Multiple electrospray device, systems and methods

• US 6,627,882 B2
• Filed: 12/22/2000
• Issued: 09/30/2003
• Est. Priority Date: 12/30/1999
• Status: Expired due to Term

• Current Assignee: Advion, Inc. (Beijing Bohui Innovation Biotechnology Group Co., Ltd.)
• Original Assignee: Advion BioSciences Incorporated
• Inventors: Schultz, Gary A., Corso, Thomas N., Prosser, Simon J.
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US09/748,518
• Publication Number:
  US 20020000516A1
• Time in Patent Office: 1,012 Days
• Field of Search: 250/288, 250/281, 250/282, 250/423.R
• US Class Current: 250/288
• CPC Class Codes: H01J 49/0018 Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
• CPC Class Codes: H01J 49/04 Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
• CPC Class Codes: H01J 49/167 Capillaries and nozzles specially adapted therefor; electrostatic spraying per se B05B5/00

Abstract

A microchip-based electrospray device, system, and method of fabrication thereof are disclosed. The electrospray device includes a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electric field generating source for application of an electric potential to the substrate to optimize and generate an electrospray. A method and system are disclosed to generate multiple electrospray plumes from a single fluid stream that provides an ion intensity as measured by a mass spectrometer that is approximately proportional to the number of electrospray plumes formed for analytes contained within the fluid. A plurality of electrospray nozzle devices can be used in the form of an array of miniaturized nozzles for the purpose of generating multiple electrospray plumes from multiple nozzles for the same fluid stream. This invention dramatically increases the sensitivity of microchip electrospray devices compared to prior disclosed systems and methods.

Claims

1. An electrospray device for generating multiple sprays from a single fluid stream comprising:

a substrate having;

a) an injection surface;

b) an ejection surface opposing the injection surface, wherein the substrate is an integral monolith having either i) a plurality of spray units at least one spray unit capable of generating a single electrospray plume wherein the entrance orifice of at least one spray unit is in fluid communication with one another or ii) a plurality of spray units at least one spray unit capable of generating multiple electrospray plumes wherein the entrance orifice of at least one spray unit is in fluid communication with at least one other or iii) a single spray unit capable of generating multiple electrospray plumes, for spraying the fluid,

each spray unit comprising;

an entrance orifice on the injection surface,

an exit orifice on the ejection surface,

a channel extending between the entrance orifice and the exit orifice, and

a recess surrounding the exit orifice positioned between the injection surface and the ejection surface; and

c) an electric field generating source positioned to define an electric field surrounding at least one exit orifice.

2. The electrospray device according to claim 1, wherein the substrate has a plurality of spray units at least one spray unit capable of generating a single electrospray plume wherein the entrance orifice of at least one spray unit is in fluid communication with at least one other.

3. The electrospray device according to claim 1, wherein the substrate has a plurality of spray units each capable of generating multiple electrospray plumes wherein the entrance orifice of each spray unit is in fluid communication with one another.

4. The electrospray device according to claim 1, wherein the substrate has a single spray unit capable of generating multiple electrospray plumes.

5. The electrospray device according to claim 2, wherein the plurality of spray units are configured to generate a single combined electrospray plume of fluid.

6. The electrospray device according to claim 3, wherein at least one of the spray units is configured to generate multiple electrospray plumes of fluid which remain discrete.

7. The electrospray device according to claim 3, wherein the plurality of spray units are configured to generate a single combined electrospray plume of fluid.

8. The electrospray device according to claim 4, wherein the single spray unit is configured to generate multiple electrospray plumes of fluid which remain discrete.

9. The electro spray device of claim 2, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 10,000 exit orifices/cm².

10. The electrospray device of claim 2, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 15,625 exit orifices/cm².

11. The electro spray device of claim 2, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 27,566 exit orifices/cm².

12. The electro spray device of claim 2, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 40,000 exit orifices/cm².

13. The electrospray device of claim 2, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 160,000 exit orifices/cm².

14. The electrospray device of claim 3, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 10,000 exit orifices/cm².

15. The electrospray device of claim 3, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 15,625 exit orifices/cm².

16. The electrospray device of claim 3, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 27,566 exit orifices/cm².

17. The electrospray device of claim 3, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 40,000 exit orifices/cm².

18. The electrospray device of claim 3, wherein the exit orifices of the spray units are present on the ejection surface at a density of up to about 160,000 exit orifices/cm².

