Troubleshooting method involving image-based fault detection and classification (FDC) and troubleshooting guide (TSG), and systems embodying the method

• US 6,621,412 B1
• Filed: 02/14/2001
• Issued: 09/16/2003
• Est. Priority Date: 02/14/2001
• Status: Active Grant

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Markle, Richard J., Weaver, Elizabeth
• Primary Examiner(s): MULLEN, THOMAS J
• Application Number:
  US09/782,840
• Time in Patent Office: 944 Days
• Field of Search: 700/95, 700/108, 700/109, 700/110, 438/14, 340/691.6, 340/691.1, 340/679, 340/517, 340/521
• US Class Current: 340/517
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

Several different embodiments of a troubleshooting method are described. In one embodiment, an alarm data image is provided (e.g., to a user). The alarm data image may be displayed upon on a display screen visible by the user. The alarm data image includes an image indicative of a problem (e.g., an abnormal condition or faulty state of a processing or metrology tool). Information indicative of a class in which the problem resides is used to access a corresponding portion of a troubleshooting guide (TSG). The corresponding portion of the TSG includes one or more symptom images, wherein each symptom image includes an image indicative of a symptom of the class in which the problem resides. Each symptom image has a corresponding corrective action. A selected one of the symptom images is selected (e.g., by the user). Where the selecting is performed by the user, the user may select one of the symptom images the user believes most closely resembles the alarm data image. The corrective action corresponding to the selected one of the at least one symptom image is provided (e.g., to the user). The corrective action may be displayed upon on the display screen. The corrective action may be accomplished (e.g., by the user) to solve the problem. The alarm data image and/or the symptom images may be, for example, two-dimensional (2D) charts or graphs, three-dimensional (3D) charts or graphs, or images or pictures. Several embodiments of a fabrication system are described, each incorporating the troubleshooting method.

Claims

1. A troubleshooting method, comprising:

providing an alarm data image, wherein the alarm data image comprises an image indicative of a problem;

using information indicative of a class in which the problem resides to access a corresponding portion of a troubleshooting guide (TSG), wherein the corresponding portion of the TSG comprises at least one symptom image, and wherein each of the at least one symptom image comprises an image indicative of a symptom of the class in which the problem resides, and wherein each of the at least one symptom image has a corresponding corrective action;

selecting a selected one of the at least one symptom image; and

providing the corrective action corresponding to the selected one of the at least one symptom image.

2. The troubleshooting method as recited in claim 1, wherein the problem represents an abnormal condition.

3. The troubleshooting method as recited in claim 1, wherein providing of the alarm data image comprises:

receiving alarm data indicative of a problem;

using the alarm data to generate an alarm data image, wherein the alarm data image comprises an image indicative of the problem; and

providing the alarm data image.

4. The troubleshooting method as recited in claim 1, wherein providing of the alarm data image comprises:

displaying an alarm data image upon a display screen, wherein the alarm data image comprises an image indicative of a problem.

5. The troubleshooting method as recited in claim 1, wherein selecting of the selected one of the at least one symptom image comprises:

selecting a selected one of the at least one symptom image by a user.

6. The troubleshooting method as recited in claim 1, wherein selecting of the selected one of the at least one symptom image comprises:

selecting a selected one of the at least one symptom image, wherein the selected one of the at least one symptom image most closely resembles the alarm data image.

7. The troubleshooting method as recited in claim 1, wherein selecting of the selected one of the at least one symptom image comprises:

providing the at least one symptom image; and

receiving data indicative of a selected one of the at least one symptom image.

8. The troubleshooting method as recited in claim 1, wherein providing of the alarm data image comprises:

providing a two-dimensional (2D) statistical process control (SPC) chart of data regarding a measured characteristic of at least one semiconductor wafer processed through a processing tool versus time, wherein the measured characteristic is affected by the processing tool, and wherein the 2D SPC chart indicates the measured characteristic has departed an acceptable range established for the processing tool.

9. The troubleshooting method as recited in claim 8, wherein selecting of the selected one of the at least one symptom image comprises:

selecting a selected one of the at least one symptom image, wherein each of the at least one symptom image is a 2D SPC chart of data regarding the measured characteristic of the at least one semiconductor wafer processed through the processing tool versus time, and wherein each of the at least one symptom image indicates a different way in which the measured characteristic may depart the acceptable range established for the processing tool, and wherein the selected one of the at least one symptom image most closely resembles the alarm data image.

