Gantry mounted ultrasonic wire bonder with orbital bonding tool head

• US 6,616,030 B2
• Filed: 05/07/2001
• Issued: 09/09/2003
• Est. Priority Date: 05/07/2001
• Status: Active Grant

• Current Assignee: West Bend Company LLC
• Original Assignee: West Bend Company LLC
• Inventors: Miller, Charles F.
• Primary Examiner(s): Elve, M. Alexandra
• Assistant Examiner(s): Tran, Len
• Application Number:
  US09/850,051
• Publication Number:
  US 20020162875A1
• Time in Patent Office: 855 Days
• Field of Search: 228/180.5, 228/4.5, 228/1.1, 228/110.1, 297/39
• US Class Current: 228/4.5
• CPC Class Codes: B23K 20/10 making use of vibrations, e.g. ultrasonic welding
• CPC Class Codes: B23K 2101/32 Wires
• CPC Class Codes: H01L 2224/45015 being circular
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48 of an individual wire connector
• CPC Class Codes: H01L 2224/78313 Wedge
• CPC Class Codes: H01L 2224/78901 using a computer, e.g. fully- or semi-automatic bonding
• CPC Class Codes: H01L 2224/85205 Ultrasonic bonding
• CPC Class Codes: H01L 24/45 of an individual wire connector
• CPC Class Codes: H01L 24/78 Apparatus for connecting with wire connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01023 Vanadium [V]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01039 Yttrium [Y]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/01327 : Intermediate phases, i.e. intermetallics compounds
• CPC Class Codes: H01L 2924/14 : Integrated circuits
• CPC Class Codes: H01L 2924/15787 : Ceramics, e.g. crystalline carbides, nitrides or oxides
• CPC Class Codes: H01L 2924/20753 : larger or equal to 30 microns less than 40 microns
• CPC Class Codes: H01L 2924/3011 : Impedance

Abstract

An automatic ultrasonic wire bonding machine for bonding interconnecting wires to electrically conductive sites on a workpiece includes a gantry which supports a generally downwardly cascaded series of support platforms linearly translatable with respect to the gantry and to one another in response to translation drive signals provided from a remote source to a separate translation motor for each platform. A head support assembly mounted to the last translatable platform in the series rotatably supports via a hollow elongated spindle an orbital bonding tool head rotatable with respect to the head support assembly in response to a rotational drive signals provided to a head rotation motor from a remote source. The orbital bonding tool head in turn supports via a novel parallelogram linkage an ultrasonic transducer having fitted therein a downwardly protruding ultrasonic bonding tool, the parallelogram linkage enabling the tool tip to be displaced only vertically in response to reaction forces exerted on the tip in translating the tip downwardly into contact with a workpiece.

Claims

1. A machine for making ultrasonic wire bonds comprising;

a. an orbital bonding tool head rotatable about a longitudinal head rotation axis therethrough and having disposed longitudinally therethrough a wire transit bore coaxial with said head rotation axis for longitudinally translatably receiving a length of bonding wire,

b. translational positioning means for translatably positioning said orbital bonding tool head responsive to first, translational drive signals to precisely pre-determinable positions in a three-dimensional coordinate space relative to a workpiece,

c. rotational positioning means for rotating said orbital bonding tool head about said longitudinal head rotation axis thereof in response to second, rotational drive signals to precisely pre-determ inable rotational orientations relative to a workpiece,

d. an ultrasonic transducer,

e. transducer support means attached to said orbital bonding tool head for supporting said ultrasonic transducer,

f. an ultrasonic bonding tool mechanically coupled to said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said longitudinal head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head, and

g. thus enabling said tip of said bonding tool to be positioned at a first bond site location on a workpiece, an ultrasonic wire bond formed thereat, said bonding tool head rotated by said rotational positioning means to align said wire feed bore of said bonding tool relative to a second bond site, and said tip of said bonding tool translated by motion of said translational positioning means to said second bond site, said bonding wire paying out through said wire supply bore and said wire feed bore without twisting.

2. The machine of claim 1 wherein said translational positioning means is further defined as including a support structure, a first tool support platform, means for translatably supporting said first tool support platform by said support structure, and first drive motor means for translating said first platform along a first coordinate direction relative to said support structure.