19. The electrospray device of claim 2, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 500 μ

m.

20. The electrospray device of claim 2, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 200 μ

m.

21. The electrospray device of claim 2, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 100 μ

m.

22. The electrospray device of claim 2, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 50 μ

m.

23. The electrospray device of claim 3, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 500 μ

m.

24. The electrospray device of claim 3, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 200 μ

m.

25. The electrospray device of claim 3, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 100 μ

m.

26. The electrospray device of claim 3, wherein the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 50 μ

m.

27. The electrospray device according to claim 1, wherein said substrate comprises silicon.

28. The electrospray device according to claim 1, wherein said substrate is polymeric.

29. The electrospray device according to claim 1, wherein said substrate comprises glass.

30. The electrospray device according to claim 2, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding at least one exit orifice.

31. The electrospray device according to claim 30, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

32. The electrospray device according to claim 30, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

33. The electrospray device according to claim 30, wherein application of potentials to said first and second electrodes causes the fluid to discharge from at least one exit orifice in the form of an electrospray plume.

34. The electrospray device according to claim 3, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding at least one exit orifice.

35. The electrospray device according to claim 34, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

36. The electrospray device according to claim 34, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

37. The electrospray device according to claim 34, wherein application of potentials to said first and second electrodes causes the fluid to discharge from at least one exit orifice in the form of multiple electrospray plumes.

38. The electrospray device according to claim 4, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding the exit orifice.

39. The electrospray device according to claim 38, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

40. The electrospray device according to claim 38, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

41. The electrospray device according to claim 38, wherein application of potentials to said first and second electrodes causes the fluid to discharge from the orifice in the form of multiple electrospray plumes.

42. The electrospray device according to claim 30, wherein said first electrode is positioned within 500 microns of the exit orifice.

43. The electrospray device according to claim 30, wherein said first electrode is positioned within 200 microns of the exit orifice.

44. The electrospray device according to claim 30, wherein said second electrode is positioned within 500 microns of the exit orifice.

45. The electrospray device according to claim 30, wherein said second electrode is positioned within 200 microns of the exit orifice.

46. The electrospray device according to claim 30, wherein the exit orifice has a distal end in conductive contact with the substrate.

47. The electrospray device according to claim 34, wherein said first electrode is positioned within 500 microns of the exit orifice.

48. The electrospray device according to claim 34, wherein said first electrode is positioned within 200 microns of the exit orifice.

49. The electrospray device according to claim 34, wherein said second electrode is positioned within 500 microns of the exit orifice.

50. The electrospray device according to claim 34, wherein said second electrode is positioned within 200 microns of the exit orifice.

51. The electrospray device according to claim 34, wherein the exit orifice has a distal end in conductive contact with the substrate.

52. The electrospray device according to claim 38, wherein said first electrode is positioned within 500 microns of the exit orifice.

53. The electrospray device according to claim 38, wherein said first electrode is positioned within 200 microns of the exit orifice.

54. The electrospray device according to claim 38, wherein said second electrode is positioned within 500 microns of the exit orifice.

55. The electrospray device according to claim 38, wherein said second electrode is positioned within 200 microns of the exit orifice.

56. The electrospray device according to claim 38, wherein the exit orifice has a distal end in conductive contact with the substrate.

57. The electrospray device according to claim 4, wherein the device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

58. The electrospray device according to claim 4, wherein the device is configured to permit an electrospray of fluid at a flow rate of from about 100 nL/minute to about 500 nL/minute.

59. The electrospray device according to claim 2, wherein the device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

60. The electrospray device according to claim 2, wherein the device is configured to permit an electrospray of fluid at a flow rate of greater than about 2 μ

L/minute.

61. The electrospray device according to claim 60, wherein the flow rate is from about 2 μ

L/minute to about 1 mL/minute.

