Method and system for tracking manufacturing data for integrated circuit parts

• US 6,622,102 B2
• Filed: 05/30/2002
• Issued: 09/16/2003
• Est. Priority Date: 08/21/1997
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Skidmore, Beth
• Primary Examiner(s): WACHSMAN, HAL D
• Application Number:
  US10/160,380
• Publication Number:
  US 20020152043A1
• Time in Patent Office: 474 Days
• Field of Search: 702/81-84, 702/33-36, 702/40, 702/108, 702/113-115, 702/117-123, 702/179, 702/180, 702/182-185, 702/187, 702/FOR.155, 702/FOR-135, 702/FOR.139, 702/FOR.170, 702/FOR-123, 702/FOR.171, 438/10-12, 438/14-18, 324/764-769, 324/550, 324/537, 257/529, 257/65, 235/385, 235/462.01, 250/566, 250/568, 700/109, 700/110, 700/115, 700/116, 700/119-121, 209/571-573, 209/583, 365/201, 365/225.7
• US Class Current: 702/84
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Abstract

An apparatus and method for tracking data for individual integrated circuits through the manufacturing process is described by programming an individual part identifier into a non-volatile portion of the integrated circuit and maintaining a database of all manufacturing step statistics for later review and analysis. The part identifier allows individual integrated circuits to be moved through the manufacturing process without the need to physically track original fabrication lots. The database of information is used to improve the manufacturing process by identifying failure trends based upon process variations.

Claims

1. A method for tracking fabrication information for the manufacture of integrated circuit devices, comprising:

manufacturing a plurality of workpieces, each containing a plurality of integrated circuit devices, by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a lot number for the plurality of workpieces;

assigning a part identifier to each integrated circuit device of the plurality of integrated circuit devices;

programming the part indentifier into a non-volatile portion of each integrated circuit device of the plurality of integrated circuit devices;

associating the lot number with the part identifier for each integrated circuit device of the plurality of integrated circuit devices;

reading the part identifier for each integrated circuit device of the plurality of integrated circuit devices;

testing each integrated circuit device of the plurality of integrated circuit devices to produce test results;

recording the test results for each integrated circuit device of the plurality of integrated circuit devices;

saving the process data and the test results to a memory in a computer;

associating the process data and the test results with the part identifier and the lot number for each integrated circuit device of the plurality of integrated circuit devices in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

2. The method according to claim 1, further including sorting the database to construct data summaries of ones of the plurality of integrated circuit devices that all began manufacturing together or that have at least one characteristic in common.

3. The method according to claim 2, further including sorting the database to construct trends in failures of integrated circuit devices of a particular lot.

4. The method according to claim 2, further including sorting the database to construct types of failures in processing of workpieces based on process variations.

5. The method of claim 1, wherein manufacturing a plurality of workpieces includes providing a wafer.

6. The method of claim 1, wherein manufacturing a plurality of workpieces includes providing a substrate.

7. The method of claim 1, wherein manufacturing a plurality of workpieces includes fabricating a plurality of memory devices.

8. A method for tracking fabrication information for the manufacture of integrated circuit parts, comprising:

manufacturing a plurality of integrated circuit parts on a workpiece by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a lot number for a plurality of workpieces;

assigning a part identifier to each integrated circuit device of the plurality of integrated circuit parts;

programming the part identifier into a non-volatile portion of each integrated circuit device of the plurality of integrated circuit parts;

associating the lot number with the part identifier for each integrated circuit device of the plurality of integrated circuit parts;

reading the part identifier for each integrated circuit device of the plurality of integrated circuit parts;

testing each integrated circuit device of the plurality of integrated circuit parts to produce test results;

recording the test results for each integrated circuit device of the plurality of integrated circuit parts;

saving the process data and the test results to a memory;

associating the process data and the test results with the part identifier and the lot number for each integrated circuit device of the plurality of integrated circuit parts in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

9. The method according to claim 8, further including sorting the database to construct data summaries of ones of the plurality of integrated circuit parts that all began manufacturing together or that have at least one characteristic in common.

10. The method according to claim 9, further including sorting the database to construct trends in failures of parts of a particular lot.

11. The method according to claim 9, further including sorting the database to construct types of failures in processing of workpieces based on process variations.

12. The method of claim 8, wherein manufacturing a plurality of integrated circuit parts on a workpiece includes manufacturing a plurality of memory devices on the workpiece.