3. The machine of claim 2 wherein said translational positioning means is further defined as including a second tool support platform, means for translatably supporting said second tool support platform by said first toot support platform, and second drive motor means for translating said second platform along a second coordinate direction relative to said first platform.

4. The machine of claim 3 wherein said translational positioning means is further defined as including a third tool support platform, means for translatably supporting said third tool support platform by said second tool support platform, and third drive motor means for translating said third platform along a third coordinate direction relative to said second platform.

5. The machine of claim 4 wherein said rotational positioning means is further defined as including head support means attached to said third tool support platform, means for rotatably supporting said bonding tool head by said head support means, and first rotational drive motor means for rotating said head about a head rotation axis.

6. The machine of claim 1 wherein said rotational positioning means is further defined as including head support means attached to said translational positioning means, means for rotatably supporting said bonding tool head by said head support means, and first rotational drive motor means for rotating said head about a head rotation axis.

7. The machine of claim 6 wherein said head support means has disposed longitudinally therethrough a wire supply bore coaxially aligned with said wire transit bore of said orbital bonding tool head.

8. The machine of claim 7 wherein said bonding tool head is further defined as including an upper support base portion and a parallelogram linkage frame coupling said upper support base portion to said transducer, said parallelogram linkage frame enabling a tip of said bonding tool to be displaced only vertically in response to a reaction force exerted thereon by translating said head to thereby press said tool tip into contact with a workpiece.

9. The machine of claim 8 wherein said parallelogram linkage frame is further defined as including;

a. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,

b. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,

c. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and

d. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

10. The machine of claim 9 further including wire feed means attached to said head for feeding bonding wire to said bonding tool.

11. The machine of claim 10 wherein said wire feed means is further defined as including a wire clamp having a pair of laterally opposed blades adapted to receive therebetween wire from a supply reel, blade actuator means for reciprocally moving said blades together to clamp on a wire and apart to enable free passage of said wire between said blades, and clamp actuator means for reciprocally moving said clamp towards and away from said bonding tool.

12. The machine of claim 11 wherein said clamp actuator means is further defined as comprising in combination a clamp support, a clamp actuator motor located remotely from said head, and clamp actuator coupling means for coupling force produced by said clamp actuator motor to said clamp support.

13. The machine of claim 12 wherein said clamp actuator coupling means is further defined as comprising a clamp actuator drive shaft having a rotation axis coaxially aligned with said head rotation axis, input clamp actuator drive coupling means for coupling force produced by said clamp actuator motor to said clamp actuator drive shaft, and output clamp actuator drive coupling means for coupling motion of said drive shaft to said clamp support independently of rotation angle of said head relative to said head support means.

14. The machine of claim 13 wherein said output clamp actuator drive means is further defined as including a bell crank pivotally mounted to said third, lower left longitudinally disposed linkage bar.

67. The machine of claim 1 wherein said orbital bonding tool head is rotatable by said rotational positioning means plus and minus 180 degrees from a reference position, thus enabling a plane containing a longitudinal axis and wire feed bore axis of said ultrasonic bonding tool to be rotated to any azimuthal direction relative to a workpiece.

15. A machine for making ultrasonic wire bonds comprising;

a. a gantry,

b. at least a first, X-axis tool support platform translatably supported from said gantry, and comprising a first one of a cascaded series of mutually translatable members,

c. an orbital bonding tool head depending downwardly from said first tool support platform, said head being rotatable about a head rotation axis perpendicular to said first tool support platform and having disposed therethrough a wire transit bore coaxial with said head rotation axis for translatably receiving a length of bonding wire,

d. transducer support means attached to said orbital bonding tool head for supporting an ultrasonic transducer,

e. an ultrasonic transducer,

f. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head,

g. first translational positioning means for translating said first tool support platform responsive to first translational drive signals relative to said gantry, to thereby precisely position said tip of said bonding tool in a first direction relative to a workpiece, and

h. first rotational positioning means for rotating said bonding tool head responsive to first rotational drive signals to a precisely pre-determinable angular orientation relative to said workpiece.

16. The machine of claim 15 further including a second, Y-axis tool support platform located between said first, X-axis tool support platform and said orbital bonding tool head, said second platform being translatably supported by said first platform.

