Electrostrictive valve for modulating a fluid flow

• US 6,626,416 B2
• Filed: 12/12/2000
• Issued: 09/30/2003
• Est. Priority Date: 12/12/2000
• Status: Expired due to Fees

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Hirsh, Jeffrey I., Hawkins, Gilbert A., Sharma, Ravi
• Primary Examiner(s): Shaver, Kevin
• Assistant Examiner(s): BONDERER, DAVID A
• Application Number:
  US09/735,012
• Publication Number:
  US 20020100888A1
• Time in Patent Office: 1,022 Days
• Field of Search: 251/11, 251/4, 251/129.01, 251/129.06
• US Class Current: 251/129.06
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 31/02 electric F16K31/004 takes precedence; magnetic
• CPC Class Codes: F16K 7/123 the seat being formed on the bottom of the fluid line
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0051 using electrostatic means

Abstract

An electrostrictive micro-valve is provided for modulating a fluid flow through a cannula or other narrow liquid conduit. The micro-valve includes a valve body having a passageway for conducting a flow of fluid, a valve element formed from a piece of viscoelastic material and disposed in the passageway, and a control assembly coupled to the viscoelastic material for electrostatically controlling the shape of the material to open or close the passageway. The valve element has a flat lower side connected to an inner wall of the passage of the valve body, and an upper side which faces an opposing wall within the passageway. The control assembly includes a pair of electrodes disposed over the upper and lower sides of the valve element. The electrode facing the lower side of the element is patterned so that localized electrostatic forces are generated across the viscoelastic material when a voltage is applied across both electrodes. Localized electrostatic forces generate a sinusoidal ripple throughout the viscoelastic material forming the valve element whose peak portions act as obstructions throughout the valve body that partially or completely obstruct a fluid flow.

Claims

1. An electrostrictive micro-valve for modulating a fluid flow, comprising:

a valve body having a passageway for conducting a flow of said fluid;

a valve element formed from a piece of viscoelastic material and disposed in said passageway, and

a control assembly coupled to said viscoelastic material for controlling the shape of said material to open and close said passageway,

wherein said control assembly includes first and second electrodes mounted on opposite sides of said viscoelastic material, and

wherein said control assembly includes a source of electrical voltage connected to said first and second electrodes, and a switching means for selectively applying a voltage from said source across said electrodes to generate an electrostatic force therebetween that changes the shape of said viscoelastic material, wherein a valving action is created by said shape change of said viscoelastic material, and a restorative force generated in said material in reaction to said shape change when said electrostatic force is terminated.

2. The electrostrictive micro-valve defined in claim 1, wherein at least one of said electrodes is an electrically conductive coating disposed over one of said sides of said viscoelastic material.

3. The electrostrictive micro-valve defined in claim 2, wherein said coating is a flexible metal coating.

4. The electrostrictive micro-valve defined in claim 2, wherein said coating is an electrically conductive polymer.

5. The electrostrictive micro-valve defined in claim 1, wherein said switching means further functions to selectively change a polarity of electrical voltage applied between said electrodes by said voltage source.

6. The electrostrictive micro-valve defined in claim 1, wherein said valve element is a single piece of viscoelastic material attached to a wall of said passageway.

7. The electrostrictive micro-valve defined in claim 1, wherein said valve element includes two pieces of viscoelastic material each of which is attached to opposing walls of said passageway, and each of which is coupled to said control assembly.

8. The electrostrictive micro-valve defined in claim 1, wherein said control assembly includes a photoconductor for controlling the generation of an electrostatic force between said electrodes to selectively deform said viscoelastic material into a shape that opens and closes said passageway.

9. An electrostrictive micro-valve for modulating a fluid flow, comprising:

a valve body having a passageway for conducting a flow of said fluid;

a valve element formed from a piece of viscoelastic material and disposed on a wall in said passageway, and

a control assembly including first and second electrodes mounted on opposite sides of said viscoelastic material for controlling the shape of said material by the selective generation of an electrostatic field to open and close said passageway, and

wherein said control assembly includes a source of electrical voltage, and a switching means for selectively applying a voltage from said source across said electrodes to generate an electrostatic force therebetween that changes the shape of the viscoelastic material, wherein a valving action is created by said shape change of said viscoelastic material, and a restorative force generated in said material in reaction to said shape change when said electrostatic force is terminated.

10. The electrostrictive micro-valve defined in claim 9, wherein at least one of said electrodes is an electrically conductive coating disposed over one of said sides of said viscoelastic material.

11. The electrostrictive micro-valve defined in claim 10, wherein said coating is a flexible metal coating selected from the group consisting of gold, silver, aluminum, and nickel.

12. The electrostrictive micro-valve defined in claim 10, wherein said coating is diamond-like carbon.

13. The electrostrictive micro-valve defined in claim 10, wherein said coating is a flexible conductive polymer.

14. The electrostrictive micro-valve defined in claim 13, wherein said coating is selected from one of the group consisting of poly pyrrole, polyanaline, and poly thiophene.

15. The electrostrictive micro-valve defined in claim 9, wherein said first electrode includes a flexible layer of conductive material disposed over one side of said viscoelastic material, and said second electrode includes a layer of photoconductive material disposed over an opposite side of said viscoelastic material, and a light mask for masking selected sections of said photoconductive material from light.

16. The electrostrictive micro-valve defined in claim 15, wherein said control assembly includes a source of biasing voltage connected to said first and second electrodes, and a light source for selectively applying light to said second electrode to cause a patterned electrostatic force to be generated between said electrodes that deflects said viscoelastic material to open and close said passageway.

17. The electrostrictive micro-valve defined in claim 9, wherein said viscoelastic material is a silicon elastomer.