Dressing apparatus and polishing apparatus
First Claim
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1. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:
- a dresser having a dressing surface for dressing said polishing surface;
a sensor for detecting a frictional load between said polishing surface and said dressing surface directly or indirectly; and
a judgment device for judging whether dressing of said polishing surface progresses to a predetermined degree on the basis of an output of said sensor.
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Abstract
A dressing apparatus is used for dressing a polishing surface of a polishing table used for polishing a workpiece such as a semiconductor wafer. The dressing apparatus for dressing apparatus comprises a dresser having a dressing surface for dressing the polishing surface, and the dressing surface has an area which covers an entire area of the polishing surface.
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Citations
23 Claims
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1. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:
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a dresser having a dressing surface for dressing said polishing surface;
a sensor for detecting a frictional load between said polishing surface and said dressing surface directly or indirectly; and
a judgment device for judging whether dressing of said polishing surface progresses to a predetermined degree on the basis of an output of said sensor. - View Dependent Claims (2)
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3. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:
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a dresser having a dressing surface for dressing said polishing surface, said dressing surface having a dimension in one direction which is longer than a dimension in said direction of a moving area of said polishing surface;
a moving mechanism for moving said dresser horizontally along said polishing surface; and
a prevention mechanism provided around the polishing surface of the polishing table for preventing said dresser from moving in a direction perpendicular to said polishing surface. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:
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a dresser having a dressing surface for dressing said polishing surface; and
a dresser cleaning container for cleaning said dressing surface, said dresser cleaning container comprising;
a main cleaning container for receiving said dresser;
a cleaning liquid supply device for supplying a cleaning liquid to said main cleaning container;
a receiving container for receiving the cleaning liquid flowing out of said main cleaning container;
a drain hole provided in said receiving container for discharging the cleaning liquid from said receiving container;
an ultrasonic transducer for cleaning said dressing surface by ultrasonic vibration; and
a scrubbing member for scrubbing said dressing surface. - View Dependent Claims (19, 20, 21, 22, 23)
wherein a content volume of said container is 1.5 to 2.5 times larger than a volume of an immersed part of said dresser immersed in said cleaning liquid in said container. -
21. A dressing apparatus according to claim 18, wherein said dresser comprises a diamond dresser.
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22. A dressing apparatus according to claim 18 wherein said dresser comprises a brush.
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23. A dressing apparatus according to claim 18, wherein said scrubbing member is rotated by a motor.
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Specification