Hidden flexure ultra planar optical routing element

• US 6,608,712 B2
• Filed: 05/15/2001
• Issued: 08/19/2003
• Est. Priority Date: 05/15/2001
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: Network Photonics, Inc.
• Inventors: Michalicek, M. Adrian
• Primary Examiner(s): Lester, Evelyn
• Application Number:
  US09/859,069
• Publication Number:
  US 20020172445A1
• Time in Patent Office: 826 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/298
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.

Claims

1. A structure for steering light, comprising:

a base layer;

a first conductive layer overlying a portion of said base layer;

a flexure assembly overlying a portion of said first conductive layer; and

a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer;

wherein a portion of underlying edges of said flexure assembly and said beam layer are adapted to contact said base layer upon rotation of said beam layer.

2. The structure as in claim 1 wherein said base layer comprises a non-conductive material.

3. The structure as in claim 1 further comprising a second conductive layer overlying a portion of said first conductive layer, said first conductive layer comprising a greater surface area than said second conductive layer.

4. The structure as in claim 3 wherein said first and second conductive layers comprise polysilicon.

5. The structure as in claim 3 wherein said first conductive layer and said second conductive layer each have a central portion separate from a remaining portion of the respective conductive layers, said central portions coupled together.

6. The structure as in claim 5 wherein said flexure assembly comprises a central portion that is coupled to said second conductive layer central portion.

7. The structure as in claim 3 further comprising a third conductive layer overlying a portion of said second conductive layer, said third conductive layer having a smaller surface area than said second conductive layer.

8. The structure as in claim 7 wherein said first, second and third conductive layers have at least portions thereof electrically coupled together, said electrically coupled portions adapted to operate together as a single electrode.

9. The structure as in claim 7 wherein said first, second and third conductive layers are in separate planes.

10. The structure as in claim 1 wherein said beam layer comprises an electrically conductive material, said beam layer being electrically isolated from at least portions of said first conductive layer.

11. The structure as in claim 1 wherein said flexure assembly comprises a torsion beam having first and second generally parallel arms each coupled to a central beam that is generally orthogonal to said first and second arms.

12. The structure as in claim 11 wherein said first and second arms are coupled to said beam layer.

13. The structure as in claim 1 wherein said underlying edges of said flexure assembly and said beam layer are configured to simultaneously contact said base layer upon rotation of said beam layer.

14. The structure as in claim 1 wherein said beam layer comprises a substantially planar upper surface when said underlying edges are in contact with said base layer.

15. A method of steering light, comprising:

providing the structure for steering light as provided in claim 1;

applying a voltage to said first conductive layer to rotate said beam layer to a desired position, said beam layer having a substantially planar upper surface when in said desired position; and

directing a light at said beam layer.

16. The structure as in claim 1 wherein a portion of said flexure assembly comprises an I-beam.

17. An apparatus for steering light, said apparatus comprising:

a base layer;

a first conductive layer overlying said base layer;

a second conductive layer;

a third conductive layer, wherein each of said first, second and third conductive layers are in a separate plane from the other two conductive layers, and each of said conductive layers comprise at least a portion thereof that is electrically coupled to at least a portion of said other two conductive layers; and

a beam layer coupled to a rotation device, said rotation device positioned between at least one of said conductive layers and said beam layer;

wherein said rotation device and beam layer rotate in response to a voltage applied to said coupled portions of said conductive layers.

18. The apparatus as in claim 17, wherein an underlying edge of said beam layer is adapted to contact said base layer at a first location when a first voltage is applied to said electrically coupled conductive layer portions, and to contact said base layer at a second location when a second voltage is applied to said electrically coupled conductive layer portions.

19. The apparatus as in claim 17 wherein said rotation device and said beam layer further comprise underlying edges which are adapted to contact said base layer when said voltage is applied to said electrically coupled conductive layer portions.

20. The apparatus as in claim 17 wherein said rotation device comprises a torsion beam, said torsion beam underlying said beam layer and having at least a portion thereof comprising an I-beam.

21. The apparatus as in claim 17 wherein said first conductive layer coupled portion has a larger surface area than a surface area of said second conductive layer coupled portion.

