Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof

• US 6,613,442 B2
• Filed: 12/29/2000
• Issued: 09/02/2003
• Est. Priority Date: 12/29/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Chang, Christopher C., Daugherty, John E., OʼDonnell, Robert J.
• Primary Examiner(s): Jones, Deborah
• Assistant Examiner(s): BLACKWELL, GWENDOLYN
• Application Number:
  US09/749,924
• Publication Number:
  US 20020086554A1
• Time in Patent Office: 977 Days
• Field of Search: 428/469, 428/697, 118/504
• US Class Current: 428/469
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings

Abstract

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a boron nitride/yttria composite containing surface and process for manufacture thereof.

Claims

1. A coated component of semiconductor processing equipment comprising:

(a) a surface;

(b) an optional first intermediate coating on said surface;

(c) an optional second intermediate coating on said first intermediate coating or on said surface; and

(d) a boron nitride/yttria composite containing coating over said surface that forms an outer erosion resistant surface, the boron nitride/yttria composite containing coating including a cubic phase, a hexagonal phase or mixtures thereof, the boron nitride/yttria composite containing coating being exposed to plasma and/or corrosive gases in the equipment.

2. The component according to claim 1, wherein the surface is a metal, ceramic or polymer surface.

3. The component according to claim 2, wherein said surface is anodized aluminum.

4. The component according to claim 1, wherein said first intermediate coating is not optional.

5. The component according to claim 1, wherein said boron nitride/yttria composite containing coating comprises at least one material other than boron nitride and yttria.

6. The component according to claim 5, wherein the at least one material is at least one metal, ceramic or polymer.

7. The component according to claim 6, wherein the at least one material is zirconia.

8. The component according to claim 6, wherein the at least one material comprises titanium carbide, titanium boride, titanium nitride, silicon carbide, silicon boride, silicon nitride or mixtures thereof.

9. The component according to claim 1, wherein said yttria comprises from about 60 to about 80 percent by weight of said composite.

10. The component according to claim 1, wherein said boron nitride comprises from about 20 to about 40 percent by weight of said composite.

11. The component according to claim 1, further comprising at least one additional boron nitride/yttria composite containing coating or intermediate coating.

13. The component according to claim 1, wherein said component consists essentially of said boron nitride/yttria composite containing material.

15. The component according to claim 1, wherein said boron nitride/yttria composite containing coating (i) is formed entirely on said surface and (ii) forms the entire outer erosion resistant surface.

12. A coated component of semiconductor processing equipment, comprising:

a surface;

an optional first intermediate coating on the surface;

an optional second intermediate coating on the first intermediate coating or on the surface; and

a boron nitride/yttria composite containing coating over the surface that forms an outer erosion resistant surface, wherein boron nitride or yttria forms a continuous matrix phase in the boron nitride/yttria composite containing coating, and the boron nitride/yttria composite containing coating is exposed to plasma and/or corrosive gases in the equipment.

14. A coated component of semiconductor processing equipment, comprising:

a surface;

an optional first intermediate coating on the surface;

an optional second intermediate coating on the first intermediate coating or on the surface; and

a boron nitride/yttria composite containing coating formed on one of the first intermediate coating and the second intermediate coating and not formed on the surface, the boron nitride/yttria composite containing coating forming an outer erosion resistant surface and being exposed to plasma and/or corrosive gases in the equipment.