Acoustic wave based sensor

• US 6,626,026 B2
• Filed: 04/06/2001
• Issued: 09/30/2003
• Est. Priority Date: 04/07/2000
• Status: Expired due to Fees

• Current Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International)
• Original Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International)
• Inventors: Campitelli, Andrew, Banda, Pedro
• Primary Examiner(s): Kwok, Helen
• Assistant Examiner(s): WIGGINS, JOHN DAVID
• Application Number:
  US09/828,449
• Publication Number:
  US 20010054305A1
• Time in Patent Office: 907 Days
• Field of Search: 73/240.1, 73/240.3, 73/240.6, 73/615.8, 73/617.5, 736/61, 735/92
• US Class Current: 73/24.01
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0422 Shear waves, transverse waves, horizontally polarised waves
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/02 Analysing fluids using acoustic emission techniques G01N29/14 ; constructional or flow details for analysing fluids G01N29/222; optoacoustic fluid cells G01N29/2425
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/22 Details , e.g. general constructional or apparatus details
• CPC Class Codes: G01N 29/28 providing acoustic coupling , e.g. water impedance matching G10K11/02

Abstract

An apparatus that is configured to sense the presence of gases, vapors and liquids using acoustic waves. The apparatus comprises a first part that is configured to generate acoustic waves. The apparatus further comprises a second part having a sensing and acoustic wave guiding device, which is configured to sense the presence of such substances and propagate acoustic waves. The first part is removably fixable to the second part of the apparatus. When the first part is fixed to the second part, the acoustic waves propagate in the second part.

Claims

1. An apparatus for detecting the presence of a substance using acoustic waves, the apparatus comprising:

a first part that is configured to generate acoustic waves; and

a second part comprising a sensing and acoustic wave guiding device configured to sense said substance and propagate said acoustic waves, and further configured to confine said acoustic waves to a surface of said sensing and acoustic wave guiding device, and

wherein said first part is removably fixable to said second part so that when fixed said acoustic waves propagate in said second part.

2. The apparatus as recited in claim 1 wherein said sensing and acoustic wave guiding device comprises a sensing layer for sensing said substance and an acoustic wave guiding layer for propagating said acoustic waves, respectively.

3. The acoustic wave sensor as described in claim 2 wherein said sensing layer comprises a recognition layer that is able to be influenced by interaction with said substance.

4. The apparatus as recited in claim 2 further comprising an electrode layer for propagating an electrical signal.

5. The apparatus as recited in claim 4 wherein said electrode layer is located on said second part.

6. The apparatus as recited in claim 5 wherein said electrode layer is embedded in said acoustic wave guiding layer.

7. The apparatus as recited in claim 4 wherein said electrode layer is located on said first part.

8. The apparatus as recited in claim 4 further comprising a support structure located on top of said electrode layer and acoustic wave guiding device while said sensing layer is exposed to the substance.

9. The apparatus as recited in claim 1 further comprising a support structure located on top of said sensing and acoustic wave guiding device while said sensing and acoustic wave guiding device remains partly exposed to the substance such that there is an interaction between the substance and the exposed part of said sensing and acoustic wave guiding device.

10. The apparatus as recited in claim 8 wherein said support structure is made of a material selected from the group comprising a semiconducting material or a polymer-based material.

11. The apparatus as recited in claim 1 wherein said acoustic wave penetrates the exposed part of said sensing and acoustic wave guiding device.

12. The apparatus sensor as recited in claim 1 wherein said first part comprises at least a piezoelectric material.

13. The apparatus as recited in claim 4 further comprising an RF generator that is configured to apply an input RF signal to said electrode layer and a receiver that is configured to receive an output RF signal from said electrode layer.

14. The apparatus as recited in claim 1 further comprising a clamp for removably fixing said first part to said second part.

15. The apparatus as recited in claim 14 wherein said clamp is one of the group comprising a vacuum pump or magnetic clamping system.