Method for test optimization using historical and actual fabrication test data

• US 6,618,682 B2
• Filed: 04/20/2001
• Issued: 09/09/2003
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: Cadence Design Systems Incorporated (Cadence Group)
• Original Assignee: International Business Machines Corporation
• Inventors: Gattiker, Anne E., Noel, Leo A., Thibault, William J., Harris, John L., Wheater, Donald L., Nigh, Phillip J., Van Horn, Jody J., Bulaga, Raymond J.
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): Dougherty, Anthony T
• Application Number:
  US09/838,996
• Publication Number:
  US 20020155628A1
• Time in Patent Office: 872 Days
• Field of Search: 702/84, 702/81, 324/158, 324/500, 324/537, 324/765, 438/14, 438/18
• US Class Current: 702/84
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method and system are provided that minimize wafer or package level test time without adversely impacting yields in downstream manufacturing processes or degrading outgoing quality levels. The method provides optimization by determining, a priority, the most effective set of tests for a given lot or wafer. The invention implements a method using a processor-based system involving the integration of multiple sources of data that include: historical and realtime, product specific and lot specific, from wafer fabrication data (i.e., process measurements, defect inspections, and parametric testing), product qualification test results, physical failure analysis results and manufacturing functional test results. These various forms of data are used to determine an optimal set of tests to run using a test application sequence, on a given product to optimize test time with minimum risk to yield or product quality.

Claims

1. A method for testing products being produced, said method comprising:

testing said product during production using a test application sequence, said testing producing defect signature data;

changing numerical limits tests within said test application sequence; and

recomputing said test application sequence based on said defect signature data;

wherein said recomputing compromises one of adding tests to said test application sequence and removing tests from said tests application sequence.

2. A method for testing products being produced, said method comprises:

testing said product during production using a test application sequence, said testing producing defect signature data,

changing a number of times each test is performed within said test application sequence and removing tests from said test application sequence; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

3. A method for testing products being produced, said method comprising:

testing said product during production using a test application sequence to match the amount of tester capacity available;

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

4. A method for testing products being produced said method comprising:

testing said products during production using a test application sequence, said testing producing defect signature data; and

changing test patterns in teat application sequence;

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

5. A method for testing products being produced, said method comprising:

creating a test application sequence based on historical production data;

testing said product during production using said test application sequence, said testing producing defect signature data;

changing numerical limits a tests within said test application sequence; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

6. A method for testing products being produced, said method comprising:

creating a test application sequence based on historical production data;

testing said product during production using said test application sequence, said testing producing defect signature data;

changing a number of time each test is performed within said test application sequence; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said tests application sequence.

7. A method for testing products being produced, said method comprising:

creating a test application sequence based on historical production data;

testing said product during production using said test application sequence, said testing producing defect signature data;

limiting the amount of test performed in said test application sequence to match the amount of tester capacity available; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

8. A method for testing products being produced, said method comprising:

creating a test application sequence based on historical production data;

testing said product during production using said test application sequence, said testing producing defect signature data; and

recomputing said application on sequence based on said defect signature data, and

changing test patterns in said test applicant sequence;

wherein said recomputing comprises one of adding tests to said test application sequence.

9. A method for testing products being produced, said method comprising:

testing said product during production using a test application sequence, said testing producing defect signature data;

changing numerical limits tests within said test application sequence;

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence, and

wherein said recomputing is preformed real time such that said test application sequence is dynamically limited to tests that are more likely to fail than tests not included in said test application sequence even as the types of detects change during production of said product.

10. A method for testing products being produced, said method comprising:

testing said product during production using said test application sequence, said testing producing defect signature data;

changing a number of times each test is performed within said test application sequence;

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence, and

wherein said recomputing is performed in real time such that said test application sequence is dynamically limited to teats that re more likely to fill than tests not included in said test application even as the a of defects change during production of said product.

11. A method for testing products being produced, said method comprising:

testing said product during production using said test application sequence, said testing producing defect signature data;

limiting the amount of testing performed in said test application sequence to match the amount of tester capacity available;

recomputing said test application sequenced based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence, and

wherein said recomputing is performed in real time such that said test application sequence is dynamically limited to tests that are more likely to fail than tests not included in said test application sequence even as the types of defects change during production of said product.

12. A method for testing products being produced, said method comprising:

testing said product during production using said test application sequence, said testing producing defect signature data; and

recomputing said test application sequence based on said defect signature data, and

changing test patterns in said test application sequence;

wherein said recomputing one of adding tests to said test application sequence and removing tests from said test application sequence, and

wherein said recomputing is preformed in real time such that said test application sequence is dynamically limited to tests that are more likely to fail than tests not included in said test application sequence even as the types of defects change during production of said product.

13. A program storage device readable by machine tangibly embodying a program of instructions executable by maid machine for performing a method of testing products being produced said method comprising:

testing said product during production using a test application sequence said testing producing defect signature data;

changing numerical limits on tests within said test application sequence; and

recomputing said tests application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

14. A program storage device readable by machine tangibly embodying a program of instructions executable by said machine for performing a method of testing products being produced, said method comprising:

testing said during production using a test application sequence, said testing producing defect signature data;

changing a number of times each test is performed within said test application sequence; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said tests application sequence.

15. A program storage device readable by machine tangibly embodying a program of instructions executable by said machine for performing a method of testing products being produced, said method comprising:

testing said during production using a test application sequence, said testing producing defect signature data;

limiting the amount of testing performed in said test application sequence to match the amount of tester capacity available; and

recomputing said test application sequence based on said defect signature data,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.

16. A program storage device readable by machine tangibly embodying a program of instructions executable by said machine for performing a method of testing products being produced, said method comprising:

testing said during production using a test application sequence, said testing producing defect signature data; and

recomputing said test application sequence based on said defect signature data, and

changing test patterns in said test application sequence,

wherein said recomputing comprises one of adding tests to said test application sequence and removing tests from said test application sequence.