17. The machine of claim 16 further including second translational positioning means for translating said second tool support platform responsive to second translational drive signals, relative to said first platform.

18. The machine of claim 17 further including a third, Z-axis tool support platform located between said second, Y-axis tool support platform and said orbital bonding tool head, said third platform being translatably supported by said second platform.

19. The machine of claim 18 further including third translational positioning means for translating said third tool support platform responsive to third translational drive signals, relative to said second platform.

20. The machine of claim 15 further including a head support assembly mounted to a last one of said cascaded series of translatable members, said head support assembly rotatably supporting said orbital bonding tool head.

21. The machine of claim 20 wherein said first rotational positioning means is further defined as comprising in combination a spindle supporting said orbital bonding tool head and rotatably mounted to said head support assembly, a rotary motor, and means for coupling rotary motion of said rotary motor to said spindle.

22. The machine of claim 21 wherein sad rotary motor is further defined as being attached to said head support assembly.

23. The machine of claim 22 wherein said orbital bonding tool head is further defined as including an upper support base portion which depends downwardly from said spindle, and a parallelogram linkage frame which depends downwardly from said upper support base portion, said parallelogram linkage frame coupling said upper support base portion to said transducer.

24. The machine of claim 23 wherein said parallelogram linkage frame is further defined as including;

a. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,

b. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,

c. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and

d. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

25. The machine of claim 24 further including wire feed means attached to said head for feeding bonding wire to said bonding tool.

26. The machine of claim 25 wherein said wire feed means is further defined as including a wire clamp having a pair of laterally opposed blades adapted to receive therebetween wire from a supply reel, blade actuator means for reciprocally moving said blades together to clamp on a wire and apart to enable free passage of said wire between said blades, and clamp actuator means for reciprocally moving said clamp towards and away from said bonding tool.

27. The machine of claim 26 wherein said clamp actuator means is further defined as comprising in combination a clamp support, a clamp actuator motor located remotely from said head, and clamp actuator coupling means for coupling force produced by said clamp actuator motor to said clamp support.

28. The machine of claim 27 wherein said clamp actuator coupling means is further defined as comprising a clamp actuator drive shaft having a rotation axis coaxially aligned with said head rotation axis, input clamp actuator drive coupling means for coupling force produced by said clamp actuator motor to said clamp actuator drive shaft, and output clamp actuator drive coupling means for coupling motion of said drive shaft to said clamp support independently of rotation angle of said head relative to said head support means.

29. The machine of claim 28 wherein at least one of said head support spindle and said clamp actuator drive shaft fits coaxially within the other.

30. The machine of claim 29 wherein said claim actuator motor is further defined as being mounted to said head support assembly.

31. The machine of claim 30 wherein said clamp actuator drive means is further defined as including a cam wheel eccentrically mounted to a lower end of said clamp actuator drive shaft, and a bell crank which supports said clamp and which is pivotably mounted to said third, lower left longitudinally disposed linkage bar, said bell crank having protruding from an upper end thereof a cam follower having a rolling surface biased into contact with a circumferential surface of said cam wheel.

32. The machine of claim 31 wherein an inner one of said head drive spindle and said clamp actuator drive shaft has therethrough an axially disposed wire adapted to receive through an upper entrance opening to said bore bonding wire from a supply reel, and to pay out through a lower exit opening therein wire to said clamp assembly.

33. The machine of claim 32 further including a drag tube for frictionally resisting motion of wire supplied from a wire supply reel to said bore through said spindle, said drag tube comprising a curved tube having a straight lower portion secured in a bore disposed vertically through said transducer rearward of said tool, and an arcuately forwardly and upwardly angled upper portion.

34. An automatic ultrasonic wire bonding machine comprising;

a. a gantry,

b. a first tool support platform translatably supported from said gantry,

c. a first motor drive means for translating said first tool support platform in a first coordinate direction relative to said gantry, in response to first translational drive signals,

d. a second tool support platform translatably supported from said first tool support platform,

e. a second motor drive means for translating said second tool support platform in a second coordinate direction relative to said first tool support platform, in response to second translational drive signals,

f. a third tool support platform translatably supported from said second tool support platform,

g. a third motor driver means for translating said third tool support platform in a third coordinate direction relative to said second tool support platform, in response to third translational drive signals,

