Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same

• US 6,628,041 B2
• Filed: 05/16/2000
• Issued: 09/30/2003
• Est. Priority Date: 05/16/2000
• Status: Expired due to Term

• Current Assignee: Calient AI Incorporated
• Original Assignee: Calient Networks Incorporated
• Inventors: Lee, Seung Bok, MacDonald, Noel
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US09/572,979
• Publication Number:
  US 20030090172A1
• Time in Patent Office: 1,232 Days
• Field of Search: 310/309
• US Class Current: 310/309
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: B81B 3/0086 Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes and one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.

Claims

1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:

a mirror component that is capable of moving upon electrostatic actuation;

one or more electrostatic actuators providing electrostatic actuation for the mirror component, the electrostatic actuators having fixed plates disposed approximately perpendicular to the mirror component, the fixed plates being disposed to define a gap between the fixed plates that decreases along a direction perpendicular to a surface of the mirror component, and

one or more movable plates to move relative to at least one or more of the fixed plates.

2. The MEMS mirror device of claim 1, wherein at least one of the movable plates has a different height than the fixed plates.

3. The MEMS mirror device of claim 2, wherein all of the movable plates have a different height than the fixed plates.

4. The MEMS mirror device of claim 3, wherein the movable plates have a shorter height than the fixed plates.

5. The MEMS mirror device of claim 4, wherein the fixed plates have a substantially tapered shape.

6. The MEMS mirror device of claim 1, wherein the mirror component is capable of having an angular range of motion with respect to two axis.

7. The MEMS mirror device of claim 6, wherein the mirror component is capable of having an angular range of motion of 20 degrees with respect to two axis.

8. An electrostatic actuator for a MEMS mirror device, comprising:

two or more tapered fingers;

the tapered fingers having a gap between the fingers such that the gap decreases along a direction perpendicular to a top surface of the fingers; and

one or more movable fingers disposed in between the two or more tapered fingers.

9. The electrostatic actuator of claim 8, wherein the two or more tapered fingers are fixed fingers.

10. The electrostatic actuator of claim 8, wherein the one or more movable fingers have a different height than the two or more tapered fingers.

11. The electrostatic actuator of claim 10, wherein the one or more movable fingers have a shorter height than the two or more tapered fingers.