62. The electrospray device according to claim 60, wherein the flow rate is from about 100 nL/minute to about 500 nL/minute.

63. The electrospray device according to claim 3, wherein the device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

64. The electrospray device according to claim 3, wherein the device is configured to permit an electrospray of fluid at a flow rate of greater than about 2 μ

L/minute.

65. The electrospray device according to claim 64, wherein the flow rate is from about 2 μ

L/minute to about 1 mL/minute.

66. The electrospray device according to claim 64, wherein the flow rate is from about 100 nL/minute to about 500 nL/minute.

67. An electrospray system for spraying fluid comprising an array of a plurality of electrospray devices of claim 1.

68. The electrospray system according to claim 67, wherein the electrospray device density in the array exceeds about 5 devices/cm².

69. The electrospray system according to claim 67, wherein the electrospray device density in the array exceeds about 16 devices/cm².

70. The electrospray system according to claim 67, wherein the electrospray device density in the array exceeds about 30 devices/cm².

71. The electrospray system according to claim 67, wherein the electrospray device density in the array exceeds about 81 devices/cm².

72. The electrospray system according to claim 67, wherein the electrospray device density in the array is from about 30 devices/cm² to about 100 devices/cm².

73. The electrospray system according to claim 67, wherein said array is an integral monolith of said devices.

74. The electrospray system according to claim 67, wherein at least two of the devices are in fluid communication with different fluid streams.

75. The electrospray system according to claim 67, wherein at least one spray unit is configured to generate multiple electrospray plumes of fluid.

76. The electrospray system according to claim 67, wherein at least one of the electrospray devices is configured to generate a single combined electrospray plume of fluid.

77. The electrospray system according to claim 67, wherein at least one spray unit of the plurality of spray units is configured to generate a single electrospray plume of fluid.

78. The electrospray system according to claim 67, wherein at least one spray unit of the plurality of spray units is configured to generate multiple electrospray plumes of fluid which remain discrete.

79. The electrospray system according to claim 67, wherein said substrate comprises silicon.

80. The electrospray system according to claim 67, wherein said substrate is polymeric.

81. The electrospray system according to claim 67, wherein said substrate comprises glass.

82. The electrospray system according to claim 67, wherein at least one device comprises a substrate having a plurality of spray units at least one spray unit capable of generating a single electrospray plume wherein the entrance orifice of at least one spray unit is in fluid communication with at least one other.

83. The electrospray system according to claim 67, wherein at least one device comprises a substrate having a plurality of spray units at least one spray unit capable of generating multiple electrospray plumes wherein the entrance orifice of at least one spray unit is in fluid communication with at least one other.

84. The electrospray system according to claim 67, wherein at least one device comprises a substrate having a single spray unit capable of generating multiple electrospray plumes.

85. The electrospray system according to claim 82, wherein the plurality of spray units are configured to generate a single combined electrospray plume of fluid.

86. The electrospray system according to claim 83, wherein at least one of the spray units is configured to generate multiple electrospray plumes of fluid which remain discrete.

87. The electrospray system according to claim 83, wherein the plurality of spray units are configured to generate a single combined electrospray plume of fluid.

88. The electrospray system according to claim 84, wherein the single spray unit is configured to generate multiple electrospray plumes of fluid which remain discrete.

89. The electrospray system of claim 82, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 10,000 exit orifices/cm².

90. The electrospray system of claim 82, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 15,625 exit orifices/cm².

91. The electrospray system of claim 82, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 27,566 exit orifices/cm².

92. The electrospray system of claim 82, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 40,000 exit orifices/cm².

93. The electrospray system of claim 82, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 160,000 exit orifices/cm².

94. The electrospray system of claim 83, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 10,000 exit orifices/cm².

95. The electrospray system of claim 83, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 15,625 exit orifices/cm².

96. The electrospray system of claim 83, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 27,566 exit orifices/cm².

97. The electrospray system of claim 83, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 40,000 exit orifices/cm².

98. The electrospray system of claim 83, wherein in at least one device the exit orifices of the spray units are present on the ejection surface at a density of up to about 160,000 exit orifices/cm².

99. The electrospray system of claim 82, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 500 μ

m.

100. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 200 μ

m.

101. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 100 μ

m.

102. The electrospray system of claim 82, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 50 μ

m.

103. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 500 μ

m.

104. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 200 μ

m.

105. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 100 μ

m.

106. The electrospray system of claim 83, wherein in at least one device the spacing on the ejection surface between the centers of adjacent exit orifices of the spray units is less than about 50 μ

m.

107. The electrospray system according to claim 82, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding at least one exit orifice.

108. The electrospray system according to claim 107, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

109. The electrospray system according to claim 107, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

110. The electrospray system according to claim 107, wherein application of potentials to said first and second electrodes causes the fluid to discharge from at least one exit orifice in the form of an electrospray plume.

111. The electrospray system according to claim 83, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding at least one exit orifice.

112. The electrospray system according to claim 111, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

113. The electrospray system according to claim 111, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

114. The electrospray system according to claim 111, wherein application of potentials to said first and second electrodes causes the fluid to discharge from at least one exit orifice in the form of multiple electrospray plumes.

115. The electrospray system according to claim 84, wherein said electric field generating source comprises:

a first electrode attached to said substrate to impart a first potential to said substrate; and

a second electrode to impart a second potential, wherein the first and the second electrodes are positioned to define an electric field surrounding the exit orifice.

116. The electrospray system according to claim 115, wherein the first electrode is electrically insulated from the fluid and the second potential is applied to the fluid.

117. The electrospray system according to claim 115, wherein the first electrode is in electrical contact with the fluid and the second electrode is positioned on the ejection surface.

118. The electrospray system according to claim 115, wherein application of potentials to said first and second electrodes causes the fluid to discharge from the orifice in the form of multiple electrospray plumes.

119. The electrospray system according to claim 107, wherein said first electrode is positioned within 200 microns of the exit orifice.

120. The electrospray system according to claim 107, wherein said second electrode is positioned within 200 microns of the exit orifice.

121. The electrospray system according to claim 107, wherein the exit orifice has a distal end in conductive contact with the substrate.

122. The electrospray system according to claim 111, wherein said first electrode is positioned within 200 microns of the exit orifice.

123. The electrospray system according to claim 111, wherein said second electrode is positioned within 200 microns of the exit orifice.

124. The electrospray system according to claim 111, wherein the exit orifice has a distal end in conductive contact with the substrate.

125. The electrospray system according to claim 115, wherein said first electrode is positioned within 200 microns of the exit orifice.

126. The electrospray system according to claim 115, wherein said second electrode is positioned within 200 microns of the exit orifice.

127. The electrospray system according to claim 115, wherein the exit orifice has a distal end in conductive contact with the substrate.

128. The electrospray system according to claim 84, wherein at least one device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

129. The electrospray system according to claim 84, wherein at least one device is configured to permit an electrospray of fluid at a flow rate of from about 100 nL/minute to about 500 nL/minute.

130. The electrospray system according to claim 82, wherein the device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

131. The electrospray system according to claim 82, wherein the device is configured to permit an electrospray of fluid at a flow rate of greater than about 2 μ

L/minute.

132. The electrospray system according to claim 131, wherein the flow rate is from about 2 μ

L/minute to about 1 mL/minute.

133. The electrospray system according to claim 131, wherein the flow rate is from about 100 nL/minute to about 500 nL/minute.

134. The electrospray system according to claim 83, wherein at least one device is configured to permit an electrospray of fluid at a flow rate of up to about 2 μ

L/minute.

135. The electrospray system according to claim 83, wherein at least one device is configured to permit an electrospray of fluid at a flow rate of greater than about 2 μ

L/minute.

136. The electrospray system according to claim 135, wherein the flow rate is from about 2 μ

L/minute to about 1 mL/minute.

137. The electrospray system according to claim 135, wherein the flow rate is from about 100 nL/minute to about 500 nL/minute.

138. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 9 mm or less.

139. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 4.5 mm or less.

140. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 2.2 mm or less.

141. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 1.1 mm or less.

142. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 0.56 mm or less.

143. The electrospray system according to claim 67, wherein the spacing on the ejection surface between adjacent devices is about 0.28 mm or less.

144. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 9 mm or less.

145. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 4.5 mm or less.

146. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 2.2 mm or less.

147. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 1.1 mm or less.

148. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 0.56 mm or less.

149. The electrospray system according to claim 82, wherein the spacing on the ejection surface between adjacent devices is about 0.28 mm or less.

150. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 9 mm or less.

151. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 4.5 mm or less.

152. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 2.2 mm or less.

153. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 1.1 mm or less.

154. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 0.56 mm or less.

155. The electrospray system according to claim 83, wherein the spacing on the ejection surface between adjacent devices is about 0.28 mm or less.

156. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 9 mm or less.

157. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 4.5 mm or less.

158. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 2.2 mm or less.

159. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 1.1 mm or less.

160. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 0.56 mm or less.

161. The electrospray system according to claim 84, wherein the spacing on the ejection surface between adjacent devices is about 0.28 mm or less.

162. A system for processing multiple sprays of fluid comprising:

an electrospray device according to claim 1 and a device to receive multiple sprays of fluid from said electrospray device.

163. The system according to claim 162, wherein the device to receive multiple sprays of fluid receives electrospray plumes of the fluid emanating from a plurality of the spray units of said electrospray device.

164. The system according to claim 163, wherein multiple electrospray plumes of the fluid emanate from at least one of the plurality of spray units of said electrospray device.

165. The system according to claim 162, wherein the device to receive multiple sprays of fluid receives multiple electrospray plumes of the fluid emanating from the single spray unit of said electrospray device.

166. The system according to claim 162, wherein the device to receive multiple sprays of fluid receives droplets of the fluid emanating from a plurality of spray units of said electrospray device.

167. The system according to claim 162, wherein said device to receive multiple sprays of fluid comprises a surface for receiving said fluid.

168. The system according to claim 167, wherein said surface comprises a daughter plate or MALDI sample plate, having a plurality of fluid receiving wells each positioned to receive fluid ejected from said electrospray device.

169. The system according to claim 162, wherein said device to receive multiple sprays of fluid is a mass spectrometry device.

170. A system for processing multiple sprays of fluid comprising:

an electrospray system according to claim 67 and a device to receive multiple sprays of fluid from said electrospray system.

171. The system according to claim 170, wherein the device to receive multiple sprays of fluid receives electrospray plumes of the fluid emanating from a plurality of the spray units of said electrospray system.

172. The system according to claim 171, wherein multiple electrospray plumes of the fluid emanate from at least one of the spray units of said electrospray system.

173. The system according to claim 170, wherein the device to receive multiple sprays of fluid receives droplets of the fluid emanating from a plurality of spray units of said electrospray system.

174. The system according to claim 170, wherein said device to receive multiple sprays of fluid comprises a surface for receiving said fluid.

175. The system according to claim 174, wherein said surface comprises:

a daughter plate or MALDI sample plate, having a plurality of fluid receiving wells each positioned to receive fluid ejected from said electrospray system.

176. The system according to claim 170, wherein said device to receive multiple sprays of fluid is a mass spectrometry device.

177. A system for processing multiple sprays of fluid comprising:

an electrospray device according to claim 1 and

a device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray device.

178. The system according to claim 177, wherein at least one of:

a) the entrance orifices of the plurality of spray units of said electrospray device are in fluid communication with one another by a first reservoir, and

b) the entrance orifice of the single spray unit is in fluid communication with a second reservoir; and

wherein said device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice comprises;

at least one conduit to provide delivery of at least one sample in solution or fluid or combination thereof to at least one reservoir of said device.

179. The system according to claim 177, wherein said at least one conduit comprises a capillary, micropipette, or microchip.

180. The system according to claim 177, wherein the at least one conduit and reservoir provide a fluid tight seal therebetween, said at least one conduit optionally comprising a disposable tip.

181. The system according to claim 177, wherein said at least one conduit is compatible with mutiple entrance orifices and is repositionable from one entrance orifice to another entrance orifice.

182. The system according to claim 181, wherein said at least one conduit is capable of being receded from one entrance orifice and repositioned in line with another entrance orifice and placed in sealing engagement with the another entrance orifice to provide fluid thereto.

