Microscopic batteries for MEMS systems

• US 6,610,440 B1
• Filed: 07/28/2000
• Issued: 08/26/2003
• Est. Priority Date: 03/10/1998
• Status: Expired due to Fees

• Current Assignee: Bipolar Technologies Corporation
• Original Assignee: Bipolar Technologies Corporation
• Inventors: Harb, John N., Salmon, Linton G., LaFollette, Rodney M.
• Primary Examiner(s): Kalafut, Stephen
• Assistant Examiner(s): ALEJANDRO, RAYMOND
• Application Number:
  US09/627,959
• Time in Patent Office: 1,124 Days
• Field of Search: 429/122, 429/7, 429/121, 429/304, 429/236, 429/234, 429/124, 429/144, 429/157, 429/208, 296/231, 296/234, 296/235, 204/421, 216/13, 216/37, 216/54
• US Class Current: 429/122
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01M 10/0436 Small-sized flat cells or batteries for portable equipment
• CPC Class Codes: H01M 10/287 Small-sized flat cells or batteries for portable equipment H01M10/283 and H01M10/286 take precedence
• CPC Class Codes: H01M 10/30 Nickel accumulators H01M10/34 takes precedence
• CPC Class Codes: H01M 10/342 Gastight lead accumulators H01M10/121 takes precedence
• CPC Class Codes: H01M 10/42 Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells H01M10/60 takes precedence
• CPC Class Codes: H01M 10/425 Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing printed circuits H05K1/00
• CPC Class Codes: H01M 50/11 having a chip structure, e.g. micro-sized batteries integrated on chips
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49108 Electric battery cell making
• CPC Class Codes: Y10T 29/49115 including coating or impregnating

Abstract

Microscopic batteries, integratable or integrated with microelectromechanical systems or other microscopic circuits, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed, among which comprise closed system microscopic batteries for internal storage of electricity using interval reactants only, which comprise microscopic electrodes, electrolyte and reservoir for the electrolyte.

Claims

1. A microfabricated battery comprising a pair of microscopic electrodes, a microscopic amount of electrolyte disposed in a microscopic site between the electrodes, the microfabricated battery comprising an area as small as one square micron.