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Capacitive moisture sensor

  • US 6,628,501 B2
  • Filed: 05/21/2002
  • Issued: 09/30/2003
  • Est. Priority Date: 06/15/2001
  • Status: Active Grant
First Claim
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1. A capacitive moisture sensor comprising:

  • a semiconductor substrate;

    a first insulating film that is located on a surface of the substrate;

    a pair of electrodes that is located on the first insulating film;

    a second insulating film that is located on the electrodes to cover and protect the electrodes; and

    a moisture-sensitive film having a dielectric constant that varies in response to ambient moisture, wherein the moisture-sensitive film is located on the second insulating film on the electrodes and is also located on one of the first insulating film and the second insulating film between the electrodes, wherein the semiconductor substrate has a hole under the electrodes to decrease the parasitic capacitance between each electrode and the semiconductor substrate.

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