Piezoelectric/electrostrictive device and method of fabricating the same
First Claim
1. A piezoelectric/electrostrictive device comprising a functional element which comprises:
- a base portion;
a deformable thin plate portion extending from said base portion to thereby form a plane;
a piezoelectric/electrostrictive element tightly fixed to at least said deformable portion; and
a reflective portion extending from said deformable portion so as to form an active plane intersecting with the plane of said deformable portion, and having a light-reflecting member disposed on the active plane, wherein upon operation of said piezoelectric/electrostrictive element, said deformable portion deforms in a direction substantially perpendicular to the plane of said deformable portion to thereby change a reflection angle of light reflected from said reflective portion.
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Accused Products
Abstract
A piezoelectric/electrostrictive device includes a functional element. The functional element includes a base portion; a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane; a piezoelectric/electrostrictive element formed on the deformable portion; and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion, and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.
17 Citations
16 Claims
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1. A piezoelectric/electrostrictive device comprising a functional element which comprises:
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a base portion;
a deformable thin plate portion extending from said base portion to thereby form a plane;
a piezoelectric/electrostrictive element tightly fixed to at least said deformable portion; and
a reflective portion extending from said deformable portion so as to form an active plane intersecting with the plane of said deformable portion, and having a light-reflecting member disposed on the active plane, wherein upon operation of said piezoelectric/electrostrictive element, said deformable portion deforms in a direction substantially perpendicular to the plane of said deformable portion to thereby change a reflection angle of light reflected from said reflective portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
wherein said plurality of functional elements are arranged linearly adjacent to one another. -
4. A piezoelectric/electrostrictive device according to claim 3, wherein said plurality of functional elements have respective base portions formed into a common base portion.
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5. A piezoelectric/electrostrictive device according to claim 1, comprising a plurality of said functional elements,
wherein said plurality of functional elements are arranged in a matrix and adjacent to one another. -
6. A piezoelectric/electrostrictive device according to claim 5, wherein at least a column of said functional elements in the matrix has respective base portions formed into a common base portion.
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7. A piezoelectric/electrostrictive device according to claim 1, wherein said base portion, said deformable portion, and said reflective portion of said functional element are formed of a unitary body of ceramics.
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8. A piezoelectric/electrostrictive device according to claim 7, wherein said piezoelectric/electrostrictive element is a film-type piezoelectric/electrostrictive element and is integrated with said deformable portion through firing.
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9. A piezoelectric/electrostrictive device comprising a functional element which comprises:
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a base portion;
a deformable thin plate portion extending from said base portion to thereby form a plane;
a piezoelectric/electrostrictive element tightly fixed to at least said deformable portion;
a reflective portion extending from said deformable portion so as to form an active plane intersecting with the plane of said deformable portion, and having a light-reflecting member disposed on the active plane; and
a holder portion extending from said base portion in opposition to said deformable portion to thereby hold a part of said reflective portion, wherein upon operation of said piezoelectric/electrostrictive element, said deformable portion deforms in a direction substantially perpendicular to the plane of said deformable portion to thereby change a reflection angle of light reflected from said reflective portion without deformation of said holder portion. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
wherein said plurality of functional elements are arranged linearly adjacent to one another. -
12. A piezoelectric/electrostrictive device according to claim 11, wherein said plurality of functional elements have respective base portions formed into a common base portion.
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13. A piezoelectric/electrostrictive device according to claim 9, comprising a plurality of said functional elements,
wherein said plurality of functional elements are arranged in a matrix and adjacent to one another. -
14. A piezoelectric/electrostrictive device according to claim 13, wherein at least a column of said functional elements in the matrix has respective base portions formed into a common base portion.
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15. A piezoelectric/electrostrictive device according to claim 9, wherein said base portion, said deformable portion, said reflective portion, and said holder portion of said functional element are formed of a unitary body of ceramic.
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16. A piezoelectric/electrostrictive device according to claim 15, wherein said piezoelectric/electrostrictive element is a film-type piezoelectric/electrostrictive element and is integrated with said deformable portion through firing.
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Specification