Precision double-sided aspheric element

• US 6,622,599 B1
• Filed: 05/20/1999
• Issued: 09/23/2003
• Est. Priority Date: 05/21/1998
• Status: Expired due to Fees

• Current Assignee: Ophir Optronics Solutions Ltd. (MKS Instruments Incorporated)
• Original Assignee: Ophir Optronics Ltd. (MKS Instruments Incorporated)
• Inventors: Zerem, Yaacov, Asida, Nissim, Ben-Menachem, Baruch
• Primary Examiner(s): TSAI, HENRY
• Application Number:
  US09/315,423
• Time in Patent Office: 1,587 Days
• Field of Search: 82/12, 82/13, 82/13, 82/14, 82/113, 82/114, 269/21, 279/3, 351/159, 409/131, 409/137, 409/138, 359/569, 359/683, 359/687
• US Class Current: 82/1.3
• CPC Class Codes: B24B 13/005 Blocking means, chucks or the like; Alignment devices
• CPC Class Codes: B24B 13/046 using a pointed tool or scraper-like tool B24B13/015 and B24B13/065 take precedence
• CPC Class Codes: B24B 41/061 axially supporting turning workpieces, e.g. magnetically, pneumatically
• CPC Class Codes: G02B 13/14 for use with infrared or ultraviolet radiation G02B13/008, G02B13/16 take precedence
• CPC Class Codes: G02B 27/0037 with diffracting elements G02B27/0056 takes precedence; holographic optical elements G02B5/32; zone systems G02B5/1876
• CPC Class Codes: G02B 27/4211 correcting chromatic aberrations G02B27/0056, G02B27/4222, G02B27/4227 take precedence
• CPC Class Codes: G02B 27/4216 correcting geometrical aberrations
• CPC Class Codes: G02B 27/4227 in image scanning systems
• CPC Class Codes: G02B 27/4277 being separated by an air space
• CPC Class Codes: G02B 3/04 with continuous faces that are rotationally symmetrical but deviate from a true sphere , e.g. so called "aspheric" lenses
• CPC Class Codes: G02B 5/189 Structurally combined with optical elements not having diffractive power
• CPC Class Codes: Y10T 82/10 Process of turning
• CPC Class Codes: Y10T 82/122 Forming non-circular bore
• CPC Class Codes: Y10T 82/125 Tool simultaneously moving axially
• CPC Class Codes: Y10T 82/148 Pivoted tool rest
• CPC Class Codes: Y10T 82/149 Profiled cutter

Abstract

A precision optical element is described, such as is used in thermal imaging systems in the infrared, manufactured by means of single point machining, with both of its surfaces having an aspheric form, with or without the addition of a diffractive optics pattern. The element is produced while held in a novel vacuum chuck, whose support surface has a width in the radial direction significantly less than the size of the element, and which is aspherically machined to match the aspheric first surface of the element. A method whereby such an element can be produced by means of single point machining, such as diamond turning or fly cutting, is also described. Also described are new optical system designs and applications using such double-sided aspheric elements, thereby providing significant improvement over currently available optical systems.

Claims

1. A precision optical element comprising first and second aspheric surfaces, said surfaces being single point machined by means of a diamond tool, and wherein said element comprises a material selected from the group consisting of germanium, zinc selenide, zinc sulphide, gallium arsenide, silicon and calcium fluoride.

2. A precision optical element according to claim 1, and wherein said element is a lens.

3. A precision optical element according to claim 1, and wherein said element is a double-sided mirror.

4. A precision optical element according to claim 1, and wherein said element further comprises a diffractive optics pattern turned on at least one of its surfaces.

5. A precision optical element according to claim 1, and wherein the precision of said element is such that the maximum peak to valley irregularity of at least one of said first and second surfaces is less than one wavelength of red Helium Neon laser light.

6. A precision optical element comprising first and second aspheric surfaces, said surfaces being single point machined by means of a diamond tool, and wherein said element comprises a material selected from the group consisting of germanium, zinc selenide, zinc sulphide, gallium arsenide, silicon and calcium fluoride, and which further comprises a diffractive optics pattern on at least one of its surfaces.

7. An optical system comprising at least one precision optical element comprising two aspheric surfaces, said surfaces being single point machined by means of a diamond tool, and wherein said element comprises a material selected from the group consisting of germanium, zinc selenide, zinc sulphide, gallium arsenide, silicon and calcium fluoride.

8. An optical system according to claim 7, and wherein said at least one precision optical element also comprises a diffractive optics pattern on at least one surface.

9. An optical system according to claim 7, for use in thermal imaging applications.

10. An optical system according to claim 7, and wherein the precision of said optical element is such that the maximum peak to valley irregularity of at least one of its first and second surfaces is less than one wavelength of red Helium Neon laser light.

11. A precision optical element comprising first and second aspheric surfaces, said first and second aspheric surfaces being formed by material removal, and wherein said element comprises a material selected from the group consisting of germanium, zinc selenide, zinc sulphide, gallium arsenide, silicon and calcium fluoride.

12. A precision optical element according to claim 11, and wherein said element further comprises a diffractive optics pattern formed on at least one of its surfaces.

13. A precision optical element according to claim 11, and wherein the precision of said element is such that the maximum peak to valley irregularity of at least one of said first and second surfaces is less than one wavelength of red Helium Neon laser light.

14. An optical system comprising at least one precision optical element according to claim 11.

15. A vacuum chuck for holding a precision optical element according to claim 11, and comprising a support surface having a major portion of its surface removed, said support surface having an aspheric form matched to said first aspheric surface.

16. A precision optical element comprising first and second aspheric surfaces, said element being constructed of a non-molded infra-red transparent material.

17. A precision optical element according to claim 16, and wherein the precision of said element is such that the maximum peak to valley irregularity of at least one of said first and second surfaces is less than one wavelength of red Helium Neon laser light.

18. A precision optical element according to claim 16, and wherein at least one of said aspheric surfaces is single point machined.

19. A precision optical element according to claim 16, and wherein said element is a lens.

20. A precision optical element according to claim 19, and wherein said material is selected from the group consisting of germanium, zinc selenide, zinc sulphide, gallium arsenide, silicon and calcium fluoride.

21. A precision optical element according to claim 16, and wherein said material is an infra-red transparent material.

22. A precision optical element according to claim 16, and further comprising a diffractive optics pattern turned on at least one of its surfaces.

23. An optical system comprising at least one precision optical element according to claim 16.

24. A precision optical element comprising first and second aspheric surfaces, said surfaces bearing indications of single point machining marks.