Fluorinated coating for an optical element

• US 6,624,944 B1
• Filed: 03/26/1997
• Issued: 09/23/2003
• Est. Priority Date: 03/29/1996
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Henck, Steven A., Cowens, Marvin W., Wallace, Robert M.
• Primary Examiner(s): CHANG, AUDREY Y
• Application Number:
  US08/824,594
• Time in Patent Office: 2,372 Days
• Field of Search: 359/580, 359/291, 359/846, 359/586, 359/230, 359/231, 524/850, 524/548, 524/405, 428/35.7, 428/333, 427/517
• US Class Current: 359/580
• CPC Class Codes: G02B 1/16 having an anti-static effect, e.g. electrically conducting coatings
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A protective cover (10) for an optical device, such as a spatial light modulator or an infrared detector or receiver. The cover (10) has an optically transmissive window (11), which has a coating (12) on one or both of its surfaces. The coating (12) is made from a halogenated material, which is deposited to form a chemical bond with the surface of the window (11).

Claims

1. An optically transmissive cover for an optical device, comprising:

an optically transmissive window having an inner surface and an outer surface with respect to said optical device; and

a fluorinated coating chemically bonded to at least one surface of said window.

2. The cover of claim 1, wherein said optical device is a digital micromirror device and wherein said window and said coating are transmissive in the visible wavelength range.

3. The cover of claim 1, wherein said optical device is an infrared device and wherein said window and said coating are transmissive in an infrared wavelength range.

4. The cover of claim 1, wherein said fluorinated material is a perfluorinated material.

5. The cover of claim 4, wherein said perfluorinated material is a carboxylic acid.

6. The cover of claim 4, wherein said perfluorinated material is perfluoro-decanoic acid.

7. The cover of claim 4, wherein said perfluorinated material is a perfluorinated polymer.

8. A hydrophobic optical element, comprising:

an optically transmissive optical element; and

a fluorinated coating chemically bonded to at least one surface of said optical element.

9. The optical element of claim 8, wherein said optical element is a lens.

10. An optically transmissive cover for a micro mechanical optical device having at least one micro mechanical element coated with a passivation material, comprising:

an optically transmissive window having an inner surface and an outer surface with respect to said optical device; and

a fluorinated coating chemically bonded to said window, said coating inhibiting the loss of said passivation material from said micro mechanical element.

11. The device of claim 10, wherein said fluorinated material inhibits loss of said passivation material by inhibiting migration of said passivation material from said micro mechanical element.

12. The device of claim 10, wherein said fluorinated material inhibits loss of said passivation material by providing a source of said passivation material for migration to said micro mechanical element.

13. The device of claim 10, wherein said fluorinated material has substantially the same chemical composition as said passivation material.

14. The device of claim 10, wherein said fluorinated material is a perfluorinated material.

15. The device of claim 14, wherein said perfluorinated material is a perfluorinated carboxcylic acid.

16. The device of claim 14, wherein said perfluorinated material is a perfluoro-decanoic acid.

17. The device of claim 14, wherein said perfluorinated material is a perfluoro-polyether.

18. The device of claim 10, wherein said fluorinated material is a tetrafluoroethylene fluorocarbon polymer.

19. A micro mechanical device comprising:

one or more deflectable elements;

at least one address electrode adjacent said deflectable element;

at least one landing surface adjacent said deflectable element;

wherein a voltage applied between said deflectable element and said address electrode deflects said deflectable element toward said landing surface and said landing surface is located to contact said deflectable element deflected toward said landing surface and wherein said deflectable element touches said landing surface wherein deflected toward said landing surface; and

an optically transmissive window for said micromechanical device, said window having a coating of fluorinated material.

20. The device of claim 19, wherein said landing surface is coated with a halogenated material that has substantially the same chemical composition as said coating on said window.

21. The device of claim 20, wherein said fluorinated material is a perfluorinated material.

22. The device of claim 21, wherein said perfluorinated material is a carboxylic acid.

23. The device of claim 21, wherein said perfluorinated material is perfluoro-decanoic acid.

24. The device of claim 21, wherein said perfluorinated material is a perfluorinated polymer.