Micromachined apparatus for improved reflection of light
First Claim
1. A micromachined apparatus for reflecting light, the apparatus comprising:
- a substrate;
a support structure secured to the substrate;
a mirror support frame defining a recess, wherein the mirror support frame includes a first pair of aligned mounting notches which open into the recess and extend into the mirror support frame, the first pair of mounting notches being disposed on a first axis;
a mirror mounted in the recess at a predetermined minimum spacing from the mirror support frame; and
a pair of mirror torsion connectors mounting the mirror in the recess, each mirror torsion connector having a length which is greater than the predetermined minimum spacing and which extends into one of the axially-aligned mounting notches, wherein pivoting of the mirror causes torsional deflection of the torsion connector.
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Accused Products
Abstract
A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.
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Citations
8 Claims
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1. A micromachined apparatus for reflecting light, the apparatus comprising:
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a substrate;
a support structure secured to the substrate;
a mirror support frame defining a recess, wherein the mirror support frame includes a first pair of aligned mounting notches which open into the recess and extend into the mirror support frame, the first pair of mounting notches being disposed on a first axis;
a mirror mounted in the recess at a predetermined minimum spacing from the mirror support frame; and
a pair of mirror torsion connectors mounting the mirror in the recess, each mirror torsion connector having a length which is greater than the predetermined minimum spacing and which extends into one of the axially-aligned mounting notches, wherein pivoting of the mirror causes torsional deflection of the torsion connector. - View Dependent Claims (2, 3, 4, 5)
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6. A micromachined apparatus for reflecting light, comprising:
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a mirror support frame defining a recess;
a mirror mounted within the recess, the mirror defining an oval-shaped reflecting surface and being received with the recess with minimum clearance; and
a first pair of torsion connectors pivotally connecting the mirror to the support frame, the torision connectors having a length which is greater than the minimum clearance, wherein the mirror support frame has a pair of axially aligned inwardly extending first notches within which a substantial portion of the first torsion connectors extend. - View Dependent Claims (7, 8)
a support structure defining an opening; and
a second pair of torsion connectors pivotally connecting the mirror support frame to the support structure, the mirror support frame being received in the opening with minimum clearance.
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8. The micromachined apparatus of claim 6, wherein the mirror support frame comprises a pair of axially aligned outwardly extending second notches, within which a portion of the second pair of torsion connectors extend.
Specification