10. The troubleshooting method as recited in claim 1, wherein providing of the alarm data image comprises:

providing an alarm data image, wherein the alarm data image comprises an image indicative of a problem, and wherein the alarm data image is selected from the group consisting of;

(i) a two-dimensional (2D) chart or graph, (ii) a three-dimensional (3D) chart or graph, and (iii) an image or picture.

11. The troubleshooting method as recited in claim 10, wherein selecting of the selected one of the at least one symptom image comprises:

selecting a selected one of the at least one symptom image, wherein when the alarm data image is a 2D chart or graph, each of the at least one symptom image is a 2D chart or graph, and wherein when the alarm data image is a 3D chart or graph, each of the at least one symptom image is a 3D chart or graph, and wherein when the alarm data image is an image or picture, each of the at least one symptom image is an image or picture.

12. The troubleshooting method as recited in claim 1, wherein providing of the alarm data image comprises:

providing an alarm data image, wherein the alarm data image comprises an image indicating a measured characteristic of at least one semiconductor wafer processed through a processing tool has departed an acceptable range established for the processing tool, and wherein the alarm data image is selected from the group consisting of;

(i) a two-dimensional (2D) chart or graph generated using historical data regarding the measured characteristic, (ii) a three-dimensional (3D) chart or graph generated using historical data regarding the measured characteristic, and (iii) an image or picture of a condition existing on or within the at least one semiconductor wafer.

13. The troubleshooting method as recited in claim 12, wherein selecting of the selected one of the at least one symptom image comprises:

selecting a selected one of the at least one symptom image, wherein each of the at least one symptom image comprises an image indicating a different way in which the measured characteristic of the at least one semiconductor wafer processed through the processing tool may depart the acceptable range established for the processing tool, and wherein when the alarm data image is a 2D chart or graph, each of the at least one symptom image is a 2D chart or graph, and wherein when the alarm data image is a 3D chart or graph, each of the at least one symptom image is a 3D chart or graph, and wherein when the alarm data image is an image or picture of a condition existing on or within at least one of the semiconductor wafers, each of the at least one symptom image is an image or picture of a physical condition of at least one component of the processing tool.

14. The troubleshooting method as recited in claim 1, wherein the information indicative of the class in which the problem resides comprises a type of a processing tool.

15. The troubleshooting method as recited in claim 14, wherein the information indicative of the class in which the problem resides further comprises an application for which the processing tool is being used.

16. The troubleshooting method as recited in claim 1, further comprising:

providing information indicative of a class in which the problem resides by a user.

17. The troubleshooting method as recited in claim 1, further comprising accomplishing the corrective action to solve the problem.

18. A troubleshooting method, comprising:

displaying an alarm data image upon a display screen, wherein the alarm data image comprises an image indicative of a problem;

using information indicative of a class in which the problem resides to access a portion of a troubleshooting guide (TSG), wherein the portion of the TSG comprises at least one symptom image, and wherein each of the at least one symptom image comprises an image indicative of a symptom of the class in which the problem resides, and wherein each of the at least one symptom image has a corresponding probable cause and corrective action;

displaying the at least one symptom image upon the display screen;

selecting a selected one of the at least one symptom image by a user;

displaying the probable cause and the corrective action corresponding to the selected one of the at least one symptom image upon the display screen; and

accomplishing the corrective action to solve the problem.

19. The troubleshooting method as recited in claim 18, wherein displaying of the alarm data image upon the display screen comprises:

displaying an alarm data image within a first portion of a display screen, wherein the alarm data image comprises an image indicative of a problem.

20. The troubleshooting method as recited in claim 19, wherein displaying of the at least one symptom image upon the display screen comprises:

displaying the at least one symptom image within a second portion of the display screen such that the alarm data image and the at least one symptom image are displayed upon the display screen simultaneously.

21. The troubleshooting method as recited in claim 18, wherein selecting the selected one of the at least one symptom image by the user comprises:

moving a pointing device by the user until an arrow displayed upon the display screen and representing a positional state of the pointing device is displayed over a selected one of the at least one symptom image; and

selecting the selected one of the at least one symptom image by the user activating an electrical switch.

22. The troubleshooting method as recited in claim 18, wherein displaying of the probable cause and the corrective action comprises:

displaying the probable cause corresponding to the selected one of the at least one symptom image within a first portion of the display screen; and

displaying the corrective action corresponding to the selected one of the at least one symptom image within a second portion of the display screen such that the probable cause and the corrective action are displayed upon the display screen simultaneously.