Impedance matching device

• US 6,621,372 B2
• Filed: 02/27/2002
• Issued: 09/16/2003
• Est. Priority Date: 03/01/2001
• Status: Active Grant

• Current Assignee: Daihen Corporation
• Original Assignee: Daihen Corporation
• Inventors: Kaneko, Eiji, Matsuno, Daisuke, Itadani, Koji, Kondo, Kazuki
• Primary Examiner(s): NGUYEN, PATRICIA T
• Application Number:
  US10/085,861
• Publication Number:
  US 20020163398A1
• Time in Patent Office: 566 Days
• Field of Search: 333/35, 333/17.3, 333/32, 333/99.PL
• US Class Current: 333/35
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H03H 7/38 Impedance-matching networks

Abstract

In an impedance matching device having at least two stubs serially provided to a main coaxial tube so as to be separated from each other with a predetermined interval in a tube axial direction, each stub is composed of a variable capacity capacitor to be jointed to an inner conductor of the main coaxial tube, an electrically conductive capacitor cover to be jointed to an outer conductor of the main coaxial tube so as to cover a surrounding of the variable capacity capacitor, and a drive motor arranged on an outside of the capacitor cover so as to drive a movable side electrode of the variable capacity capacitor. The movable side electrode of the variable capacity capacitor is driven directly by the drive motor so that the impedance matching device is made to be compact and response of impedance matching to a fluctuation of a load impedance such as a behavior of a plasma load is improved, and the life is lengthened and degrees of freedom of installation is widened.

Claims

1. An impedance matching device, comprising at least two stubs provided serially on a main coaxial tube to be separated from each other with a predetermined interval in a tube axial direction, said main coaxial tube having an inner conductor and an outer conductor,

wherein said each stub comprising:

a variable capacity capacitor whose one end is to be jointed to said inner conductor of said main coaxial tube, said variable capacity capacitor having a movable side electrode and a fixed side electrode;

an electrically conductive capacitor cover to be jointed to said outer conductor of said main coaxial tube so as to be electrically joined to the other end of said variable capacity capacitor as well as to cover a surrounding of said variable capacity capacitor; and

a drive motor arranged on an outside of said capacitor cover so as to drive said movable side electrode of said variable capacity capacitor.

2. The impedance matching device according to claim 1, wherein said variable capacity capacitor has cylindrically-shaped movable side electrodes and fixed side electrodes which are inwardly and outwardly fitted into a multilayer.

3. The impedance matching device according to claim 1, wherein said device is designed based on a susceptance of said each stub having said variable capacity capacitor and of said capacitor cover, said susceptance being calculated according to the following formula:

$B<br><br>\text{\hspace{1em}<br><br>}<br><br>x=\frac{\mathrm{\omega <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>C_x}{1-{\mathrm{\omega <br><br>}}^2<br><br>C_x<br><br>L_x}$

(where, Bx is the susceptance, Lx is a parasitic inductance, Cx is the electrostatic capacity of said variable capacity capacitor, and ω

is a use angular frequency).