Electrode array having a thin, flexible substrate
First Claim
1. A biocompatible electrode array configured to conform to a brain of a mammal, comprising:
- a flexible substrate formed of polyimide; and
a plurality of electroplated electrodes disposed on the flexible substrate, each of said electrodes having a diameter less than approximately 100 μ
m and extending approximately 10 μ
m to 50 μ
m above a surface of said flexible substrate to yield a desired surface profile for electrical contact to said brain.
1 Assignment
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Accused Products
Abstract
An electrode array includes a flexible substrate, and a plurality of electrodes disposed on the flexible substrate. The flexible substrate is preferably formed of polyimide. The contacts preferably have a diameter in the range of approximately 10 μm to 1 mm. The an electrode array is manufactured by forming a plurality of electrodes on a flexible substrate by forming a metal line on the flexible substrate for each of the plurality of electrodes by depositing one or more metals using electron beam evaporation and then patterning the one or more metals and forming a contact on the flexible substrate for each of the plurality of electrodes using one of electroplating and embossing, and then forming an insulating film on the flexible substrate except over the contacts and areas of the electrodes utilized for connections to an electrical device. Electroplating is utilized to form contacts less than approximately 100 μm in diameter, and embossing is utilized to form contacts greater than approximately 100 μm in diameter.
99 Citations
29 Claims
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1. A biocompatible electrode array configured to conform to a brain of a mammal, comprising:
-
a flexible substrate formed of polyimide; and
a plurality of electroplated electrodes disposed on the flexible substrate, each of said electrodes having a diameter less than approximately 100 μ
m and extending approximately 10 μ
m to 50 μ
m above a surface of said flexible substrate to yield a desired surface profile for electrical contact to said brain.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A biocompatible electrode array configured to conform to a brain of a mammal, comprising:
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a flexible substrate;
a plurality of electroplated electrodes disposed on the flexible substrate, wherein each of the electrodes comprises a contact, wherein each of the contacts has a diameter less than approximately 100 μ
m, each of said electrodes having a diameter less than approximately 100 μ
m and extending approximately 10 μ
m to 50 μ
m above a surface of said flexible substrate to yield a desired surface profile for electrical contact to said brain.- View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A biocompatible electrode array configured to conform to brain of a mammal, comprising:
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a flexible substrate having upper and lower surfaces;
a plurality of electroplated electrodes disposed on the flexible substrate, each of the plurality of electrodes having a contact, an area for making electrical connection to an electrical device, and a diameter less than approximately 100 μ
m and extending approximately 10 μ
m to 50 μ
m above a surface of said flexible substrate to yield a desired surface profile for electrical contact to said brain; and
an electrically insulating film covering both the upper and lower surfaces of the substrate except at at least some portions of the substrate containing the contacts and the electrical connection areas of the plurality of electrodes. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28)
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29. A biocompatible electrode array configured to conform to a brain of a mammal, comprising:
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a thin flexible substrate capable of conforming to a brain of an animal; and
a plurality of electroplated electrodes disposed on the thin flexible substrate, wherein the plurality of electrodes comprise a plurality of contacts configured to contact the brain, wherein the thin flexible substrate is capable of tolerating microfabrication, and wherein the flexible substrate is formed of a polyimide film having a thickness of approximately 0.003″
, and wherein each of said electrodes has a diameter less than approximately 100 μ
m and extending approximately 10 μ
m to 50 μ
m above a surface of said flexible substrate to yield a desired surface profile for electrical contact to said brain.
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Specification