Management system for semiconductor fabrication device

• US 6,629,009 B1
• Filed: 03/14/2000
• Issued: 09/30/2003
• Est. Priority Date: 03/15/1999
• Status: Expired due to Term

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Tamaki, Makoto
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Rapp, Chad
• Application Number:
  US09/525,300
• Time in Patent Office: 1,295 Days
• Field of Search: 700/108, 700/109, 700/110, 700/111, 700/121
• US Class Current: 700/108
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32182 If state of tool, product deviates from standard, adjust system, feedback
• CPC Class Codes: G05B 2219/32201 Build statistical model of past normal proces, compare with actual process
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

A management system for semiconductor fabrication devices is provided with a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line, and a determiner for monitoring the management information collected by the sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information. This enables to presume causes or the like of failures based on data, and hence, to immediately identify the causes of even sudden failures, thereby allowing measures to be immediately taken. Consequently, the process line can be stably operated.

Claims

1. A management system for a semiconductor fabrication device, comprising:

a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line;

monitoring means for monitoring the management information collected by said sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information; and

first instruction generating means for calculating a sequence waiting time since a state becomes stable until a next sequence starts, based on a result of the comparison by said monitoring means, and for instructing adjustment of a sequence of said fabrication device.

2. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

alarming means for indicating occurrence of a failure in the case where deviation of the measured value pattern from the set value pattern is detected as a result of the comparison by said monitoring means.

3. The management system for a semiconductor fabrication device as set forth in claim 2, further comprising:

fabrication process line control means for outputting a device stop signal to said fabrication device in response to an output of said alarming means, to stop said fabrication device.

4. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

said monitoring means compares the measured value pattern with the set value pattern during a period of time in which a certain steady state of said fabrication device shifts to a next different steady state thereof.

5. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

defective product identifying means for identifying a defective product on said fabrication process line based on a result of the comparison by said monitoring means.

6. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

second instruction generating means for instructing adjustment of a sequence of said fabrication device based on a result of the comparison by said monitoring means, so as to eliminate a deviation of the measured value pattern from the set value pattern.

7. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

instability-causing factor indicating means for detecting instability of the measured value pattern and for indicating presumed factors causing the instability, based on a result of the comparison by said monitoring means.

8. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

maintenance alarm indicating means for raising an alarm to inform necessity of maintenance of said fabrication device, the alarm being raised by predicting degradation of said fabrication device based on detection of changes with time in the measured value pattern based on a result of the comparison by said monitoring means.

9. The management system for a semiconductor fabrication device as set forth in claim 1, further comprising:

fabrication process line control means for controlling said fabrication process line including said fabrication device based on a result of the comparison by said monitoring means.

10. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

said monitoring means presumes causes of changes of characteristics of said fabrication device, based on sudden changes in data of the management information.

11. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

said monitoring means presumes causes of changes of characteristics of said fabrication device, based on changes with time in data of the management information.

12. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

in the case where a failure occurs to said fabrication device, presumed causes of the failure are shown in a descending order of probability of occurrence.

13. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

in the case where a failure occurs to said fabrication device, a method for inspecting causes of the failure and a method for determining the causes of the failure are shown.

14. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

in the case where a failure occurs to said fabrication device, self-inspection to determine causes of the failure is carried out with respect to presumed causes of the failure in a descending order of probability of occurrence.

15. The management system for a semiconductor fabrication device as set forth in claim 1, wherein:

intermediates of semiconductors are individually and separately managed in said fabrication process line.

16. A management system for a semiconductor fabrication device, comprising:

a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line; and

monitoring means for monitoring the management information collected by said sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information, wherein

said fabrication device is a chemical vapor deposition system in a liquid crystal substrate fabrication process line, and is provided with a radio frequency electric power progressive wave sensor, a gas flow rate sensor, and a film forming chamber pressure sensor as said sensor.

17. A management system for a semiconductor fabrication device, comprising:

a sensor for always collecting management information from a fabrication device provided in a semiconductor fabrication process line; and

monitoring means for monitoring the management information collected by said sensor as a time-sequential measured value pattern, and for comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information, wherein

said monitoring means presumes causes of changes of characteristics of said fabrication device, based on a time-base order of changes in data of the management information.

18. A semiconductor fabrication device management method, comprising the steps of:

monitoring management information collected by a sensor as a time-sequential measured value pattern, the sensor always collecting management information from a fabrication device provided in a semiconductor fabrication process line;

comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information; and

calculating a sequence waiting time since a state becomes stable until a next sequence based on a result of the comparison between the measured value pattern and the set value pattern, and for instructing adjustment of a sequence of the fabrication device.

19. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

indicating occurrence of a failure in the case where deviation of the measured value pattern from the set value pattern is detected as a result of comparison between the measured value pattern and the set value pattern.

20. The semiconductor fabrication device management method as set forth in claim 19, further comprising the step of:

outputting a device stop signal to the fabrication device based on the indication of occurrence of a failure, to stop the fabrication device.

21. The semiconductor fabrication device management method as set forth in claim 18, wherein:

the comparison between the measured value pattern and the set value pattern is carried out during a period of time in which a certain steady state of the fabrication device shifts to a next different steady state.

22. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

identifying a defective product on the fabrication process line based on a result of the comparison between the measured value pattern and the set value pattern.

23. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

instructing adjustment of a sequence of the fabrication device based on a result of the comparison between the measured value pattern and the set value pattern, so as to eliminate a deviation of the measured value pattern from the set value pattern.

24. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

detecting instability of the measured value pattern and indicating presumed factors causing the instability, based on a result of the comparison between the measured value pattern and the set value pattern.

25. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

detecting changes with time of the measured value pattern based on a result of the comparison between the measured value pattern and the set value pattern, predicting degradation of the fabrication device, and raising an alarm to inform necessity of maintenance of the fabrication device.

26. The semiconductor fabrication device management method as set forth in claim 18, further comprising the step of:

controlling the fabrication process line including the fabrication device based on a result of the comparison between the measured value pattern and the set value pattern.

27. A semiconductor fabrication device management method, comprising:

monitoring management information collected by a sensor as a time-sequential measured value pattern, the sensor always collecting management information from a fabrication device provided in a semiconductor fabrication process line; and

comparing the measured value pattern with a set value pattern registered beforehand in accordance with the management information, wherein

the fabrication device is a chemical vapor deposition system in a liquid crystal substrate fabrication process line; and

wherein

the management information is collected by means of a radio frequency electric power progressive wave sensor, a gas flow rate sensor, and a film forming chamber pressure sensor, each of which functions as said sensor.