Selectively doped electrostatic discharge layer for an integrated circuit sensor

• US 6,610,555 B1
• Filed: 11/28/2000
• Issued: 08/26/2003
• Est. Priority Date: 02/17/1998
• Status: Expired due to Term

• Current Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Inventors: Bryant, Frank R., Thomas, Danielle A.
• Primary Examiner(s): Zarabian, Amir
• Assistant Examiner(s): Thomas, Toniae M.
• Application Number:
  US09/724,847
• Time in Patent Office: 1,001 Days
• Field of Search: 438/48, 438/50, 438/51, 438/931, 438/381, 438/518
• US Class Current: 438/48
• CPC Class Codes: G06V 40/1329 Protecting the fingerprint sensor against damage caused by the finger
• CPC Class Codes: Y10S 438/931 Silicon carbide semiconductor
• CPC Class Codes: Y10S 438/953 Making radiation resistant device
• CPC Class Codes: Y10S 438/958 Passivation layer

Abstract

A structure and method for creating an integrated circuit passivation structure including, a circuit, a dielectric, and metal plates over which an insulating layer is disposed that electrically isolates the circuit, and a discharge layer that is deposited to form the passivation structure that protects the circuit from electrostatic discharges caused by, e.g., a finger, is disclosed. The discharge layer additionally contains dopants selectively deposited to increase electrostatic discharge carrying capacity while maintaining overall sensing resolution.

Claims

1. A method for fabricating an electrostatic discharge protection circuit for an integrated sensor comprising:

forming sensor circuitry that partially covers a substrate;

depositing an insulating layer over the substrate;

depositing a discharge layer over the insulating layer; and

doping portions of the discharge layer that are not over the sensor circuitry.

2. The method of claim 1, further including masking portions of the discharge layer that are over the sensor circuitry before doping portions of the discharge layer that are not over the sensor circuitry.

4. The method of claim 1 wherein the discharge layer is doped with a dopant selected from at least one of boron, phosphorus, and arsenic.

5. The method of claim 1 wherein the discharge layer comprises SiC_x wherein x is less than 1.

6. The method of claim 1, further including forming a silicon carbide layer over the insulating layer.

7. The method of claim 6 wherein the silicon carbide layer is formed above the discharge layer.

3. The method of 1, further including coupling the doped portions of the discharge layer to a system ground.

8. A method for fabricating an electrostatic discharge circuit for an integrated circuit, the method comprising:

forming a plurality of sensor circuits in an array partially covering a substrate, the circuits mutually offset by intervening offset areas;

depositing a passivation structure over the circuits and intervening offset areas, the passivation structure including;

a dielectric insulation layer deposited adjacent to the circuits and intervening offset areas; and

a discharge layer separated from the circuits and offset areas by the dielectric insulation layer, a portion of the discharge layer over the intervening offset areas having a doping concentration that is high relative to a doping concentration of a portion of the discharge layer over the circuits.

9. The method according to claim 8, further comprising:

forming a ground pad on the substrate; and

electrically coupling the portion of the discharge layer having a relatively high doping concentration to the ground pad.

10. The method according to claim 9, wherein the discharge layer comprises SiC_x, wherein X determines hardness and conductivity parameters of the discharge layer.

11. The method according to claim 10, further comprising depositing a mechanical protection layer over the insulation layer;

and

wherein the discharge layer is deposited over the mechanical protection layer.

12. The method according to claim 10, further comprising depositing a mechanical protection layer over the discharge layer.

13. The method according to claim 10, wherein the discharge layer is deposited concurrently with a mechanical protection layer.

14. The method according to claim 13, wherein deposition of the concurrently deposited discharge and mechanical protection layers comprises depositing silicon and carbon in a varying ratio to form the discharge and mechanical protection layers.

15. A method for fabricating an electrostatic discharge circuit for a fingerprint sensor on an integrated circuit, the method comprising:

forming a plurality of fingerprint sensor circuits on a substrate in an array sized to receive a fingerprint, the circuits separated by non-circuit areas intervening therebetween;

forming a plurality of ground pads on the substrate;

depositing a dielectric insulation layer over the circuits and non-circuit areas;

depositing a discharge layer over the dielectric insulation layer,

selectively doping portions of the discharge layer over the non-circuit areas; and

electrically coupling the portions of the discharge layer over the non-circuit areas to the ground pads.

16. The method according to claim 15, wherein selectively doping the discharge layer includes doping the portions over the non-circuit areas with a dopant to maximize charge carrying capacity therein.

17. The method according to claim 16 wherein the dopant is selected from at least one of:

arsenic, phosphorus, and boron.

18. The method according to claim 15, further comprising:

doping portions of the discharge layer over the circuits and over the non-circuit areas; and

wherein selectively doping portions of the discharge layer over the non-circuit areas comprises doping the portions of the discharge layer over the non-circuit areas heavily than the portions over the circuits.

19. The method according to claim 18, wherein selectively doping portions of the discharge layer over the non-circuit areas further comprises partially masking the portions of the discharge layer over the circuit areas.

20. The method according to claim 19, further comprising depositing a mechanical protection layer over the discharge layer.

21. The method according to claim 19, further comprising depositing a mechanical protection layer over the insulation layer and under discharge layer.

22. The method according to claim 19, further comprising forming a mechanical protection layer in combination with the discharge layer, wherein a difference in stoichiometric ratios of silicon and carbon differentiates the mechanical protection and discharge layers.