183. The system according to claim 177, wherein said device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray device carries out liquid separation analysis on the fluid.

184. The system according to claim 183, wherein the liquid separation analysis is capillary electrophoresis, capillary dielectrophoresis, capillary electrochromatography, or liquid chromatography.

185. A system for processing multiple sprays of fluid comprising:

a system according to claim 177 and

a device to receive multiple sprays of fluid from said electrospray device.

186. The system according to claim 185, wherein the device to receive multiple sprays of fluid receives plumes of the fluid emanating from a plurality of the spray units of said electrospray device.

187. The system according to claim 185, wherein the device to receive multiple sprays of fluid receives multiple electrospray plumes of the fluid emanating from at least one spray unit of said electrospray device.

188. The system according to claim 185, wherein said device to receive multiple sprays of fluid comprises a surface for receiving said fluid.

189. The system according to claim 188, wherein said surface comprises:

a daughter plate or MALDI sample plate, having a plurality of fluid receiving wells each positioned to receive fluid ejected from said electrospray system.

190. The system according to claim 185, wherein said device to receive multiple sprays of fluid is a mass spectrometry device.

191. A system for processing multiple sprays of fluid comprising:

an electrospray system according to claim 67 and

a device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray system.

192. The system according to claim 191, wherein at least one of:

a) the entrance orifices of the plurality of spray units of said electrospray device are in fluid communication with one another by a first reservoir, and

b) the entrance orifice of the single spray unit is in fluid communication with a second reservoir; and

wherein said device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice comprises;

at least one conduit to provide delivery of at least one sample in solution or fluid or combination thereof to at least one reservoir of said device.

193. The system according to claim 191, wherein said at least one conduit comprises a capillary, micropipette, or microchip.

194. The system according to claim 191, wherein the at least one conduit and reservoir provide a fluid tight seal therebetween, said at least one conduit optionally comprising a disposable tip.

195. The system according to claim 191, wherein said at least one conduit is compatible with multiple entrance orifices and is repositionable from one entrance orifice to another entrance orifice.

196. The system according to claim 195, wherein said at least one conduit is capable of being receded from one entrance orifice and repositioned in line with another entrance orifice and placed in sealing engagement with the another entrance orifice to provide fluid thereto.

197. The system according to claim 191, wherein said device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray device carries out liquid separation analysis on the fluid.

198. The system according to claim 197, wherein the liquid separation analysis is capillary electrophoresis, capillary dielectrophoresis, capillary electrochromatography, or liquid chromatography.

199. A system for processing multiple sprays of fluid comprising:

a system according to claim 191 and

a device to receive multiple sprays of fluid from said electrospray system.

200. The system according to claim 199, wherein the device to receive multiple sprays of fluid receives plumes of the fluid emanating from a plurality of the spray units of said electrospray system.

201. The system according to claim 199, wherein the device to receive multiple sprays of fluid receives multiple electrospray plumes of the fluid emanating from at least one spray unit of said electrospray system.

202. The system according to claim 199, wherein said device to receive multiple sprays of fluid comprises a surface for receiving said fluid.

203. The system according to claim 202, wherein said surface comprises:

a daughter plate or MALDI sample plate, having a plurality of fluid receiving wells each positioned to receive fluid ejected from said electrospray system.

204. The system according to claim 199, wherein said device to receive multiple sprays of fluid is a mass spectrometry device.

205. A method for processing multiple sprays of fluid comprising:

providing an electrospray device according to claim 1;

providing a device to provide at least one fluid sample to at least one entrance orifice of said electrospray device;

providing a device to receive multiple sprays of fluid or droplets from said electrospray device;

passing a fluid from said fluid providing device to said electrospray device;

generating an electric field surrounding the exit orifice of said at least one spray unit such that fluid discharged therefrom forms an electrospray or droplets; and

passing said electrospray or droplets from said electrospray device to said receiving device.

206. The method of claim 205, further comprising using said receiving device for performing mass spectrometry analysis, liquid chromatography analysis, or protein, DNA, or RNA combinatorial chemistry analysis.

