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Semiconductor test apparatus with reduced power consumption and heat generation

  • US 6,614,252 B2
  • Filed: 07/23/2001
  • Issued: 09/02/2003
  • Est. Priority Date: 07/26/2000
  • Status: Expired due to Fees
First Claim
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1. A semiconductor test apparatus that applies a variable voltage to a measured device to test the measured device, comprising:

  • a constant voltage generating device for generating a plurality of variable voltages;

    a plurality of voltage polarity control devices each for controlling the polarity of a respective one of said plurality of variable voltages generated by said constant voltage generating device;

    a plurality of control elements each for applying a variable voltage whose polarity is controlled by the respective voltage polarity control device to said measured device;

    a first control device that controls the application operation of the applied variable voltage by each of said control elements based on a fixed applied voltage that is applied to said measured device and a terminal voltage of said measured device fed back from said measured device; and

    a second control device that controls the value of each of the variable voltages generated by said constant voltage generating devices and the polarity control controlled by each of said plurality of voltage polarity control devices based on the voltages applied to said measured device by said plurality of control elements and the terminal voltage of said measured device fed back from said measured device.

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