h. an orbital bonding tool head, said head being rotatable about a head rotation axis perpendicular to said first tool support platform and having disposed therethrough a wire transit bore coaxial with said head rotation axis for translatably receiving a length of bonding wire,

i. an orbital bonding tool head support assembly protruding from said third tool support platform, for rotatably supporting said orbital bonding tool head,

j. a first rotational motor drive means for rotating said bonding tool head relative to said bonding tool head support assembly,

k. transducer support means attached to said orbital bonding tool head for supporting an ultrasonic transducer,

l. an ultrasonic transducer, and

m. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer, said bonding tool having a tip coaxially aligned with said head rotation axis of said orbital bonding tool head and a wire feed bore therethrough for receiving wire from said wire transit bore through said bonding tool head.

35. The automatic ultrasonic wire bonding machine of claim 34 wherein said orbital bonding tool head is further defined as including an upper support base portion rotatably coupled to said orbital bonding tool head support assembly, a parallelogram linkage frame which depends downwardly from said upper support base portion, and an ultrasonic transducer coupled to a lower portion of said parallelogram linkage frame.

36. The automatic ultrasonic wire bonding machine of claim 35 wherein said bonding tool head is further defined as including a wire feed mechanism attached to a lower portion of said parallelogram linkage frame.

37. The automatic ultrasonic wire bonding machine of claim 36 wherein said bonding tool head is rotatably supported from said bonding tool head support assembly by means of a hollow head drive spindle which protrudes upwardly from said upper support base portion of said orbital bonding tool head and through a bearing journal fitted in said bonding tool head support assembly, an upwardly protruding end of said spindle being fitted with a first drive pulley.

38. The automatic ultrasonic wire bonding machine of claim 37 wherein said wire feed mechanism includes a clamp actuator drive shaft which is disposed coaxially upwards through said head drive spindle.

39. The automatic ultrasonic wire bonding machine of claim 38 wherein said clamp actuator drive shaft has attached coaxially thereto a second drive pulley located above said bearing journal through said orbital bonding tool head support assembly.

40. The automatic ultrasonic wire bonding machine of claim 39 wherein said first rotational drive means comprises in combination a first rotational drive motor and means for coupling rotary drive force produced thereby to said first drive pulley attached to said drive spindle.

41. The automatic ultrasonic wire bonding machine of claim 40 further including second rotational motor drive means coupled to said second, clamp actuator drive shaft pulley.

42. The automatic ultrasonic wire bonding machine of claim 41 wherein said clamp actuator drive shaft is further defined as having disposed axially through its length a bore enabling a wire supplied from a source above said head support assembly to transit through said orbital bonding tool head to said wire feed mechanism.

43. A machine for making ultrasonic wire bonds comprising;

a. an orbital bonding tool head,

b. translational positioning means for translatably positioning an orbital bonding tool head responsive to first, translational drive signals to precisely pre-determinable positions in a three-dimensional coordinate space relative to a workpiece,

c. rotational positioning means for rotating said orbital bonding tool head about a head rotation axis by second, rotational drive signals to precisely pre-determinable rotational orientations relative to a workpiece, said rotational positioning means including head support means attached to said translational positioning means, means for rotatably supporting said bonding tool head by said head support means, and first rotational drive motor means for rotating said head about a head rotation axis

d. an ultrasonic transducer,

e. transducer support means attached to said bonding tool head for supporting said ultrasonic transducer,

f. an ultrasonic bonding tool mechanically coupled to said ultrasonic transducer, a portion of said bonding tool being axially aligned with said head rotation axis, and

g. an upper support base portion of said bonding tool head and a parallelogram linkage frame coupling said upper support base portion of said bonding tool head to said transducer, said parallelogram linkage frame enabling a tip of said bonding tool to be displaced only vertically in response to a reaction force exerted thereon by translating said head to thereby press said tool tip into contact with a workpiece, said parallelogram linkage frame including;

i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,

ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,

iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and

iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

44. The machine of claim 43 further including wire feed means attached to said head for feeding bonding wire to said bonding tool.

45. The machine of claim 44 wherein said wire feed means is further defined as including a wire clamp having a pair of laterally opposed blades adapted to receive therebetween wire from a supply reel, blade actuator means for reciprocally moving said blades together to clamp on a wire and apart to enable free passage of said wire between said blades, and clamp actuator means for reciprocally moving said clamp towards and away from said bonding tool.

