weighs substantially less, and can be duplicated for significantly less cost than the duplication of the entire ion source. In general, the components of the magnetic circuit determine the overall size, weight, and much of the cost of a gridless ion source. The reduced size, weight, and cost of the detachable anode module compared to the entire ion source is due to most of the magnetic circuit being excluded from the detachable module.

Claims

1. A gridless ion-source apparatus comprising:

(a) an electron-emitting cathode means;

(b) anode module means comprising;

(i) an anode;

(ii) enclosure means surrounding said anode, wherein said enclosure means includes wall means, an internal end, and an open external end;

(c) means for introducing an ionizable working gas into said enclosure;

(d) magnetic-circuit module means for generating a magnetic field between said anode and said cathode means;

wherein said anode module means is supported by, and is detachable from, said magnetic-circuit module means.

2. Apparatus in accordance with claim 1, wherein said magnetic-circuit module means comprises one or more permanent magnets.

3. Apparatus in accordance with claim 1, wherein said magnetic-circuit module means comprises one or more electromagnets.

4. Apparatus in accordance with claim 1, wherein said cathode means is detachably supported by said anode module means or said magnetic-circuit module means.

5. Apparatus in accordance with claim 1, wherein said magnetic-circuit module means includes a magnetically permeable outer shell and magnetically permeable back plate.

6. Apparatus in accordance with claim 5, wherein said magnetic-circuit module means further comprises a supply line for said ionizable working gas, and wherein said internal end of said enclosure includes an aperture for receiving said ionizable working gas from said supply line.

7. Apparatus in accordance with claim 5, wherein said magnetic-circuit module means further comprises electrical connection means for providing electrical power to said anode.

8. Apparatus in accordance with claim 7, wherein said anode module means further comprises electrical connection means extending through said internal end of said enclosure means for detachably connecting said anode to said electrical connection means in said magnetic-circuit module means.

9. Apparatus in accordance with claim 6, wherein said magnetic-circuit module means further comprises electrical connection means for providing electrical power to said cathode means.

10. Apparatus in accordance with claim 9, wherein said anode module means further comprises electrical connection means extending through said anode module means for detachably connecting said cathode means to said respective electrical connection means in said magnetic-circuit module means.

11. Apparatus in accordance with claim 1, wherein said gridless ion-source apparatus is of the end-Hall type.

12. Apparatus in accordance with claim 1, wherein said gridless ion-source apparatus is of the closed-drift type.

13. A gridless ion-source apparatus comprising:

(a) an electron-emitting cathode means;

(b) anode module means comprising;

(i) an anode;

(ii) non-magnetic enclosure means surrounding said anode, wherein said enclosure means includes wall means, an internal end, and an open external end;

(c) means for introducing an ionizable working gas into said enclosure;

(d) magnetic-circuit module means for generating a magnetic field between said anode and said cathode means;

wherein said anode module means is supported by, and is detachable from, said magnetic-circuit module means.

14. Apparatus in accordance with claim 13, wherein said magnetic-circuit module means comprises one or more permanent magnets.

15. Apparatus in accordance with claim 13, wherein said magnetic-circuit module means comprises one or more electromagnets.

16. Apparatus in accordance with claim 13, wherein said cathode means is detachably supported by said anode module means or said magnetic-circuit module means.

17. Apparatus in accordance with claim 13, wherein said magnetic-circuit module means includes a magnetically permeable outer shell and magnetically permeable back plate.

18. Apparatus in accordance with claim 17, wherein said magnetic-circuit module means further comprises a supply line for said ionizable working gas, and wherein said internal end of said enclosure includes an aperture for receiving said ionizable working gas from said supply line.

19. Apparatus in accordance with claim 17, wherein said magnetic-circuit module means further comprises electrical connection means for providing electrical power to said anode.

20. Apparatus in accordance with claim 19, wherein said anode module means further comprises electrical connection means extending through said internal end of said enclosure means for detachably connecting said anode to said electrical connection means in said magnetic-circuit module means.

21. Apparatus in accordance with claim 17, wherein said magnetic-circuit module means further comprises electrical connection means for providing electrical power to said cathode means.

22. Apparatus in accordance with claim 21, wherein said anode module means further comprises electrical connection means extending through said anode module means for detachably connecting said cathode means to said respective electrical connection means in said magnetic-circuit module means.

23. Apparatus in accordance with claim 13, wherein said gridless ion-source apparatus is of the end-Hall type.

24. Apparatus in accordance with claim 13, wherein said gridless ion-source apparatus is of the closed-drift type.