Inspection system and method for manufacturing electronic devices using the inspection system
First Claim
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1. An inspection system comprising:
- an inspection machine for inspecting a work which is processed in a manufacturing process and providing an inspected result; and
an analysis system for outputting an inspection history list obtained by making calculations from the inspected result, said inspection history list showing a matrix of first information as to inspection processes in which the work is inspected or manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the work inspected by the inspection machine.
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Abstract
An inspection system comprises an inspection machine for inspecting a work which is processed in one of the manufacturing processes of a manufacturing line and an analysis system for outputting an inspection history list obtained by making calculations from the inspected result. The inspection history list shows a matrix of first information as the inspection processes in which the work is inspected or the manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the works inspected by the inspection machine.
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Citations
17 Claims
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1. An inspection system comprising:
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an inspection machine for inspecting a work which is processed in a manufacturing process and providing an inspected result; and
an analysis system for outputting an inspection history list obtained by making calculations from the inspected result, said inspection history list showing a matrix of first information as to inspection processes in which the work is inspected or manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the work inspected by the inspection machine. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An inspection system comprising:
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an inspection machine for inspecting a work which is processed in a manufacturing process; and
an analysis system for displaying a matrix of first information as to inspection processes in which the work is inspected or manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the work inspected by the inspected machine.
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12. An inspection system comprising:
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an inspection machine for inspecting a work which is processed in a manufacturing process; and
an analysis system for displaying both inspection processes in which the work is inspected and inspection processes in which the work is not inspected or both manufacturing processes corresponding to the inspection processes in which the work is inspected and manufacturing processes corresponding to the inspection processes in which the work is not inspected.
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13. An analysis system comprising:
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storing means for storing inspection results of an inspected work; and
outputting means for outputting an inspection history list calculated by using said stored inspection results, said inspection history list showing a matrix of first information as to inspection processes in which the work is inspected or manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the work inspected by the inspected machine. - View Dependent Claims (14)
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15. A method for producing electrical devices comprising:
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a processing step for processing works in a manufacturing line;
a inspecting step for inspecting a work which is processed in one of the manufacturing processes of the manufacturing line by an inspection machine to produce an inspected result;
a analyzing step for analyzing defects information obtained by making calculations from the inspected result, said defects information showing a matrix of first information as to inspection processes in which the work is inspected or manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to a plurality of the works inspected by the inspected machine; and
a controlling step for controlling the manufacturing line on the basis of the result of the analysis. - View Dependent Claims (16, 17)
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Specification