Dressing apparatus and polishing apparatus

• US 6,609,962 B1
• Filed: 05/17/2000
• Issued: 08/26/2003
• Est. Priority Date: 05/17/1999
• Status: Expired due to Term

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Wakabayashi, Satoshi, Nabeya, Osamu, Togawa, Tetsuji, Yamaguchi, Kuniaki, Takada, Nobuyuki
• Primary Examiner(s): Hail, III, Joseph J.
• Assistant Examiner(s): Thomas, David B.
• Application Number:
  US09/572,629
• Time in Patent Office: 1,196 Days
• Field of Search: 451/443, 451/287, 451/288, 451/56, 451/444, 451/268, 451/269, 451/21, 451/72
• US Class Current: 451/443
• CPC Class Codes: B24B 1/04 subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency polishing or abrading surfaces on work by means of tumbling apparatus B24B31/00, involving oscillating or vibrating containers B24B31/06; superfinishing surfaces on work, e.g. by means of abrading blocks reciprocating with high frequency, B24B35/00
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor

Abstract

A dressing apparatus is used for dressing a polishing surface of a polishing table used for polishing a workpiece such as a semiconductor wafer. The dressing apparatus for dressing apparatus comprises a dresser having a dressing surface for dressing the polishing surface, and the dressing surface has an area which covers an entire area of the polishing surface.

Claims

1. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:

a dresser having a dressing surface for dressing said polishing surface;

a sensor for detecting a frictional load between said polishing surface and said dressing surface directly or indirectly; and

a judgment device for judging whether dressing of said polishing surface progresses to a predetermined degree on the basis of an output of said sensor.

2. A dressing apparatus according to claim 1 wherein said sensor comprises a motor current detector for detecting current of at least one of a motor for rotating said polishing table and a motor for rotating said dresser.

3. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:

a dresser having a dressing surface for dressing said polishing surface, said dressing surface having a dimension in one direction which is longer than a dimension in said direction of a moving area of said polishing surface;

a moving mechanism for moving said dresser horizontally along said polishing surface; and

a prevention mechanism provided around the polishing surface of the polishing table for preventing said dresser from moving in a direction perpendicular to said polishing surface.

4. A dressing apparatus according to claim 3, wherein said prevention mechanism comprises a guide table provided around said polishing surface for supporting at least part of said dressing surface.

5. A dressing apparatus according to claim 3, wherein said prevention mechanism comprises a position detecting device for detecting a position of said dresser.

6. A dressing apparatus according to claim 3, further comprising a control mechanism for controlling a pressing amount of said dresser against said polishing surface.

7. The dressing apparatus according to claim 4 wherein a surface of said guide table and said polishing surface are flush with each other.

8. A dressing apparatus according to claim 6, wherein said control mechanism comprises a lifting/lowering cylinder and a stopper for determining a position of said dresser.

9. A dressing apparatus according to claim 3, wherein said polishing table performs no rotational motion about its own axis during dressing.

10. A dressing apparatus according to claim 3, wherein a moving velocity of said polishing surface is equal at every point on said polishing surface.

11. A dressing apparatus according to claim 3, wherein said polishing table makes a circulative translational motion.

12. A dressing apparatus according to claim 3, wherein the entire said moving area of said polishing surface is defined by an outer periphery of said polishing surface which makes said circulative translational motion.

13. A dressing apparatus according to claim 3, wherein said dresser performs no rotational motion about its own axis during dressing.

14. A dressing apparatus according to claim 3, wherein said moving mechanism comprises a translation mechanism for causing said dresser to perform a translation along said polishing surface.

15. A dressing apparatus according to claim 14, wherein said translation of said dresser is in a direction perpendicular to said one direction defining said dimension of said dresser.

16. A dressing apparatus according to claim 3, further comprising a dresser cleaning container for cleaning said dressing surface.

17. A dressing apparatus according to claim 3, wherein said dresser comprises a cylindrical roller which rotates about an axis parallel to said polishing surface and has a dressing surface on its outer circumferential surface.

18. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:

a dresser having a dressing surface for dressing said polishing surface; and

a dresser cleaning container for cleaning said dressing surface, said dresser cleaning container comprising;

a main cleaning container for receiving said dresser;

a cleaning liquid supply device for supplying a cleaning liquid to said main cleaning container;

a receiving container for receiving the cleaning liquid flowing out of said main cleaning container;

a drain hole provided in said receiving container for discharging the cleaning liquid from said receiving container;

an ultrasonic transducer for cleaning said dressing surface by ultrasonic vibration; and

a scrubbing member for scrubbing said dressing surface.

19. A dressing apparatus according to claim 18, wherein said dressing cleaning container comprises said scrubbing member which comprises a brush.

20. A dressing apparatus according to claim 18, wherein said dresser is immersed in said cleaning liquid in said container,

wherein a content volume of said container is 1.5 to 2.5 times larger than a volume of an immersed part of said dresser immersed in said cleaning liquid in said container.

21. A dressing apparatus according to claim 18, wherein said dresser comprises a diamond dresser.

22. A dressing apparatus according to claim 18 wherein said dresser comprises a brush.

23. A dressing apparatus according to claim 18, wherein said scrubbing member is rotated by a motor.