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Network-based photomask data entry interface and instruction generator for manufacturing photomasks

  • US 6,622,295 B1
  • Filed: 07/05/2000
  • Issued: 09/16/2003
  • Est. Priority Date: 07/05/2000
  • Status: Expired due to Fees
First Claim
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1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:

  • an interface computer accessible to a remote customer computer via a remote network connection, and during the network connection, the interface computer operable to perform the following tasks;

    download a series of display screens to the customer computer, receive photomask specification data from the customer computer, validate the photomask specification data, and download validation results to the customer computer;

    wherein the screens prompt a customer to enter the photomask specification data, the screens comprising at least a first data screen and a second data screen, and wherein the second data screen lists information based on data provided to the first data screen;

    wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;

    a photomask specification database in communication with the interface computer, operable to store the photomask specification data;

    a command generator in communication with the photomask specification database, operable to generate fracturing instructions and control instructions in response to the photomask specification data;

    a customer design database that stores design data for the photomask; and

    a fracture engine that receives the fracturing instructions and the design data and uses this data to generate fractured pattern data.

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