Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
First Claim
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1. A microelectromechanical system (MEMS) with reduced noise sensitivity, comprising:
- a substrate;
a first element supported from the substrate for movement between first and second positions with respect to an axis relative to the substrate;
a first actuator attached to the first element to exert a force thereupon dependent upon a parameter to be measured and urging the element toward the second position;
a second element supported from the substrate for movement between the first and second positions with respect to the axis relative to the substrate; and
a sensor assembly communicating with the first and second elements to detect movement of the first and second elements and to provide an output subtracting measurement of movement of the first and second elements so as to provide an output with reduced influence from common mode noise acting to move the first and second elements.
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Abstract
Microelectricalmechanical systems (MEMS) manufactured on a microscopic scale using integrated circuit techniques may be used to measure a variety of parameters using electrical signals generated by the movement of small beams. Inertial noise may be canceled by the duplication of the beam structure for sensing of the acceleration to be subtracted from a similar beam structure used to measure the parameter of interest.
105 Citations
16 Claims
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1. A microelectromechanical system (MEMS) with reduced noise sensitivity, comprising:
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a substrate;
a first element supported from the substrate for movement between first and second positions with respect to an axis relative to the substrate;
a first actuator attached to the first element to exert a force thereupon dependent upon a parameter to be measured and urging the element toward the second position;
a second element supported from the substrate for movement between the first and second positions with respect to the axis relative to the substrate; and
a sensor assembly communicating with the first and second elements to detect movement of the first and second elements and to provide an output subtracting measurement of movement of the first and second elements so as to provide an output with reduced influence from common mode noise acting to move the first and second elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
a first control element attached to the first element to exert a force dependent on the displacement of the first element toward the first position; and
a second control element attached to the second element to exert a force dependent on the displacement of the first element toward the first position.
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15. The MEMS device of claim 1 further including:
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a first control element attached to the first element to exert a predetermined substantially constant force on the first element toward the first position; and
a second control element attached to the second element to exert a predetermined substantially constant force on the first element toward the first position.
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16. The MEMS device of claim 1 wherein at least a portion of the first element between the first actuator and the sensor assembly is an electrical insulator to electrically isolate the first actuator from the sensor assembly.
Specification