207. A method for processing multiple sprays of fluid comprising:

providing an electrospray system according to claim 67;

providing a device to provide at least one fluid sample to at least one entrance orifice of at least one electrospray device of said electrospray system;

providing a device to receive multiple sprays of fluid or droplets from said at least one electrospray device;

passing a fluid from said fluid providing device to said at least one electrospray device;

generating an electric filed surrounding an exit orifice of at least one spray unit within said at least one electrospray device such that fluid discharged therefrom forms an electrospray or droplets; and

passing said electrospray or droplets from said at least one electrospray device to said receiving device.

208. The method of claim 207, further comprising using said receiving device for performing mass spectrometry analysis, liquid chromatography analysis, or protein, DNA, or RNA combinatorial chemistry analysis.

209. A method of generating an electrospray comprising:

providing an electrospray device according to claim 1;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit;

generating an electric field surrounding the exit orifice of said at least one spray unit such that fluid discharged therefrom forms an electrospray.

210. The method according to claim 209, further comprising:

detecting components of the electrospray by spectroscopic detection.

211. The method according to claim 210, wherein the spectroscopic detection is selected from the group consisting of UV absorbance, laser induced fluorescence, and evaporative light scattering.

212. The method according to claim 209, wherein the fluid is discharged at a flow rate of up to about 2 μ

L/minute.

213. The method according to claim 209, wherein the fluid is discharged at a flow rate of greater than about 2 μ

L/minute.

214. The method according to claim 209, wherein the fluid is discharged at a flow rate of from about 2 μ

L/minute to about 1 mL/minute.

215. The method according to claim 209, wherein the fluid is discharged at a flow rate of from about 100 nL/minute to about 500 nL/minute.

216. A method of mass spectrometric analysis comprising:

providing the system according to claim 162, wherein the device to receive multiple sprays of fluid from said electrospray device is a mass spectrometer;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray; and

passing the electrospray into the mass spectrometer, whereby the fluid is subjected to a mass spectrometry analysis.

217. The method according to claim 216, wherein the mass spectrometry analysis is selected from the group consisting of atmospheric pressure ionization and laser desorption ionization.

218. A method of liquid chromatographic analysis comprising:

providing the system according to claim 177, wherein the device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray device is a liquid chromatography device;

passing a fluid through the liquid chromatography device so that the fluid is subjected to liquid chromatographic separation; and

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray.

219. A method of mass spectrometric analysis comprising:

providing the system of claim 181, wherein the device to receive multiple sprays of fluid from said electrospray device is a mass spectrometer and the device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray device is a liquid chromatography device;

passing a fluid through the liquid chromatography device so that the fluid is subjected to liquid chromatographic separation;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray; and

passing the electrospray into the mass spectrometer, whereby the fluid is subjected to a mass spectrometry analysis.

220. A method of generating an electrospray comprising:

providing an electrospray system according to claim 67;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit;

generating an electric field surrounding the exit orifice such that fluid discharged from the exit orifice of said at least one spray unit forms an electrospray.

221. The method according to claim 220, further comprising:

detecting components of the electrospray by spectroscopic detection.

222. The method according to claim 221, wherein the spectroscopic detection is selected from the group consisting of UV absorbance, laser induced fluorescence, and evaporative light scattering.

223. The method according to claim 220, wherein the fluid is discharged at a flow rate of up to about 2 μ

L/minute.

224. The method according to claim 220, wherein the fluid is discharged at a flow rate of greater than about 2 μ

L/minute.

225. The method according to claim 220, wherein the fluid is discharged at a flow rate of from about 2 μ

L,/minute to about 1 mL/minute.

226. The method according to claim 220, wherein the fluid is discharged at a flow rate of from about 100 nL/minute to about 500 nL/minute.

227. A method of mass spectrometric analysis comprising:

providing the system according to claim 170, wherein the device to receive multiple sprays of fluid from said electrospray device is a mass spectrometer;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray; and

passing the electrospray into the mass spectrometer, whereby the fluid is subjected to a mass spectrometry analysis.