46. The machine of claim 45 wherein said clamp actuator means is further defined as comprising in combination a clamp support, a clamp actuator motor located remotely from said head, and clamp actuator coupling means for coupling force produced by said clamp actuator motor to said clamp support.

47. The machine of claim 46 wherein said clamp actuator coupling means is further defined as comprising a clamp actuator drive shaft having a rotation axis coaxially aligned with said head rotation axis, input clamp actuator drive coupling means for coupling force produced by said clamp actuator motor to said clamp actuator drive shaft, and output clamp actuator drive coupling means for coupling motion of said drive shaft to said clamp support independently of rotation angle of said head relative to said head support means.

48. The machine of claim 47 wherein said output clamp actuator drive means is further defined as including a bell crank pivotally mounted to said third, lower left longitudinally disposed linkage bar.

49. A machine for making ultrasonic wire bonds comprising;

a. a gantry,

b. a first, X-axis tool support platform translatably supported from said gantry, and comprising one of a cascaded series of mutually translatable members,

c. first translational positioning means for translating said first tool support platform responsive to first translational drive signals relative to said gantry,

d. a second, Y-axis tool support platform translatably supported by said first, X-axis tool support platform,

e. a second translational positioning means for translating said second tool support platform responsive to second translational drive signals, relative to said first platform,

f. a third, Z-axis tool support platform translatably supported by said second, Y-axis platform,

g. a third translational positioning means for translating said third tool support platform responsive to third translational drive signals, relative to said second platform,

h. a head support assembly mounted to said Z-axis tool support platform, for rotatably supporting and orbital bonding tool head,

i. an orbital bonding tool head depending downwardly from said head support assembly, said head being rotatable about an axis perpendicular to said first tool support platform,

j. transducer support means attached to said bonding tool head for supporting an ultrasonic transducer,

k. an ultrasonic transducer,

l. an ultrasonic bonding tool depending downwardly from said ultrasonic transducer,

m. first rotational positioning means for rotating said bonding tool head responsive to first rotational drive signals to a precisely pre-determinable angular orientation relative to a workpiece, said first rotational positioning means comprising in combination a spindle supporting said orbital bonding tool head and rotatably mounted to said head support assembly, a rotary motor attached to said head support assembly, and means for coupling rotary motion of said rotary motor to said spindle, an upper support base portion for said orbital bonding tool head which depends downwardly from said spindle, and a parallelogram linkage frame which depends downwardly from said upper support base portion, said parallelogram linkage frame coupling said upper support base portion to said transducer, said parallelogram linkage frame including;

i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,

ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,

iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and

iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member.

50. The machine of claim 49 further including wire feed means attached to said head for feeding bonding wire to said bonding tool.

51. The machine of claim 49 wherein said wire feed means is further defined as including a wire clamp having a pair of laterally opposed blades adapted to receive therebetween wire from a supply reel, blade actuator means for reciprocally moving said blades together to clamp on a wire and apart to enable free passage of said wire between said blades, and clamp actuator means for reciprocally moving said clamp towards and away from said bonding tool.

52. The machine of claim 51 wherein said clamp actuator means is further defined as comprising in combination a clamp support, a clamp actuator motor located remotely from said head, and clamp actuator coupling means for coupling force produced by said clamp actuator motor to said clamp support.

53. The machine of claim 52 wherein said clamp actuator coupling means is further defined as comprising a clamp actuator drive shaft having a rotation axis coaxially aligned with said head rotation axis, input clamp actuator drive coupling means for coupling force produced by said clamp actuator motor to said clamp actuator drive shaft, and output clamp actuator drive coupling means for coupling motion of said drive shaft to said clamp support independently of rotation angle of said head relative to said head support means.

54. The machine of claim 53 wherein at least one of said head support spindle and said clamp actuator drive shaft fits coaxially within the other.

55. The machine of claim 54 wherein said claim actuator motor is further defined as being mounted to said head support assembly.

56. The machine of claim 55 wherein said clamp actuator drive means is further defined as including a cam wheel eccentrically mounted to a lower end of said clamp actuator drive shaft, and a bell crank which supports said clamp and which is pivotably mounted to said third, lower left longitudinally disposed linkage bar, said bell crank having protruding from an upper end thereof a cam follower having a rolling surface biased into contact with a circumferential surface of said cam wheel.

