Time resolved non-invasive diagnostics system

• US 6,621,275 B2
• Filed: 11/28/2001
• Issued: 09/16/2003
• Est. Priority Date: 11/28/2001
• Status: Expired due to Term

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: Optonics, Inc. (COHU Incorporated)
• Inventors: Wong, Thomas, Cotton, Daniel Murdoch, Vickers, James Squire, Pakdaman, Nader
• Primary Examiner(s): Le, N.
• Assistant Examiner(s): Teresinski, John
• Application Number:
  US09/995,548
• Publication Number:
  US 20030098692A1
• Time in Patent Office: 657 Days
• Field of Search: 324/537, 324/765, 324/501, 324/724, 324/719, 324/754, 324/758
• US Class Current: 324/537
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).

Claims

1. An integrated system for testing an integrated circuit chip stimulated to simulate operating conditions, comprising:

a test bench for placing the chip thereupon;

collection optics;

a bi-convex solid immersion lens;

a primary illumination source for illuminating said chip through said collection optics in a navigation mode;

an imager for imaging said chip using light reflected from said chip and collected by the bi-convex solid immersion lens;

a photon sensor operable in a detection mode to detect photons emitted from the chip and generate corresponding electrical signals;

a system controller receiving said electrical signals and providing timing information of said photons;

wherein said light source ceases illuminating said chip during said detection mode.

2. The system of claim 1, further comprising a movable stage connected to said test bench from the underside, and wherein said collection optics is affixed to said movable stage.

3. The system of claim 1, further comprising a cooling mechanism operable for cooling said chip.

4. The system of claim 1, further comprising an optical element operable to selectively direct one of:

light from the illumination system onto said chip, or photons emitted from the chip onto said photon sensor.

5. The system of claim 1, wherein said imager comprises a vidicon camera.

6. The system of claim 4, wherein said optical element comprises a switchable mirror.

7. The system of claim 1, wherein said photon sensor comprises an avalanche photodiode.

8. The system of claim 1, further comprising a mechanized aperture situated in the image plane of said collection optics.

9. The system of claim 1, further comprising a secondary illumination source for illuminating said chip through said collection optics.

10. The system of claim 9, further comprising a fiber optics providing an optical path between said collection optics and at least one of said photon sensor (detector) and secondary illumination source.

11. The system of claim 3, wherein said cooling mechanism comprises a micro-spray cooling system.

12. The system of claim 1, wherein said controller further comprises a gating timer for gating said photon sensor.

13. The system of claim 1, further comprising a z-actuator supporting said collecting optics for effecting focusing of said collection optics.

14. The system of claim 13, further comprising an autofocus controlling said z-actuator.

15. The system of claim 14, wherein said autofocus determines focus condition according to periodical count of photons detected by said photon detector.

16. An integrated system for testing an integrated circuit chip, said chip coupled to an automated testing equipment (ATE) that sends stimulating signals to said chip to simulate operating conditions of said chip, said system comprising:

a controller receiving sync signals from said ATE;

an optical imaging system for selectively imaging selected devices of said chip;

a collection system for collecting photoemission from said chip and providing a time-resolved signal indicative of said photoemissions;

a navigation system for orienting said optical imaging system and said collection system with respect to said selected devices; and

,

a cooling system for cooling said chip to a temperature designated by said controller.

17. The system of claim 16, wherein said optical imaging system comprises a mechanical aperture operable to select areas of interest from within field of view defined by said optical imaging system.

18. The system of claim 16 wherein said cooling system comprises a micro-spray cooling system.

19. The system of claim 18, wherein said collection system comprises an immersion lens.

20. The system of claim 19, wherein said immersion lens is a bi-convex immersion lens.

21. The system of claim 16, wherein said collection system for collecting photoemission from said chip further provides focusing signal according to perodical collection of said photoemission.

22. The system of claim 21, wherein said collection system comprises a bi-convex immersion lens.

23. The system of claim 22, wherein said cooling system comprises a micro-spray cooling system.

24. The system of claim 23, wherein said optical imaging system comprises an illumination source coupled to a fiber cable to illuminate selected devices on said chip.

25. The system of claim 24, wherein said illumination source provides light in the infra-red spectrum.