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Method and apparatus for impurity detection

  • US 6,629,039 B1
  • Filed: 04/27/2000
  • Issued: 09/30/2003
  • Est. Priority Date: 04/27/2000
  • Status: Expired due to Fees
First Claim
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1. An apparatus for detecting an impurity in a sample having at least one component comprising:

  • a device for obtaining characteristic measurements for the sample;

    a computer linked to said device;

    software executing on said computer for selecting a value representing an anticipated number of components in the sample;

    software executing on said computer for generating a matrix representing said characteristic measurements for the sample, said characteristic measurements having at least two variables in each dimension;

    software executing on said computer for repeatedly selecting a subset within said matrix for analysis of the relation between the component and impurity;

    software executing on said computer for constructing a projection matrix by projecting each of said characterstic measurements of said matrix onto said subset to calculate a residual error; and

    software executing on said computer for calculating an index from said subset to assess purity of the sample.

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