228. The method according to claim 227, wherein the mass spectrometry analysis is selected from the group consisting of atmospheric pressure ionization and laser desorption ionization.

229. A method of liquid chromatographic analysis comprising:

providing the system according to claim 191, wherein the device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray system is a liquid chromatography device;

passing a fluid through the liquid chromatography device so that the fluid is subjected to liquid chromatographic separation; and

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray.

230. A method of mass spectrometric analysis comprising:

providing the system of claim 195, wherein the device to receive multiple sprays of fluid from said electrospray system is a mass spectrometer and the device to provide at least one sample in solution or fluid or combination thereof to at least one entrance orifice of said electrospray system is a liquid chromatography device;

passing a fluid through the liquid chromatography device so that the fluid is subjected to liquid chromatographic separation;

passing a fluid into the entrance orifice, through the channel, and through the exit orifice of at least one spray unit under conditions effective to produce an electrospray; and

passing the electrospray into the mass spectrometer, whereby the fluid is subjected to a mass spectrometry analysis.

240. A method for producing larger, minimally-charged droplets from a device, comprising:

providing the electrospray device of claim 2;

passing a fluid into at least one entrance orifice, through the channel, and through the exit orifice of at least one spray unit of said electrospray device; and

generating an electric field surrounding the exit orifice to a value less than that required to generate an electrospray of said fluid.

242. A method for producing larger, minimally-charged droplets from a device, comprising:

providing the electrospray system of claim 67;

passing a fluid into at least one entrance orifice, through the channel, and through the exit orifice of at least one spray unit of at least one electrospray device; and

generating an electric field surrounding the exit orifice to a value less than that required to generate an electrospray of said fluid.

243. The method according to claim 242, wherein the fluid to substrate potential voltage ratio is less than about 2.

231. A method of generating multiple sprays from a single fluid stream of an electrospray device comprising:

providing an electrospray device for spraying a fluid comprising;

a substrate having a) an injection surface;

b) an ejection surface opposing the injection surface, wherein the substrate is an integral monolith having a plurality of spray units wherein entrance orifices of a plurality of spray units are in fluid communication with one another,

each spray unit comprising;

an entrance orifice on the injection surface,

an exit orifice on the ejection surface,

a channel extending between the entrance orifice and the exit orifice, and

a recess surrounding the exit orifice positioned between the injection surface and the ejection surface; and

c) an electric field generating source positioned to define an electric field surrounding each exit orifice, wherein each spray unit generates at least one plume of the fluid capable of overlapping with that emanating from other spray units of said electrospray device;

depositing on the injection surface analyte from a fluid sample;

eluting the analyte deposited on the injection surface with an eluting fluid;

passing the eluting fluid containing analyte into the entrance orifice, through the channel, and through the exit orifice of each spray unit;

generating an electric field surrounding the exit orifice such that fluid discharged from the exit orifice of each of the spray units forms an electrospray.

232. The method according to claim 231, wherein said depositing on the injection surface comprises:

contacting the fluid sample with the injection surface and

evaporating the fluid sample under conditions effective to deposit the analyte on the injection surface.

233. The method according to claim 231, wherein the substrate for said electrospray device has a plurality of spray units for spraying the fluid.

234. The method according to claim 231, wherein the fluid is discharged at a flow rate of up to about 2 μ

L/minute.

235. The method according to claim 231, wherein the fluid is discharged at a flow rate of greater than about 2 μ

L/minute.

236. The method according to claim 231, wherein the fluid is discharged at a flow rate of from about 2 μ

L/minute to about 1 mL/minute.

237. The method according to claim 231, wherein the fluid is discharged at a flow rate of from about 100 nL/minute to about 500 nL/minute.

238. A method of mass spectrometric analysis comprising:

providing a mass spectrometer and

passing the electrospray produced by the method according to claim 231 into the mass spectrometer, whereby the fluid is subjected to a mass spectrometry analysis.

239. The method according to claim 238, wherein the mass spectrometry analysis is selected from the group consisting of atmospheric pressure ionization and laser desorption ionization.

241. The method according to claim 241, wherein the fluid to substrate potential voltage ratio is less than about 2.