57. The machine of claim 56 wherein an inner one of said head drive spindle and said clamp actuator drive shaft has therethrough an axially disposed wire adapted to receive through an upper entrance opening to said bore bonding wire from a supply reel, and to pay out through a lower exit opening therein wire to said clamp assembly.

58. The machine of claim 57 further including a drag tube for frictionally resisting motion of wire supplied from a wire supply reel to said bore through said spindle, said drag tube comprising a curved tube having a straight lower portion secured in a bore disposed vertically through said transducer rearward of said tool, and an arcuately forwardly and upwardly angled upper portion.

59. An automatic ultrasonic wire bonding machine comprising;

a. a gantry,

b. a first, tool support platform translatably supported from said gantry,

c. a first motor drive means for translating said first tool support platform in a first coordinate direction relative to said gantry, in response to first translational drive signals,

d. a second tool support platform translatably supported from said first tool support platform,

e. a second motor drive means for translating said second tool support platform in a second coordinate direction relative to said first tool support platform, in response to second translational drive signals,

f. a third tool support platform translatably supported from said second tool support platform,

g. a third motor drive means for translating said third tool support platform in a third coordinate direction relative to said second tool support platform, in response to third translational drive signals,

h. an orbital bonding tool head support assembly protruding from said third tool support platform, for rotatably supporting an orbital bonding tool head,

i. an orbital bonding tool head, including an upper support base portion rotatably coupled to said orbital bonding tool head support assembly, a parallelogram linkage frame which depends downwardly from said upper support base portion, and an ultrasonic transducer coupled to a lower portion of said parallelogram linkage frame, said parallelogram linkage frame including;

i. a first, lower right-hand longitudinally disposed linkage bar pivotably coupled near a front end thereof by a first, front lower right pivot joint to a lower right side of said head,

ii. a second, laterally disposed, vertically elongated rear bar member comprising a transducer support block pivotably coupled at a lower right side thereof to a rear end of said first linkage bar by a second, rear lower right pivot joint,

iii. a third, lower left, longitudinally disposed linkage bar rigidly coupled to a lower left side of said second, laterally disposed rear bar member, and

iv. a fourth, upper left longitudinally disposed linkage bar pivotably coupled near a front end thereof by a third, front upper left pivot joint to an upper left side of said head, and near a rear end thereof by a fourth, rear upper left pivot joint to an upper left side of said second, laterally disposed rear bar member, and

j. a first rotational motor drive means for rotating said bonding tool head relative to said bonding tool head support assembly.

60. The automatic ultrasonic wire bonding machine of claim 59 wherein said bonding tool head is further defined as including a wire feed mechanism attached to a lower portion of said parallelogram linkage frame.

61. The automatic ultrasonic wire bonding machine of claim 60 wherein said bonding tool head is rotatably supported from said bonding tool head support assembly by means of a hollow head drive spindle which protrudes upwardly from said upper support base portion of said orbital bonding tool head and through a bearing journal fitted in said bonding tool head support assembly, an upwardly protruding end of said spindle being fitted with a first drive pulley.

62. The automatic ultrasonic wire bonding machine of claim 61 wherein said wire feed mechanism includes a clamp actuator drive shaft which is disposed coaxially upwards through said head drive spindle.

63. The automatic ultrasonic wire bonding machine of claim 62 wherein said clamp actuator drive shaft has attached coaxially thereto a second drive pulley located above said bearing journal through said orbital bonding tool head support assembly.

64. The automatic ultrasonic wire bonding machine of claim 63 wherein said first rotational drive means comprises in combination a first rotational drive motor and means for coupling rotary drive force produced thereby to said first drive pulley attached to said drive spindle.

65. The automatic ultrasonic wire bonding machine of claim 64 further including second rotational motor drive means coupled to said second, clamp actuator drive shaft pulley.

66. The automatic ultrasonic wire bonding machine of claim 65 wherein said clamp actuator drive shaft is further defined as having disposed axially through its length a bore enabling a wire supplied from a source above said head support assembly to transit through said orbital bonding tool head to said wire feed mechanism.