Blazed micro-mechanical light modulator and array thereof
First Claim
1. A deformable grating light valve, comprising:
- at least three beams, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams; and
wherein said deformable beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams.
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Accused Products
Abstract
A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.
88 Citations
30 Claims
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1. A deformable grating light valve, comprising:
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at least three beams, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams; and
wherein said deformable beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams. - View Dependent Claims (2)
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3. A deformable grating light valve, comprising:
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at least three beams, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams; and
wherein said beam of a substantially fixed-position is deformable by electrostatic force. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10)
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11. A deformable grating light valve, comprising:
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at least three beams, one beam of said at least three beams being of a substantially fixed-position, and said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams; and
wherein said at least three beams form said first electrode and said second electrode is common to all said deformable beams. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method for light modulation, comprising the steps of:
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providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam;
wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
illuminating said light valve;
applying voltage between said first electrode and said second electrode; and
wherein said deformable beams form said first electrode, and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams. - View Dependent Claims (18, 19, 20, 21)
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22. A method for light modulation, comprising the steps of:
- providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam, wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
illuminating said light valve;
applying voltage between said first electrode and said second electrode; and
wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams, and said second electrode is common to all said deformable beams. - View Dependent Claims (23, 24, 25, 26)
- providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam, wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
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27. A method for light modulation, comprising the steps of:
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providing a deformable grating light valve, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-position, and said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impinging light beam wherein said deformable grating light valve additionally comprises a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least two of said deformable beams of said at least three beams;
illuminating said light valve; and
applying voltage between said first electrode and said second electrode.- View Dependent Claims (28, 29, 30)
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Specification