Inductive measuring device for detecting relative position and/or movement
First Claim
1. An inductive measuring device for detecting position, comprising a coil structure and a measuring scale having at least one graduation of variable reluctance or conductivity, wherein the coil structure comprises a combination of coils including at least one emitter element and a plurality of receiver pairs, said at least one emitter element and said receiver pairs being in the form of planar spiral turns arranged in a multi-ply arrangement, each receiver pair having two differentially connected receiver elements interconnected in phase opposition for the purpose of signal generation for each of at least two measuring channels, and wherein said at least one emitter element is excited with an AC voltage so as to emit a periodically alternating electromagnetic field which is inductively coupled to the receiver elements as a function of the relative position in the measuring direction relative to the measuring scale, whereby relative movement between the measuring scale and the coil structure inductively generates in the receiver coil pairs at least two phase-shifted signals, and means for generating from said phase-shifted receiver signals at least one output signal which is representative of said relative movement and which is compensated for offset and/or sinusoidal shape and/or amplitude.
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Accused Products
Abstract
An inductive length measuring system which, by scanning a scale with a graduation of periodically variable reluctance and a coil system in a linear arrangement, can detect information relating to the position and/or the movement of the coil system with reference to the scale. The coil structure comprises a multi-ply arrangement of a combination of coils in the form of planar spiral windings or turns having a plurality of receiver pairs, each pair having two differentially connected receiver elements which can be interconnected for the purpose of signal generation for each of at least two measuring channels, and wherein at least one emitter element is provided which is inductively coupled to the receiver elements as a function of the relative position in the measuring direction relative to the measuring scale, thereby generating at least one output signal which is compensated for offset and/or sinusoidal shape and/or amplitude.
98 Citations
18 Claims
- 1. An inductive measuring device for detecting position, comprising a coil structure and a measuring scale having at least one graduation of variable reluctance or conductivity, wherein the coil structure comprises a combination of coils including at least one emitter element and a plurality of receiver pairs, said at least one emitter element and said receiver pairs being in the form of planar spiral turns arranged in a multi-ply arrangement, each receiver pair having two differentially connected receiver elements interconnected in phase opposition for the purpose of signal generation for each of at least two measuring channels, and wherein said at least one emitter element is excited with an AC voltage so as to emit a periodically alternating electromagnetic field which is inductively coupled to the receiver elements as a function of the relative position in the measuring direction relative to the measuring scale, whereby relative movement between the measuring scale and the coil structure inductively generates in the receiver coil pairs at least two phase-shifted signals, and means for generating from said phase-shifted receiver signals at least one output signal which is representative of said relative movement and which is compensated for offset and/or sinusoidal shape and/or amplitude.
Specification