Reversed, double-helical bellows seal

• US 6,614,508 B2
• Filed: 08/16/2001
• Issued: 09/02/2003
• Est. Priority Date: 08/16/2001
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Sugimoto, Hiroshi, Phillips, Alton Hugh
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US09/932,828
• Publication Number:
  US 20030035095A1
• Time in Patent Office: 747 Days
• Field of Search: 355/30, 355/53, 355/72-76, 138/121, 138/177, 285/227
• US Class Current: 355/72
• CPC Class Codes: G03B 17/045 Bellows
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

A double bellows seal including a plurality of rings having first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.

Claims

1. A flexible double bellows seal comprising:

a plurality of rings including first and second end rings and a middle ring;

a first bellows formed from a flexible material, the first bellows being sealingly connected between the first end ring and the middle ring, the first bellows having a twist bias in a first rotational direction relative to an axis of the rings; and

a second bellows formed from a flexible material, the second bellows being sealingly connected between the second end ring and the middle ring, the second bellows having a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.

2. A flexible double bellows seal as recited in claim 1 wherein the rings are rigid.

3. A flexible double bellows seal as recited in claim 1 wherein the bellows are substantially cylindrical, the rings are annular and the bellows are biased to form substantially helical pleats.

4. A flexible double bellows seal as recited in claim 1 wherein displacement of the first end ring with respect to the second end ring causes a twisting in one of the bellows and an untwisting the other bellows, the opposing twisting and untwisting of the bellows substantially eliminating the tendency of the flexible double bellows seal to impose rotational and translational forces upon chambers that are attached to each of the end rings.

5. A double bellows seal as recited in claim 1 wherein the first and second bellows are formed of an organic film material.

6. A double bellows seal as recited in claim 1 wherein the organic film material is selected from the group consisting of polyester, polyethylene and polyimide.

7. A double bellows seal as recited in claim 1 wherein the first and second end rings, and the middle ring are formed of materials that have low out-gassing and non-permeable characteristics.

8. A double bellows seal as recited in claim 7 wherein the first and second end rings, and the middle ring are formed of materials selected from the group consisting of aluminum, ferrous and non-ferrous metals, ceramics, and plastics.

9. A double bellows seal as recited in claim 8 wherein the first and second end rings, and the middle ring are formed of stainless steel.

10. A double bellows seal as recited in claim 1 wherein the first and second bellows have pleats that are uniform in size and spacing.

11. A double bellows seal as recited in claim 1 further comprising:

a plurality of triangular shaped stiffeners attached to each of the first and second bellows, each of the bellows having folds along spaces between each of the stiffeners such that substantially helical pleats are formed within each of the bellows.

12. A double bellows seal as recited in claim 11 wherein the stiffeners are attached to an outside surface of each of the bellows.

13. A double bellows seal as recited in claim 11 wherein each of the stiffeners has a triangular outline shape.