22. The apparatus as in claim 17, wherein said second conductive layer coupled portion has a larger surface area than a surface area of said third conductive layer coupled portion.

23. The apparatus as in claim 22 wherein said rotation device is coupled to said second conductive layer, said third conductive layer being disposed between said second conductive and said beam layer.

24. A method of making an apparatus for steering light, said method comprising:

providing a base layer having a first portion and a second portion;

forming first and second stacked electrodes on said first portion and said second portion, said stacked electrodes on said first portion electrically isolated from said stacked electrodes on said second portion;

forming a flexure assembly coupled to said base layer and electrically isolated from said first and second stacked electrodes; and

forming a beam layer coupled to said flexure assembly.

25. The method as in claim 24 wherein said flexure assembly comprises an I-beam configuration.

26. The method as in claim 24 wherein said first stacked electrode is formed overlying said base layer and said second stacked electrode is formed overlying said first stacked electrode, said first stacked electrode comprising a greater surface area than said a second stacked electrode surface area.

27. The method as in claim 26 further comprising forming a third stacked electrode overlying said second stacked electrode, said third stacked electrode comprising a greater surface area than said second stacked electrode surface area.

28. A structure for steering light, comprising:

a base layer;

a first conductive layer overlying a portion of said base layer;

a flexure assembly, with a portion of said flexure assembly comprising an I-beam, said flexure assembly overlying a portion of said first conductive layer; and

a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer;

wherein a portion of underlying edges of said flexure assembly and said beam layer are adapted to contact said base layer upon rotation of said beam layer.

29. The structure as in claim 28 wherein said beam layer comprises a substantially planar upper surface when said underlying edges are in contact with said base layer.

30. A structure for steering light, comprising:

a base layer;

a first conductive layer overlying a portion of said base layer;

a second conductive layer overlying a portion of said first conductive layer, said first conductive layer comprising a greater surface area than said second conductive layer;

a flexure assembly, with a portion of said flexure assembly comprising an I-beam, said flexure assembly overlying a portion of said first conductive layer; and

a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer;

wherein said first conductive layer and said second conductive layer each have a central portion separate from a remaining portion of the respective conductive layers, said central portions coupled together.

31. The structure as in claim 30, wherein said flexure assembly comprises a central portion that is coupled to said second conductive layer central portion.

32. A structure for steering light, comprising:

a base layer;

a first conductive layer overlying a portion of said base layer;

a second conductive layer overlying a portion of said first conductive layer, said first conductive layer comprising a greater surface area than said second conductive layer;

a third conductive layer overlying a portion of said second conductive layer, said third conductive layer having a smaller surface area than said second conductive layer;

a flexure assembly, with a portion of said flexure assembly comprising an I-beam, said flexure assembly overlying a portion of said first conductive layer; and

a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer.

33. The structure as in claim 32, wherein said first, second and third conductive layers have at least portions thereof electrically coupled together, said electrically coupled portions adapted to operate together as a single electrode.

34. The structure as in claim 32 wherein said first, second and third conductive layers are in separate planes.

35. A structure for steering light, comprising:

a base layer;

a stacked conductive element overlying a portion of the base layer, the stacked conductive element having a first section that is thicker than a second section;

a beam layer spaced apart from the base layer and coupled to a flexure assembly;

wherein the flexure assembly is adapted to permit rotation of the beam layer relative to the base layer and about an axis of rotation when a voltage is applied to the stacked conductive element; and

wherein the first section is disposed closer to the axis of rotation than is the second section.

36. The structure as in claim 35 wherein the stacked conductive element is a two-tier conductive element.

37. The structure as in claim 35 wherein the stacked conductive element is a three-tier conductive element.

38. The structure as in claim 35 wherein the voltage applied to the stacked conductive element to rotate the beam layer is less than a voltage needed to rotate the beam layer if the stacked conductive element was uniformly as thick as the second section.

39. The structure as in claim 35 wherein a portion of underlying edges of the flexure assembly and the beam layer are adapted to contact the base layer upon rotation of the beam layer.

40. The structure as in claim 39 wherein the beam layer comprises a substantially planar upper surface when the underlying edges are in contact with the base layer.