Pressure transducer assembly with thermal shield

• US 6,612,176 B2
• Filed: 12/28/2000
• Issued: 09/02/2003
• Est. Priority Date: 12/28/2000
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Blankenship, Stephen D., Mathew, Santhi E., Quigley, Claudia J., Mindlin, Leonid, Poulin, James M.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Mack, Corey D.
• Application Number:
  US09/750,428
• Publication Number:
  US 20020083774A1
• Time in Patent Office: 978 Days
• Field of Search: 737/18, 737/15, 737/24, 737/06, 737/14, 737/56, 361/283.1, 361/283.3, 361/283.4
• US Class Current: 73/708
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 19/14 Housings G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A capacitive pressure transducer including a heater shell, a capacitive pressure sensor, an electronics assembly and a thermal barrier is presented. The sensor and the electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.

Claims

1. A pressure transducer, comprising:

(A) a thermally conductive heater shell;

(B) a capacitive pressure sensor disposed in the shell, the sensor including a flexible diaphragm and a conductor, a capacitance between the diaphragm and conductor being indicative of a pressure on the diaphragm;

(C) an electronics assembly disposed in the shell, the assembly being electrically connected to the sensor, the assembly generating a signal representative of the capacitance;

(D) a thermally conductive plate disposed in the heater shell, the plate being disposed between the sensor and the assembly; and

(E) a thermally conductive spring disposed in the shell, the spring contacting an outer periphery of the plate and the shell.

2. A pressure transducer according to claim 1, the heater shell defining an interior volume, the plate and spring dividing the volume into an upper region and a lower region, the sensor being disposed in the lower region, the electronics assembly being disposed in the upper region.

3. A pressure transducer according to claim 1, the plate defining one or more apertures.

4. A pressure transducer according to claim 3, the transducer further including one or more wires for electrically connecting the sensor and the electronics assembly, the one or more wires extending through the one or more apertures.

5. A pressure transducer according to claim 1, wherein the plate comprises aluminum.

6. A pressure transducer according to claim 1, wherein the spring comprises a coiled wire.

7. A pressure transducer according to claim 1, wherein the spring comprises a wire mesh.

8. A pressure transducer according to claim 1, wherein the spring comprises copper.

9. A pressure transducer according to claim 1, further including a heater, the heater being fixed relative to the heater shell.

10. A pressure transducer according to claim 1, further comprising an outer shell enclosing the heater shell.

11. A pressure transducer, comprising:

(A) an enclosure;

(B) a capacitive pressure sensor disposed in the enclosure, the sensor including a flexible diaphragm and a conductor, a capacitance between the diaphragm and conductor being indicative of a pressure on the diaphragm;

(C) an electronics assembly disposed in the enclosure, the assembly being electrically connected to the sensor, the assembly generating a signal representative of the capacitance;

(D) a thermally conductive plate disposed in the enclosure, the plate being disposed between the sensor and the assembly; and

(E) a thermally conductive spring disposed in the enclosure, the spring contacting an outer periphery of the plate and the enclosure.

12. A pressure transducer according to claim 11, further comprising an outer shell enclosing the enclosure.

13. A pressure transducer, comprising:

(A) an external shell;

(B) a thermally conductive shell disposed within the external shell;

(C) a heater coupled to the thermally conductive shell;

(D) a capacitive sensor disposed within the thermally conductive shell, the capacitive sensor including a flexible diaphragm and a conductor, a capacitance between the diaphragm and the conductor being indicative of a pressure on the diaphragm;

(E) an electronics assembly disposed within the thermally conductive shell, the electronics assembly being electrically connected to the capacitive sensor, the electronics assembly generating a signal representative of the capacitance;

(F) a thermally conductive plate disposed within the thermally conductive shell, the plate being disposed between the capacitive sensor and the electronics assembly; and

(G) a thermally conductive spring disposed within the thermally conductive shell, the spring contacting an outer periphery of the plate and an inner periphery of the thermally conductive shell.

14. A pressure transducer according to claim 13, the thermally conductive shell defining an interior volume, the plate and spring dividing the interior volume into a first region and a second region, the capacitive sensor being disposed within the first region and the electronics assembly being disposed within the second region.

15. A pressure transducer according to claim 13, the plate defining one or more apertures.

16. A pressure transducer according to claim 15, the transducer further including one or more wires for electrically connecting the sensor and the electronics assembly, the one or more wires extending through the one or more apertures.

17. A pressure transducer according to claim 13, wherein the plate comprises aluminum.

18. A pressure transducer according to claim 13, wherein the spring comprises a coiled wire.

19. A pressure transducer according to claim 13, wherein the spring comprises a wire mesh.

20. A pressure transducer according to claim 13, wherein the spring comprises copper.

21. A pressure transducer according to claim 13, wherein the heater is fixed to an outer surface of the thermally conductive shell.