Integrated circuit inductors
First Claim
1. An inductor comprising:
- a perforated substrate; and
a triangular coil having an inductance of at least 0.3 nanohenrys interlaced with the perforated substrate.
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Accused Products
Abstract
The invention relates to an inductor comprising a plurality of interconnected conductive segments interwoven with a substrate. The inductance of the inductor is increased through the use of coatings and films of ferromagnetic materials such as magnetic metals, alloys, and oxides. The inductor is compatible with integrated circuit manufacturing techniques and eliminates the need in many systems and circuits for large off chip inductors. A sense and measurement coil, which is fabricated on the same substrate as the inductor, provides the capability to measure the magnetic field or flux produced by the inductor. This on chip measurement capability supplies information that permits circuit engineers to design and fabricate on chip inductors to very tight tolerances.
47 Citations
24 Claims
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1. An inductor comprising:
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a perforated substrate; and
a triangular coil having an inductance of at least 0.3 nanohenrys interlaced with the perforated substrate. - View Dependent Claims (2, 3, 4)
at least one test lead attached to the coil.
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4. The inductor of claim 3, wherein the pair of test lead is capable of being decoupled from the coil using a laser.
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5. An inductor comprising:
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a perforated substrate;
a triangular coil interlaced with the perforated substrate; and
a test lead attached to the triangular coil. - View Dependent Claims (6, 7)
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8. An inductor comprising:
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a perforated substrate;
a rectangular coil interlaced with the perforated substrate; and
a pair of test leads attached to the rectangular coil. - View Dependent Claims (9, 10)
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11. An inductor comprising:
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a perforated silicon carbide substrate;
a circular coil interlaced with the perforated silicon carbide substrate; and
at least one test lead attached to the circular coil. - View Dependent Claims (12, 13)
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14. An inductor comprising:
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a perforated silicon carbide substrate;
a circular coil interlaced with the perforated silicon carbide substrate; and
a test lead attached to the circular coil. - View Dependent Claims (15, 16)
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17. An inductor comprising:
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a perforated substrate;
a circular coil interlaced with the perforated substrate; and
a test lead attached to the circular coil. - View Dependent Claims (18, 19)
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20. An inductor comprising:
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a perforated germanium substrate including a plurality of perforations;
a rectangular coil laced through the plurality of perforations; and
a pair of test leads attached to the rectangular coil. - View Dependent Claims (21, 22, 23, 24)
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Specification