Method of making flat panel displays having diamond thin film cathode

• US 6,629,869 B1
• Filed: 06/07/1995
• Issued: 10/07/2003
• Est. Priority Date: 03/16/1992
• Status: Expired due to Fees

• Current Assignee: Applied Nanotech Holdings Incorporated (Nano Magic, Inc.)
• Original Assignee: SI Diamond Technology, Inc. (Nano Magic, Inc.)
• Inventors: Kumar, Nalin, Xie, Chenggang
• Primary Examiner(s): Ramsey, Kenneth J.
• Application Number:
  US08/474,277
• Time in Patent Office: 3,044 Days
• Field of Search: 445/24, 445/50, 445/51
• US Class Current: 445/24
• CPC Class Codes: G09G 3/22 using controlled light sources
• CPC Class Codes: H01J 1/304 Field-emissive cathodes
• CPC Class Codes: H01J 1/3042 microengineered, e.g. Spindt-type
• CPC Class Codes: H01J 1/316 having an electric field parallel to the surface, e.g. thin film cathodes
• CPC Class Codes: H01J 2201/304 Field emission cathodes
• CPC Class Codes: H01J 2201/30426 Coatings on the emitter surface, e.g. with low work function materials
• CPC Class Codes: H01J 2201/30457 Diamond
• CPC Class Codes: H01J 2201/319 Circuit elements associated with the emitters by direct integration
• CPC Class Codes: H01J 2329/8625 Spacing members
• CPC Class Codes: H01J 2329/864 characterised by the material
• CPC Class Codes: H01J 29/085 Anode plates, e.g. for screens of flat panel displays
• CPC Class Codes: H01J 31/127 using large area or array sources, i.e. essentially a source for each pixel group
• CPC Class Codes: H01J 61/0677 characterised by the electron emissive material
• CPC Class Codes: H01J 63/06 Lamps with luminescent screen excited by the ray or stream
• CPC Class Codes: H01J 9/027 of thin film cathodes
• CPC Class Codes: Y10S 977/891 Vapor phase deposition

Abstract

A field emission cathode is provided which includes a substrate and a conductive layer desposed adjacent the substrate. An electrically resistive pillar is disposed adjacent the conductive layer, the resistive pillar having a substantially flat surface spaced from and substantially parallel to the substrate. A layer of diamond is disposed adjacent the surface of the resistive pillar.

Claims

1. A method of making a field emission cathode, comprising the steps of:

depositing a layer of conductive material over a first substrate;

depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said first substrate;

depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said first substrate;

constructing a plurality of field emission cathodes over said layer of conductive material, said field emission cathodes having interstices therebetween to produce thereby a cathode assembly;

depositing a spacer material in said interstices;

depositing an indium tin oxide layer over a second substrate;

depositing a phosphor film layer over said indium tin oxide layer to produce thereby an anode assembly; and

joining said cathode assembly to said anode assembly, said spacer material thereby contacting said phosphor film layer.

3. The method as recited in claim 1 wherein said second substrate is glass.

4. The method as recited in claim 1 wherein said joined cathode and anode assemblies form a portion of a flat panel display.

5. The method as recited in claim 4 wherein said joined cathode and anode assemblies are separated by an electrical potential provided by a diode biasing circuit.

2. A method of making a field emission cathode, comprising the steps of:

depositing a layer of conductive material over a substrate;

depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;

depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate;

constructing a plurality of field emission cathodes over said layer of conductive material, said field emission cathodes having interstices therebetween to produce thereby a cathode assembly; and

depositing a spacer material in said interstices, wherein said spacer material is fibrous.