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Dressing apparatus and polishing apparatus

  • US 6,609,962 B1
  • Filed: 05/17/2000
  • Issued: 08/26/2003
  • Est. Priority Date: 05/17/1999
  • Status: Expired due to Term
First Claim
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1. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:

  • a dresser having a dressing surface for dressing said polishing surface;

    a sensor for detecting a frictional load between said polishing surface and said dressing surface directly or indirectly; and

    a judgment device for judging whether dressing of said polishing surface progresses to a predetermined degree on the basis of an output of said sensor.

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