Network-based photomask data entry interface and instruction generator for manufacturing photomasks

• US 6,622,295 B1
• Filed: 07/05/2000
• Issued: 09/16/2003
• Est. Priority Date: 07/05/2000
• Status: Expired due to Fees

• Current Assignee: Toppan Photomasks Incorporated (TOPPAN Holdings, Inc.)
• Original Assignee: DuPont Photomasks Inc (TOPPAN Holdings, Inc.)
• Inventors: Cogdell, Thomas T., Gentry, Jan E., Schepp, Jeffry S.
• Primary Examiner(s): Siek, Vuthe
• Assistant Examiner(s): Bowers, Brandon
• Application Number:
  US09/610,917
• Time in Patent Office: 1,168 Days
• Field of Search: 716/19-21, 700/121
• US Class Current: 716/55
• CPC Class Codes: G03F 1/00 Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G06Q 30/02 Marketing; Price estimation or determination; Fundraising
• CPC Class Codes: G06Q 30/04 Billing or invoicing
• CPC Class Codes: G06Q 30/0603 Catalogue ordering
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: H01J 2237/31762 Computer and memory organisation
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer'"'"'s computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer'"'"'s local network. The manufacturer'"'"'s computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.

Claims

1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:

an interface computer accessible to a remote customer computer via a remote network connection, and during the network connection, the interface computer operable to perform the following tasks;

download a series of display screens to the customer computer, receive photomask specification data from the customer computer, validate the photomask specification data, and download validation results to the customer computer;

wherein the screens prompt a customer to enter the photomask specification data, the screens comprising at least a first data screen and a second data screen, and wherein the second data screen lists information based on data provided to the first data screen;

wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;

a photomask specification database in communication with the interface computer, operable to store the photomask specification data;

a command generator in communication with the photomask specification database, operable to generate fracturing instructions and control instructions in response to the photomask specification data;

a customer design database that stores design data for the photomask; and

a fracture engine that receives the fracturing instructions and the design data and uses this data to generate fractured pattern data.

2. The network of claim 1, wherein the remote network connection is an internet connection.

3. The network of claim 1, wherein the customer design database has a communications interface for receiving design data from the customer in electronic form.

4. The method of claim 3, wherein the design data is received during the same network connection as the photomask specification data.

5. The network of claim 1, wherein the command generator is further operable to deliver the control instructions to memory accessible by the manufacturing equipment.

6. The network of claim 1, wherein the fracture engine is further operable to deliver the fractured pattern data to memory accessible by the manufacturing equipment.

7. The network of claim 1, wherein the fracturing instructions are in the form of a cinc file.

8. The network of claim 1, wherein the interface computer validates the photomask specification data by determining whether data has been entered in a specified format.

9. The network of claim 1, wherein the interface computer validates the photomask specification data by determining whether data complies with dimensional criteria.

10. The network of claim 1, wherein the interface computer validates the photomask specification data by validating fracturing data.

11. The network of claim 1, wherein the first data screen comprises a layer data screen and the second data screen comprises a pattern data screen and wherein the pattern data screen lists layers based on data provided to the layer data screen.

12. The network of claim 1, wherein the first data screen comprises a layer data screen and the second data screen comprises a pattern placement screen and wherein the pattern placement screen lists layers based on data provided to the layer data screen.

13. The network of claim 1, wherein the first data screen comprises a pattern data screen and the second data screen comprises a fracture screen and wherein the fracture screen lists layers based on data provided to the pattern data screen.

14. A network-based method of generating instructions for use by photomask manufacturing equipment, comprising the steps of:

downloading a series of display screens to a customer computer via a remote network connection, each of the network screens operable to prompt the customer to enter photomask specification data;

wherein the screens comprise at least a layer data screen and a pattern data screen and wherein the pattern data screen lists layers based on data provided to the layer data screen;

wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;

receiving the photomask specification data from the customer computer via the remote network connection, at local computing equipment on a local network of the photomask manufacturer; and

using the local computing equipment to perform the following tasks;

to validate the photomask specification data during the remote network connection;

to generate fracturing instructions in response to the photomask specification data;

to receive pattern design data from the customer;

to use the fracturing instructions and the pattern design data to generate fractured pattern data; and

to generate control instructions for the manufacturing equipment.

15. The method of claim 14, wherein the screens further comprise at least a pattern placement screen operable to list layers based on data provided to the layer data screen.

16. The method of claim 14, wherein the screens further comprise at least a fracture screen operable to list patterns based on data provided to the pattern data screen.

17. The method of claim 14, wherein the local computing equipment further delivers the fractured pattern data and the control instructions to the manufacturing equipment.

18. The method of claim 14, wherein the local computing equipment comprises an interface computer, a command generator, and a fracture engine, implemented on at least one computer.

19. The method of claim 14, wherein the local computing equipment validates the photomask specification data by determining whether data has been entered in a specified format.

20. The method of claim 14, wherein the local computing equipment validates the photomask specification data by determining whether data complies with dimensional criteria.

21. The method of claim 14, wherein the local computing equipment validates the photomask specification data by validating fracturing data.

22. The method of claim 14, wherein the remote network connection is an internet connection.

23. The method of claim 14, wherein the local computing equipment receives the pattern design data from the customer in electronic form.

24. The method of claim 23, wherein the design data is received during the same network connection as the photomask specification data.