Laser etching method

• US 6,617,541 B1
• Filed: 02/21/1995
• Issued: 09/09/2003
• Est. Priority Date: 02/22/1994
• Status: Expired due to Fees

• Current Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Schildbach, Klaus B., Wadman, Sipke
• Primary Examiner(s): Evans, Geoffrey S.
• Application Number:
  US08/391,745
• Time in Patent Office: 3,122 Days
• Field of Search: 219/121.69, 427/554, 427/555, 427/556, 349/148, 349/152, 349/187, 349/139
• US Class Current: 219/121.69
• CPC Class Codes: B23K 26/18 using absorbing layers on the workpiece, e.g. for marking or protecting purposes
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 2201/0112 Absorbing light, e.g. dielectric layer with carbon filler for laser processing
• CPC Class Codes: H05K 2201/0326 Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
• CPC Class Codes: H05K 2203/107 Using laser light shaping a substrate by laser ablation H05K3/0026
• CPC Class Codes: H05K 3/027 the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles

Abstract

A method of furnishing a substrate with a patterned film of electrode material making use of a laser beam, whereby a stack is made by providing a surface of the substrate at least with a layer of an assistant material and an overlying layer of the said electrode material, the assistant material being capable of decomposition upon heating with the aid of the said laser beam, subsequent to which the stack is, in accordance with a desired pattern, locally irradiated with the laser beam so as to heat the assistant material to at least its decomposition temperature, consequent upon which the locally overlying electrode material is caused to detach.

Claims

1. A method of furnishing a substrate with a patterned film of electrode material, said method comprising providing a surface of said substrate with a layer of an assistant material capable of decomposition and separation from said substrate upon heating with a laser beam, providing a layer of electrode material in contact with a surface of said assistant material, locally heating said layer of assistant material with said laser beam according to A desired pattern, at least to the decomposition temperature of said assistant material, to thereby cause said layer of assistant material to locally decompose and separate from said substrate in a manner so as to cause the layer of said electrode material to be separated from said substrate at areas of said local decomposition and separation of underlying assistant material and thereby form a patterned film of said electrode material on said substrate.

2. A method according to claim 1, characterised in that an organic polymer is the assistant material.

3. A method according to claim 2, characterised in that the organic polymer is a polyacrylate.

4. A method according to claim 3, characterized in that a metal oxide is selected as the electrode material.

5. A method according to claim 3, characterized in that the substrate material is selected from the group consisting of soda lime glass, borosilicate glass and quartz.

6. A method according to claim 2, characterized in that a metal oxide is selected as the electrode material.

7. A method according to claim 2, characterized in that the substrate material is selected from the group consisting of soda lime glass, borosilicate glass and quartz.

8. A method according to claim 1, characterised in that a metal oxide is the electrode material.

9. A method according to claim 8, characterised in that the metal oxide is selected from the group consisting of oxides In, Sn, and mixtures thereof.

10. A method according to claim 9, characterized in that the substrate material is selected from the group consisting of soda lime glass, borosilicate glass and quartz.

11. A method according to claim 8, characterized in that the substrate material is selected from the group consisting of soda lime glass, borosilicate glass and quartz.

12. A method according to claim 1 characterised in that the substrate material is selected from the group consisting of a soda lime glass, borosilicate glass and quartz.

13. A liquid crystal display device comprising a substrate furnished with a patterned film of electrode material formed by a method of said substrate with a layer of an assistant material capable of decomposition and separation from said substrate upon heating with a laser beam, providing a layer of electrode material in contact with a surface of said assistant material, locally heating said layer of assistant material with said laser beam according to a desired pattern, at least to the decomposition temperature of said assistant material, to thereby cause said layer of assistant material to locally decompose and separate from said substrate in a manner so as to cause the layer of said electrode material to be separated from said substrate at areas of said local decomposition and separation of underlying assistant material and thereby form a patterned film of said electrode material on said substrate.