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Electrostatic actuator and camera module using the same

  • US 6,611,079 B2
  • Filed: 10/31/2001
  • Issued: 08/26/2003
  • Est. Priority Date: 10/31/2000
  • Status: Expired due to Term
First Claim
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1. An electrostatic actuator, comprising:

  • a first stator section including a first electrode array including first, second, and third electrodes arranged at a predetermined pitch in a first direction;

    a second stator section arranged to face the first stator section and to define a space between the first and second stator sections, and including a second electrode array including fourth and fifth electrodes;

    a movable section arranged in the space and including a first electrode section facing the first electrode array and a second electrode section facing the second electrode array, the first and second electrode sections being maintained at a predetermined floating potential; and

    a driving circuit configured to apply at least first, second, third and fourth DC voltage signals to the first and second electrode arrays, alternatively, each DC voltage signal having a first level higher than the predetermined floating potential and a second level lower than the predetermined potential, the first DC voltage signal being applied to the adjacent first and second electrodes of the first electrode array to attract the first electrode section of the movable section during a first period, the first and second electrodes of the first electrode array being maintained at the first and second levels during the first period, respectively, the second DC voltage signal being applied to the fourth and fifth electrodes of the second electrode array to attract the second electrode section of the movable section during a second period, the fourth electrode of the second electrode array being maintained at one of the first and second levels during the second period, and the fifth electrode of the second electrode array being maintained at the other of first and second levels during the second period, respectively, the third DC voltage signal being applied to the adjacent second and third electrodes of the first electrode array to attract the first electrode section of the movable section during a third period, the second and third electrodes of the first electrode array being maintained at the first and second levels during the third period, respectively, the fourth DC voltage signal being applied to the fourth and fifth electrodes of the second electrode array to attract the second electrode section of the movable section during a fourth period, the fourth electrode of the second electrode array being maintained at one of the first and second levels during the fourth period, and the fifth electrode of the second electrode array being maintained at the other of first and second levels during the fourth period, and the movable section being moved in the first direction in accordance with the application of the first, second, third, and fourth DC voltage signals.

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