Radiation sensor and dosimeter incorporating same
First Claim
1. A radiation sensor comprising an active semiconductor device fabricated upon a surface of a substrate and a body of semiconductor material positioned adjacent said surface but insulated therefrom by a thin film of insulating material, so as to overlie an active region of the semiconductor device, the body of semiconductor material being dimensioned to circumscribe the active region and an area of the substrate surface surrounding the active region, such that, whatever the direction from which the radiation is incident upon the active region, its path through the device before arriving at the active region will have similar characteristics to the path the radiation takes upon leaving the active region.
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Accused Products
Abstract
In a dosimeter probe comprising a semiconductor diode or a field effect transistor for monitoring levels of radiation during medical procedures, such as the treatment of tumors, the transistor or diode is fabricated epitaxially upon a surface of a substrate and a dummy die, i.e., a slab of material similar to that of the substrate, is positioned adjacent the substrate surface so as to overlie an active region of the transistor or diode and a relatively large area of the substrate surrounding the active region. The arrangement is such that, whatever the direction from which the radiation is incident upon the active region, its path through the device before arriving at the active region will have similar characteristics to the path the radiation takes upon leaving the active region.
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Citations
19 Claims
- 1. A radiation sensor comprising an active semiconductor device fabricated upon a surface of a substrate and a body of semiconductor material positioned adjacent said surface but insulated therefrom by a thin film of insulating material, so as to overlie an active region of the semiconductor device, the body of semiconductor material being dimensioned to circumscribe the active region and an area of the substrate surface surrounding the active region, such that, whatever the direction from which the radiation is incident upon the active region, its path through the device before arriving at the active region will have similar characteristics to the path the radiation takes upon leaving the active region.
- 10. A dosimeter probe comprising an elongate flexible conductor strip having a radiation sensor at one end, a connector at an opposite end, and a plurality of conductors connecting the radiation sensor to the connector, wherein the radiation sensor comprises an active semiconductor device fabricated upon a surface of a substrate attached to the flexible conductor strip and a body of semiconductor material positioned adjacent said surface but insulated therefrom by a thin film of insulating material, so as to overlie an active region of the semiconductor device, the body of semiconductor material being dimensioned to circumscribe the active region and an area of the substrate surface surrounding the active region, such that, whatever the direction from which the radiation is incident upon the active region, its path through the device before arriving at the active region will have similar characteristics to the path the radiation takes upon leaving the active region.
Specification