Surface inspection tool

• US 6,624,884 B1
• Filed: 04/28/1997
• Issued: 09/23/2003
• Est. Priority Date: 04/28/1997
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Juliana, Anthony Jr., Imaino, Wayne Isami, Rosen, Hal J., Meeks, Steven, Sonningfeld, Richard, Lee, Charles H., Latta, Milton Russell, Leung, Wai Cheung
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US08/840,351
• Time in Patent Office: 2,339 Days
• Field of Search: 356/237, 356/237.3, 356/237.4, 356/239.8, 356/237.2, 250/559.41, 250/559.14
• US Class Current: 356/237.2
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination

Abstract

A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.

Claims

1. An apparatus for detecting defects in planar surfaces of an object comprising:

means for directing a first laser beam (the A-beam) along a first path;

a first telecentric lens assembly including one or more lenses;

first rotating mirror means for scanning the A-beam through the first telecentric lens assembly and across at least a portion of a first planer surface of the object, the A-beam striking the first planar surface of the object at an angle which deviates from perpendicular in one plane by an angle which causes a portion of the A-beam to form a reflected beam (A/R-beam) passing back through the first telecentric lens assembly and being reflected off the first rotating mirror means along a second path; and

a first light detector arranged in the second path producing an A-analog signal proportional to the intensity of the A/R-beam;

means for directing a second laser beam (the B-beam) along a third path;

a second telecentric lens assembly including one or more lenses;

second rotating mirror means for scanning the B-beam through the second telecentric lens assembly and across at least a portion of a second planar surface of the object, the B-beam striking the second planar surface of the object at an angle which deviates from perpendicular in one plane by an angle which causes a portion of the B-beam to form a reflected beam (B/R-beam) passing back through the second telecentric lens assembly and being reflected off of the second rotating mirror means along a fourth path; and

a second light detector arranged in the fourth path producing a B-analog signal proportional to the intensity of the B/R-beam.

2. The apparatus of claim 1 wherein the first and second rotating mirror means lie in a common plane and the first rotating mirror rotates in an opposite direction from the second rotating mirror means and the apparatus further comprises means for synchronizing the rotation of the first and second rotating mirror means and angularly offsetting the rotation of the second rotating mirror means from the first rotating mirror means.

3. The apparatus of claim 1 further comprising a movable support for the object which moves the object through the A-beam and the B-beam.

4. An apparatus for detecting defects in two parallel planar surfaces of an object comprising:

means for generating a first laser beam (the A-beam);

means for generating a second laser beam (the B-beam);

a first optical system which repeatedly scans the A-beam across a first scan line in an inspection area;

a second optical system which repeatedly scans the B-beam across a second scan line in the inspection area;

means supporting the object leaving substantially all of the two planar surfaces unobscured while moving the object through first and second scan lines in the inspection area;

means for detecting the intensity of a first reflected beam (the A/R-beam) from the first scan line from a first planar surface of the object; and

means for detecting the intensity of a second reflected beam (the B/R-beam) from the second scan line from a second planar surface of the object.

5. The apparatus of claim 4 wherein the first optical system comprises:

a first telecentric lens assembly; and

a first rotating scanner which scans the A-beam across the telecentric lens assembly so that the A-beam strikes the first planar surface of the object at a substantially constant angle.

6. The apparatus of claim 5 wherein the A/R-beam passes through the first telecentric lens assembly and is reflected from the first rotating scanner and the apparatus further comprises a first capture mirror placed to reflect the A/R-beam toward the means for detecting the intensity of the A/R-beam,

the means for moving the object is a lifter which moves the object in a vertical direction.

7. The apparatus of claim 6 wherein the lifter supports the object in a recessed area of the lifter without clamping.

8. The apparatus of claim 4 further comprising at least one air nozzle which blows air across the first and second planar surfaces of the object when the object is moved into the inspection area.

9. The apparatus of claim 4 further comprising a calibration mirror arranged to periodically reflect the A-beam to generate a reference signal.

10. The apparatus of claim 4 wherein the first and second rotating scanners are in a common plane, the apparatus further comprising:

means to rotate the second scanner in an opposite direction from the first scanner; and

means to synchronize the rotation of the first and second scanners with the second scanner angularly offset from the first scanner.

11. A method for detecting defects in planar surfaces of an object comprising the steps of:

generating a first laser beam (the A-beam);

generating a second laser beam (the B-beam);

repeatedly scanning the A-beam across a first scan line in an inspection area;

repeatedly scanning the B-beam across a second scan line in the inspection area;

moving the object through first and second scan lines in the inspection area;

detecting the intensity of a first reflected beam (the A/R-beam) from the first scan line from a first planar surface of the object; and

detecting the intensity of a second reflected beam (the B/R-beam) from the second scan line from a second planar surface of the object.

12. The method of claim 11 wherein the step of repeatedly scanning the A-beam further comprising rotating a scanner on which the A-beam is incident to direct the A-beam across a telecentric lens assembly so that the A-beam strikes the first planar surface of the object at a substantially constant angle.

13. The method of claim 11 wherein the step of moving the object further comprises lowering the object while the object is supported in a recessed area of a lifter without clamping.

14. The method of claim 11 further comprising the step of blowing partially ionized air onto the first and second planar surfaces of the object when the object is moved into the inspection area.

15. The method of claim 11 wherein the step of repeatedly scanning the A-beam further comprises rotating a first scanner on which the A-beam is incident in a first direction and the step of repeatedly scanning the B-beam further comprises rotating a second scanner on which the B-beam is incident in a second direction opposite from the first direction and the method further comprising the step of synchronizing the rotation of the first and second scanners with the second scanner angularly offset from the first scanner.