13. The method of claim 12, wherein manufacturing a plurality of memory devices on the workpiece includes manufacturing a dynamic random access memory.

14. The method of claim 12, wherein manufacturing a plurality of memory devices on the workpiece includes manufacturing a static random access memory.

15. The method of claim 8, wherein manufacturing a plurality of integrated circuit parts on a workpiece includes manufacturing the plurality of integrated circuit parts on a wafer.

16. The method of claim 8, wherein manufacturing a plurality of integrated circuit parts on a workpiece includes manufacturing the plurality of integrated circuit parts on a substrate.

18. The method according to claim 12, further including sorting the database to construct data summaries of ones of the plurality of integrated circuit parts that all began manufacturing together or that have at least one characteristic in common.

19. The method according to claim 18, further including sorting the database to construct trends in failures of parts of a particular lot.

20. The method according to claim 18, further including sorting the database to construct types of failures in processing step based on process variations.

17. A method for tracking fabrication information for the manufacture of integrated circuit parts, comprising:

manufacturing a plurality of integrated circuit parts on a workpiece by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a part identifier to each integrated circuit device of the plurality of integrated circuit parts;

assigning a lot number to the workpiece;

programming the part identifier into a non-volatile portion of each integrated circuit device of the plurality of integrated circuit parts;

associating the lot number with the part identifier for each integrated circuit device of the plurality of integrated circuit parts;

reading the part identifier for each integrated circuit device of the plurality of integrated circuit parts;

testing at least one of the plurality of integrated circuit parts to produce test results;

recording the test results for the at least one integrated circuit part;

saving the process data and the test results to a memory;

associating the process data and the test results with the part identifier and the lot number for each integrated circuit device of the plurality of integrated circuit parts in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

21. The method of claim 17, wherein manufacturing a plurality of integrated circuit parts includes manufacturing a plurality of memory devices.

22. The method of claim 21, wherein manufacturing a plurality of memory devices includes manufacturing a dynamic random access memory.

23. The method of claim 21, wherein manufacturing a plurality of memory devices includes manufacturing a static random access memory.

24. The method of claim 17, wherein manufacturing a plurality of integrated circuit parts on a workpiece includes manufacturing the plurality of IC parts on a wafer.

25. The method of claim 17, wherein manufacturing a plurality of integrated circuit parts on a workpiece includes manufacturing the plurality of IC parts on a substrate.

26. A method for tracking fabrication information for the manufacture of integrated circuit devices, comprising:

providing a plurality of workpieces;

dividing the plurality of workpieces into lots;

assigning a lot number to each lot;

performing a plurality of processing steps on each lot of workpieces to form a plurality of integrated circuit devices on each workpiece;

storing process data associated with at least one of the plurality of processing steps;

assigning a part identifier to each integrated circuit device of the plurality of integrated circuit devices;

programming the part identifier into a non-volatile portion of each integrated circuit device of the plurality of integrated circuit devices;

associating the lot number with the part identifier for each integrated circuit device of the plurality of integrated circuit devices;

reading the part identifier for each integrated circuit device of the plurality of integrated circuit devices;

testing each integrated circuit device of the plurality of integrated circuit devices to produce test results;

recording the test results for each integrated circuit device of the plurality of integrated circuit devices;

saving the process data and the test results to a memory in a computer;

associating the process data and the test results with the part identifier and the lot number for each integrated circuit device of the plurality of integrated circuit devices in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

27. The method according to claim 26, further including sorting the database to construct data summaries of ones of the plurality of integrated circuit devices that all began manufacturing together.

28. The method according to claim 27, further including sorting the database to construct trends in failures of integrated circuit devices of a particular lot.

29. The method according to claim 28, further including sorting the database to construct types of failures in processing of workpieces based on process variations.

30. The method according to claim 26, further including sorting the database to construct data summaries of ones of the plurality of integrated circuit devices that have at least one characteristic in common.

31. The method according to claim 30, further including sorting the database to construct trends in failures of integrated circuit devices of a particular lot.

32. The method according to claim 31, further including sorting the database to construct types of failures in processing of workpieces based on process variations.

33. The method of claim 26, wherein performing a plurality of processing steps includes forming dynamic random access memories.

34. The method of claim 26, wherein performing a plurality of processing steps includes forming static random access memories.

35. The method of claim 26, wherein providing a plurality of workpieces includes providing a plurality of wafers.

36. The method of claim 26, wherein providing a plurality of workpieces includes providing a plurality of substrates.