Method for fabricating a pressure-wave sensor with a leveling support element
First Claim
1. A method for fabricating a pressure-waveform sensor comprising:
- providing a housing structure having an inner lip;
supporting a cantilevered piezoelectric sensor element with a support element in the housing structure such that a first end of the sensor element is secured between the support element and the housing, and a second end of the sensor element is in an orientation cantilevered from the support element; and
shimming the support element such that contact is made between the support element and the inner lip at a plurality of regions in order to level the piezoelectric element relative to the inner lip.
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Abstract
A method for fabricating a pressure-waveform sensor with a leveling support element. One embodiment provides a pressure-waveform sensor having a housing, a support element, and a piezoelectric element having a first end secured between the support element and the housing, and a second end in a cantilevered orientation. The support element and the piezoelectric element together form a plurality of support regions to level the piezoelectric element and relative to the housing. In some embodiments, the support element includes a ring having three slots spaced apart on one face of the ring, or one or more support regions formed with a shim having a thickness equal to a thickness of the piezoelectric device, or support regions that are integral to the support element. Another aspect provides a method for fabricating a pressure-waveform sensor. The method includes the steps of forming a housing structure with an inner lip, and supporting a cantilevered piezoelectric element with a support structure such that contact is made with the inner lip at a plurality of points in order to level the piezoelectric element relative to the inner lip.
83 Citations
22 Claims
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1. A method for fabricating a pressure-waveform sensor comprising:
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providing a housing structure having an inner lip;
supporting a cantilevered piezoelectric sensor element with a support element in the housing structure such that a first end of the sensor element is secured between the support element and the housing, and a second end of the sensor element is in an orientation cantilevered from the support element; and
shimming the support element such that contact is made between the support element and the inner lip at a plurality of regions in order to level the piezoelectric element relative to the inner lip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
providing a diaphragm on the housing structure; and
displacementally coupling the cantilevered piezoelectric sensor element to the diaphragm.
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5. The method according to claim 1, wherein the cantilevered piezoelectric sensor element contacts the inner lip at a single one of the plurality of regions.
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6. The method according to claim 5, wherein the one or more shims are cylindrical in shape.
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7. The method according to claim 1, wherein the cantilevered piezoelectric sensor element contacts the inner lip at a single one of the plurality of regions and wherein the shimming provides only a single shim that contacts the inner lip at a single one of the plurality of regions.
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8. The method according to claim 1, wherein the cantilevered piezoelectric sensor element contacts the inner lip at a single one of the plurality of regions and wherein the shimming provides one or more shims that contact the inner lip at a plurality of the plurality of regions.
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9. The method according to claim 1, wherein the one or more shims each have a thickness substantially equal to a thickness of the piezoelectric sensor element.
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10. The method according to claim 1, wherein the support element comprises a ring, the ring including a plurality of slots spaced apart on one face of the ring, and having the piezoelectric element mounted to a first one of the slots.
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11. The method according to claim 10, wherein the ring further comprises wire leveler elements mounted in a second and a third of the slots to provide two of the support regions.
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12. The method according to claim 11, wherein the support element comprises a first face region for attaching to the first end of the piezoelectric element, a second face region elevated relative to the first face region to provide one or more of the plurality of support regions.
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13. The method according to claim 12, wherein the support regions of the second face region are integral to the support element.
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14. A method for fabricating a pressure-waveform sensor comprising:
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providing a housing structure having an inner lip;
supporting a cantilevered piezoelectric sensor element with a support element in the housing structure such that a first end of the sensor element is secured between the support element and the housing, and a second end of the sensor element is in an orientation cantilevered from the support element; and
shimming the support element such that contact is made between the support element and the inner lip at a plurality of regions in order to level the piezoelectric element relative to the inner lip, wherein the support element is a ring, the method further comprising; mounting the piezoelectric sensor element in a first slot of the support element ring; and
mounting one or more shims in a second and a third slot of the support element ring.
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15. A method for fabricating a pressure-waveform sensor comprising:
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providing a housing structure having an inner lip; and
supporting a cantilevered piezoelectric sensor element with a support element, that further includes one or more support regions, in the housing structure such that a first end of the sensor element is secured between the support element and the housing, and a second end of the sensor element is in an orientation cantilevered from the support element; and
supporting the support element such that contact is made between the support regions of the support element and the inner lip at a plurality of areas in order to level the piezoelectric element relative to the inner lip. - View Dependent Claims (16, 17, 18)
securing a post to the cantilevered piezoelectric element; - wherein the support regions of the support element and the piezoelectric element are coplanar and wherein the post extends through the plane of the support regions.
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18. The method according to claim 15, further comprising:
mounting an amplifier secured to a surface of the support element by epoxy.
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19. A method of fabricating a pressure-waveform sensor comprising:
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providing a piezoelectric sensor element;
providing a support element having one or more raised support regions; and
mounting the piezoelectric sensor element to the support element in a cantilevered configuration such that a first end of the sensor element is secured between the support element and the housing, and a second end of the sensor element is in an orientation cantilevered from the support element, wherein a face of the mounted piezoelectric element is substantially coplanar with the one or more raised support regions. - View Dependent Claims (20, 21, 22)
providing a housing having an inner lip and a diaphragm, wherein a plane of the diaphragm and a plane of the inner lip are parallel, and a plane of the sensor element and the one or more support regions and the plane of the inner lip are coplanar; and
mounting the support element within the housing such that a portion of the face of the piezoelectric element is in contact with the inner lip and the one or more raised support regions are in contact with the inner lip.
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21. The method according to claim 20, further comprising:
mounting an amplifier to the support element opposite the piezoelectric element.
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22. The method according to claim 19, wherein the one or more raised support regions are formed on the support element before the piezoelectric element is mounted.
Specification