Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
First Claim
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1. For use with a micro-electro-mechanical system (MEMS) optical device, a movable element comprising:
- a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover and the second side is an irregular surface, wherein the irregular surface reduces interferrometric loss associated with the movable element.
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Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.
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Citations
55 Claims
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1. For use with a micro-electro-mechanical system (MEMS) optical device, a movable element comprising:
a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover and the second side is an irregular surface, wherein the irregular surface reduces interferrometric loss associated with the movable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of manufacturing a movable element for use in a micro-electro-mechanical system (MEMS) optical system, comprising:
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forming a substrate having opposing first and second sides, wherein the second side has an irregular surface that reduces interferrometric loss associated with the movable element; and
forming a light reflective optical layer over the first side. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. An optical communications system, comprising:
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input/output fiber bundles;
a micro-electro-mechanical structure, comprising;
a mirror including a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover and the second side is an irregular surface that reduces interferrometric loss associated with the movable element; and
a mounting substrate on which the mirror is movably mounted;
imaging lenses interposed between the input/output fiber bundles and the micro-electro-mechanical structure; and
a reflector. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55)
a micro-electro-mechanical system (MEMS) optical cross connect system;
an optical power gain equalizer system;
a wavelength division multiplexing telecommunications system;
a light signal switch in an optical communications system; and
a variable optical attenuator in an optical communications system.
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Specification