High-frequency integrated inductive winding

• US 6,617,665 B2
• Filed: 04/18/2002
• Issued: 09/09/2003
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Inventors: Farcy, Alexis, Arnal, Vincent, Torres, Joaquim
• Primary Examiner(s): TSAI, H JEY
• Application Number:
  US10/125,162
• Publication Number:
  US 20030092202A1
• Time in Patent Office: 509 Days
• Field of Search: 438/238, 257/531
• US Class Current: 257/531
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 41/041 Printed circuit coils apparatus or processes for manufacturing printed circuits in general H05K3/00
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01P 3/088 Stacked transmission lines
• CPC Class Codes: H01Q 1/36 Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewithH01Q1/08, H01Q1/14 take precedence
• CPC Class Codes: H01Q 11/08 Helical antennas
• CPC Class Codes: H01Q 13/20 Non-resonant leaky-waveguide or transmission-line antennas; Equivalent structures causing radiation along the transmission path of a guided wave

Abstract

An inductance formed in an integrated circuit chip, formed of a plurality of parallel conductive lines, of optimized width, each conductive line being formed in the thickness of at least one insulating layer, these lines being interconnected by at least one perpendicular conductive segment.

Claims

1. An inductance formed in an integrated circuit chip, formed of a plurality of parallel conductive lines of optimized width and having a length, each conductive line being formed in a thickness of at least one insulating layer, these lines being interconnected only by a plurality of perpendicular conductive segments, the segments being separated from one another in the direction of the length, each of the plurality of conductive lines extending over the entire length of the inductance and each conductive segment extending over the entire width of the inductance.

2. The inductance of claim 1, wherein the optimized width is equal to twice a skin thickness corresponding to a maximum frequency of a high-frequency current running through said inductance.

3. The inductance of claim 1, wherein the conductive lines are formed in three insulating layers and the conductive segments are formed in at least one of the three insulating layers.

4. An inductive element for conducting current in a first direction, comprising:

a plurality of conductive lines each having a length extending in the first direction and having a height perpendicular to the first direction, the plurality of conductive lines formed in an insulating material such that each of the plurality of conductive lines is separated from another of the plurality of conductive lines in a second direction by the insulating material, the second direction being perpendicular to the first direction and to the height; and

a plurality of conductive segments having a length extending in the second direction and a height, each formed in the insulating material and separated from another of the plurality of conductive segments in the direction of the length of the conductive lines by the insulating material, each of the plurality of conductive segments electrically connected to each of the plurality of conductive lines, the heights of the plurality of conductive lines being greater than the heights of the plurality of conductive segments.

5. The inductive element of claim 4, wherein each of the plurality of conductive lines has a top surface, the top surfaces of the plurality of conductive lines being coplanar with one another.

6. The inductive element of claim 5, wherein each of the plurality of conductive segments has a top surface, the top surfaces of the plurality of conductive lines being coplanar with one another.

7. The inductive element of claim 6, wherein the top surfaces of the plurality of conductive lines are coplanar with the top surfaces of the plurality of conductive segments.

8. The inductive element of claim 4, wherein the current has a maximum operating frequency, further wherein each of the plurality of conductive lines has a width extending in the second direction, the width of each of the plurality of conductive lines being equal to twice the skin thickness at the maximum operating frequency.

9. The inductive element of claim 4, wherein the insulating material is comprised of a plurality of insulating layers and each of the plurality of conductive lines is disposed in at least a portion of each of the plurality of insulating layers.

10. The inductive element of claim 9, wherein each of the plurality of conductive segments is disposed in only one of the plurality of insulating layers.

11. An inductive element for conducting current in a first direction, comprising:

a plurality of conductive lines, each having a length extending in the first direction and having a height perpendicular to the first direction, the plurality of conductive lines formed in an insulating material such that each of the plurality of conductive lines is separated from another of the plurality of conductive lines in a second direction by the insulating material, the second direction being perpendicular to the first direction and to the height; and

a plurality of conductive segments having a length extending in the second direction, each formed in the insulating material and separated from another of the plurality of conductive segments in the direction of the length of the conductive lines by the insulating material, each of the plurality of conductive segments electrically connected to each of the plurality of conductive lines, the conductive segments being the only electrical connection between any two of the plurality of conductive lines.

12. The inductive element of claim 11, wherein each of the plurality of conductive lines has a top surface, the top surfaces of the plurality of conductive lines being coplanar with one another.

13. The inductive element of claim 12, wherein each of the plurality of conductive segments has a top surface, the top surfaces of the plurality of conductive lines being coplanar with one another.

14. The inductive element of claim 13, wherein the top surfaces of the plurality of conductive, lines are coplanar with the top surfaces of the plurality of conductive segments.

15. The inductive element of claim 11, wherein the current has a maximum operating frequency, further wherein each of the plurality of conductive lines has a width extending in the second direction, the width of each of the plurality of conductive lines being equal to twice the skin thickness at the maximum operating frequency.

16. The inductive element of claim 11, wherein the insulating material is comprised of a plurality of insulating layers and each of the plurality of conductive lines is disposed in at least a portion of each of the plurality of insulating layers.

17. The inductive element of claim 16, wherein each of the plurality of conductive segments is disposed in only one of the plurality of insulating layers.

18. The inductive element of claim 16, wherein the each of the conductive segments has a width in the direction of the length of the conductive lines, the width being the minimum necessary to maintain homogeneous potentials along the lengths of each of the plurality of conductive lines.