Pressure chamber assembly including non-mechanical drive means

• US 6,619,304 B2
• Filed: 09/13/2001
• Issued: 09/16/2003
• Est. Priority Date: 09/13/2001
• Status: Expired due to Fees

• Current Assignee: Micell Technologies Inc.
• Original Assignee: Micell Technologies Inc.
• Inventors: Worm, Steven Lee
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): PERRIN, JOSEPH L
• Application Number:
  US09/951,355
• Publication Number:
  US 20030047202A1
• Time in Patent Office: 733 Days
• Field of Search: 134/2, 134/33, 134/140, 134/147, 134/157, 118/500, 118/730, 211/41.17, 211/41.18, 310/46
• US Class Current: 134/140
• CPC Class Codes: B08B 7/0021 by liquid gases or supercritical fluids
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A pressure chamber assembly for processing a substrate includes a pressure vessel defining an enclosed pressure chamber. A substrate holder is disposed in the pressure chamber and is adapted to hold the substrate. A drive assembly is operable to move the substrate holder. The drive assembly includes a first drive member connected to the substrate holder for movement therewith relative to the pressure vessel and a second drive member fluidly isolated from the first drive member and the pressure chamber. A drive unit is operable to move the second drive member. The drive unit is fluidly isolated from the first drive member and the pressure chamber. The second drive member is non-mechanically coupled to the first drive member such that the drive unit can move the substrate holder via the first and second drive members.

Claims

1. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a drive assembly operable to move the substrate holder, the drive assembly including;

a first drive member connected to the substrate holder for movement therewith relative to the pressure vessel;

a second drive member fluidly isolated from the first drive member and the pressure chamber; and

a drive unit operable to move the second drive member, wherein the drive unit is fluidly isolated from the first drive member and the pressure chamber;

wherein the second drive member is non-mechanically coupled to the first drive member such that the drive unit can move the substrate holder via the first and second drive members; and

d) means for providing a pressurized fluid in the pressure chamber such that the pressurized fluid pressurized to a pressure greater than ambient atmospheric pressure.

2. The pressure chamber assembly of claim 1 wherein the second drive member is magnetically coupled to the first drive member.

3. The pressure chamber assembly of claim 2 including:

a first magnet mounted on the first drive member;

a second magnet mounted on the second drive member adjacent and spaced apart from the first magnet; and

a housing interposed between the first and second magnets such that the first and second magnets are mutually fluidly isolated thereby.

4. The pressure chamber assembly of claim 1 wherein:

the drive assembly includes a housing forming a fluid-tight seal with the pressure vessel and defining a secondary chamber in fluid communication with the pressure chamber; and

the first drive member is disposed within the secondary chamber and the second drive member is disposed outside the secondary chamber.

5. The pressure chamber assembly of claim 4 wherein the first drive member includes a shaft connected to the substrate holder and the drive assembly further includes a bearing interposed between the shaft and the housing.

6. The pressure chamber assembly of claim 1 wherein the drive assembly is operable to rotate the substrate holder relative to the pressure vessel.

7. The pressure chamber assembly of claim 1 wherein the means for providing the pressurized fluid includes a supply of CO₂ fluid.

8. The pressure chamber assembly of claim 7 wherein the supply of CO₂ fluid is includes dense phase CO₂.

9. The pressure chamber assembly of claim 8 wherein the supply of CO₂ fluid is includes liquid CO₂ and/or supercritical fluid CO₂.

10. The pressure chamber assembly of claim 9 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of at least 400 psi.

11. The pressure chamber assembly of claim 10 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of between about 800 psi and 3000 psi.

12. The pressure chamber assembly of claim 1 wherein the means for providing the pressurized fluid includes a tank containing a supply of pressurized fluid, the tank being fluidly connected to the pressure chamber.

13. The pressure chamber assembly of claim 12 wherein the means for providing a pressurized fluid includes a pump.

14. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a magnetic drive assembly operable to move the substrate holder relative to the pressure vessel; and

d) means for providing a pressurized fluid in the pressure chamber such that the pressurized fluid is pressurized to a pressure greater than ambient atmospheric pressure.

15. The pressure chamber assembly of claim 14 wherein the means for providing the pressurized fluid includes CO₂ fluid.

16. The pressure chamber assembly of claim 15 wherein the supply of CO₂ fluid includes dense phase CO₂.

17. The pressure chamber assembly of claim 16 wherein the supply of CO₂ fluid includes liquid CO₂ and/or supercritical fluid CO₂.

