Remote diagnostic system and method for semiconductor manufacturing equipment

• US 6,618,692 B2
• Filed: 02/26/2001
• Issued: 09/09/2003
• Est. Priority Date: 09/20/2000
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Yamamoto, Hideyuki, Takahashi, Kazue, Tsumaki, Nobuo
• Primary Examiner(s): Hoff, Marc S.
• Assistant Examiner(s): Kim, Paul
• Application Number:
  US09/791,761
• Publication Number:
  US 20020035447A1
• Time in Patent Office: 925 Days
• Field of Search: 702/188, 702/189, 702/183, 702/184, 702/81, 702/182, 340/286.07, 438/14, 706/46, 706/47
• US Class Current: 702/188
• CPC Class Codes: G05B 2219/33284 Remote diagnostic
• CPC Class Codes: G05B 2219/34038 Web, http, ftp, internet, intranet server
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0294 Optimizing process, e.g. process efficiency, product quality
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A remote diagnostic system for semiconductor manufacturing equipment which diagnoses user'"'"'s semiconductor manufacturing equipment connected to a piece of diagnostic equipment which is provided by a third party through a communication network. The diagnostic equipment having at least one diagnostic program which diagnoses said semiconductor manufacturing equipment and a control section which starts the diagnostic program when accessed by a specific user terminal which has been given an access right, and the terminal sends data which is requested by the diagnostic equipment for diagnosis and receives a result of diagnosis from the diagnostic equipment.

Claims

1. A remote diagnostic system for semiconductor manufacturing equipment which diagnoses a user'"'"'s semiconductor manufacturing equipment connected together with a terminal to a piece of diagnostic equipment which is provided by a third party through a communication network;

wherein the diagnostic equipment includes

at least one diagnostic program which diagnoses the semiconductor manufacturing equipment, and

a control section which starts at least one diagnostic program of the at least one diagnostic program when accessed by a specific user terminal given an access right;

wherein a specific user terminal having an access right to use the diagnostic equipment given by a specific third party for a charge sends data which is requested by the diagnostic equipment for diagnosis and receives a result of diagnosis from the diagnostic equipment; and

wherein the diagnostic equipment diagnoses the status of the semiconductor manufacturing equipment by

determining standard operating conditions of the semiconductor manufacturing equipment,

creating at least one database under the standard operating conditions,

running the semiconductor manufacturing equipment under the standard operating conditions to obtain operating data,

loading the diagnostic equipment with the operating data automatically or in response to an input from the specific user terminal, and

comparing the operating data with contents of at least one database of the at least one database.

2. A remote diagnostic system for semiconductor manufacturing equipment which diagnoses semiconductor manufacturing equipment connected to a piece of diagnostic equipment which is provided by a third party through a communication network;

wherein the diagnostic equipment includes

a plurality of diagnostic programs which diagnose the semiconductor manufacturing equipment,

a control section which starts at least one diagnostic program of the plurality of diagnostic programs when accessed by a specific user given an access right to use the diagnostic equipment by a specific third party for a charge, and

a guidance section which displays information about the plurality of diagnostic programs; and

wherein the diagnostic equipment diagnoses the status of the semiconductor manufacturing equipment by

determining standard operating conditions of the semiconductor manufacturing equipment,

creating at least one database under the standard operating conditions,

running the semiconductor manufacturing equipment under the standard operating conditions to obtain operating data,

loading the diagnostic equipment with the operating data automatically or in response an input from the specific user, and

comparing the operating data with contents of at least one database of the at least one database.

3. A remote diagnostic system for semiconductor manufacturing equipment according to claim 2, wherein the diagnostic equipment is constructed so that the specific third party cannot refer to input data and output data of the diagnostic equipment without permission from the specific user.

4. A remote diagnostic system for semiconductor manufacturing equipment according to claim 2, wherein the diagnostic equipment is constructed so that the specific third party cannot refer to input data which was input to the diagnostic equipment without permission from the specific user, but can refer to output data which is output from the diagnostic equipment without permission from the specific user.

5. A remote diagnostic system for semiconductor manufacturing equipment according to claim 2, wherein the diagnostic equipment provides a plurality of diagnosis levels;

and

wherein the specific user can carry out a diagnosis of a higher diagnosis level of the plurality of diagnosis levels than a lowest diagnosis level of the plurality of diagnosis levels for a charge with permission from the specific third party which provides the diagnostic equipment.

6. A remote diagnostic system for semiconductor manufacturing equipment according to claim 5, wherein a highest diagnosis level of the plurality of diagnosis levels may include analysis and consultation by professionals of the specific third party.

7. A remote diagnostic system for semiconductor manufacturing equipment according to claim 6, wherein each diagnosis level of the plurality of diagnosis levels higher than the lowest diagnosis level is constructed so that input data and output data of the diagnostic equipment at an immediately lower diagnosis level of the plurality of diagnosis levels may be automatically disclosed to the specific third party when the specific user carries out a diagnosis of a diagnosis level of the plurality of diagnosis levels higher than the lowest diagnosis level with permission from the specific third party.

8. A remote diagnostic system for semiconductor manufacturing equipment according to claim 5, wherein input data and output data of the diagnostic equipment for each specific user at each diagnosis level of the plurality of diagnosis levels is stored as a database of the specific user in the diagnostic equipment;

and

wherein the specific third party can access the database of each specific user with permission from the specific user.

9. A remote diagnostic system for semiconductor manufacturing equipment according to claim 5, wherein the semiconductor manufacturing equipment is constructed so that when the specific user discloses a database of input data and output data of the diagnostic equipment for the specific user to the specific third party, the charge for the specific user to use the diagnostic equipment is reduced according to a degree of the disclosure by the specific user.