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Supercritical fluid delivery and recovery system for semiconductor wafer processing

  • US 6,612,317 B2
  • Filed: 04/18/2001
  • Issued: 09/02/2003
  • Est. Priority Date: 04/18/2000
  • Status: Expired due to Fees
First Claim
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1. A continuous flow fluid delivery and recovery system for supporting the operation of a supercritical phase process in a batch-operated process chamber, comprising(a) a pressurized fluid delivery system including a process fluid supply system and pump for supplying a process fluid at a pre-process pressure, and a heater for heating and maintaining said process fluid under said pre-process pressure at a pre-process temperature, said pre-process pressure and said pre-process temperature in combination placing said process fluid in supercritical phase, (b) a process byproducts recovery system for collecting byproducts of said process, said recovery system including means for recovering said process fluid from said byproducts and returning said process fluid to said process fluid supply system, (c) means for controlling temperature within said process chamber, (d) a process chamber inflow valve for connecting said fluid delivery system to said process chamber for fluid flow, (e) a process chamber outflow valve for connecting said process chamber to said recovery system for fluid flow, (f) a process chamber bypass valve for connecting said fluid delivery system to said recovery system so as to bypass said process chamber, and (g) a computer control system controlling said pump, said heater, said means for controlling temperature within said process chamber, and said valves, said valves being operable so as to provide continuous flow of said process fluid in said delivery system.

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