18. The pressure chamber assembly of claim 15 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of at least 400 psi.

19. The pressure chamber assembly of claim 18 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of between about 800 psi and 3000 psi.

20. The pressure chamber assembly of claim 14 wherein the means for providing the pressurized fluid includes a tank containing a supply of pressurized fluid, the tank being fluidly connected to the pressure chamber.

21. The pressure chamber assembly of claim 20 wherein the means for providing a pressurized fluid includes a pump.

22. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber and an exterior opening in fluid communication with the pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a drive assembly operable to non-mechanically move the substrate holder relative to the pressure vessel, the drive assembly including a housing covering the exterior opening of the pressure chamber so as to seal the exterior opening; and

d) means for providing a pressurized fluid in the pressure chamber such that the pressurized fluid pressurized to a pressure greater than ambient atmospheric pressure.

23. The pressure chamber assembly of claim 22 wherein the drive assembly includes a drive member extending through the exterior opening and connected to the substrate holder.

24. The pressure chamber assembly of claim 22 wherein the means for providing the pressurized fluid includes a supply of CO₂ fluid.

25. The pressure chamber assembly of claim 24 wherein the supply of CO₂ fluid includes dense phase CO₂.

26. The pressure chamber assembly of claim 25 wherein the supply of CO₂ fluid is includes liquid CO₂ and/or supercritical fluid CO₂.

27. The pressure chamber assembly of claim 24 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of at least 400 psi.

28. The pressure chamber assembly of claim 27 wherein the means for providing the pressurized fluid is adapted to provide the CO₂ fluid in the pressure chamber at a pressure of between about 800 psi and 3000 psi.

29. The pressure chamber assembly of claim 22 wherein the means for providing the pressurized fluid includes a tank containing a supply of pressurized fluid, the tank being fluidly connected to the pressure chamber.

30. The pressure chamber assembly of claim 29 wherein the means for providing a pressurized fluid includes a pump.

31. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a drive assembly operable to move the substrate holder, the drive assembly including;

a first drive member connected to the substrate holder for movement therewith relative to the pressure vessel;

a second drive member fluidly isolated from the first drive member and the pressure chamber; and

a drive unit operable to move the second drive member, wherein the drive unit is fluidly isolated from the first drive member and the pressure chamber;

wherein the second drive member is non-mechanically coupled to the first drive member such that the drive unit can move the substrate holder via the first and second drive members; and

d) a supply of CO₂ fluid fluidly connected to the pressure chamber.

32. The pressure chamber assembly of claim 31 including a tank containing the supply of CO₂ fluid such that the supply of CO₂ fluid within the tank is maintained at a pressure greater than ambient atmospheric pressure.

33. The pressure chamber assembly of claim 32 wherein the supply of CO₂ fluid within the tank includes dense phase CO₂.

34. The pressure chamber assembly of claim 32 wherein the supply of CO₂ fluid within the tank is pressurized to a pressure of at least 400 psi.

35. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a magnetic drive assembly operable to move the substrate holder relative to the pressure vessel; and

d) a supply of CO₂ fluid fluidly connected to the pressure chamber.

36. The pressure chamber assembly of claim 35 including a tank containing the supply of CO₂ fluid such that the supply of CO₂ fluid within the tank is maintained at a pressure greater than ambient atmospheric pressure.

37. The pressure chamber assembly of claim 36 wherein the supply of CO₂ fluid within the tank includes dense phase CO₂.

38. The pressure chamber assembly of claim 36 wherein the supply of CO₂ fluid within the tank is pressurized to a pressure of at least 400 psi.

39. A pressure chamber assembly for processing a substrate, the pressure chamber assembly comprising:

a) a pressure vessel defining an enclosed pressure chamber and an exterior opening in fluid communication with the pressure chamber;

b) a substrate holder disposed in the pressure chamber and adapted to hold the substrate;

c) a drive assembly operable to non-mechanically move the substrate holder relative to the pressure vessel, the drive assembly including a housing covering the exterior opening of the pressure chamber so as to seal the exterior opening; and

d) a supply of CO₂ fluid fluidly connected to the pressure chamber.

40. The pressure chamber assembly of claim 39 including a tank containing the supply of CO₂ fluid such that the supply of CO₂ fluid within the tank is maintained at a pressure greater than ambient atmospheric pressure.

41. The pressure chamber assembly of claim 40 wherein the supply of CO₂ fluid within the tank includes dense phase CO₂.

42. The pressure chamber assembly of claim 40 wherein the supply of CO₂ fluid within the tank is pressurized to a pressure of at least 400 psi.