Method for an optical switch on a silicon on insulator substrate

• US 6,632,374 B1
• Filed: 09/28/2000
• Issued: 10/14/2003
• Est. Priority Date: 09/28/2000
• Status: Expired due to Fees

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Peeters, Eric, Rosa, Michel A.
• Primary Examiner(s): Kunemund, Robert
• Assistant Examiner(s): Ahmed, Shamim
• Application Number:
  US09/675,812
• Time in Patent Office: 1,111 Days
• Field of Search: 216/2, 216/24, 257/415, 385/12, 385/18
• US Class Current: 216/24
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81C 1/00666 Treatments for controlling internal stress or strain in MEMS structures
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

Optical cross-connect systems involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes and is suspended by a plurality of suspension arms attached to a silicon on insulator substrate.

Claims

1. A method comprising:

providing a silicon on insulator substrate;

providing a plurality of metal suspension arms each comprising an internal stress gradient layer, each of said plurality of metal suspension arms having a first end and a second end, said first end being attached to said silicon on insulator substrate;

providing a silicon area having a reflective surface layer, said silicon area being attached to said second end of said plurality of metal suspension arms; and

providing a plurality of electrodes arranged on said silicon on insulator substrate adjacent to said plurality of metal suspension arms to create an electric field for producing deflective movement of said silicon area having said reflective surface layer.

2. The method of claim 1 wherein said plurality of suspension arms is three in number.

3. The method of claim 1 wherein said silicon area has a substantially square shape.

4. The method of claim 1 wherein said internal stress gradient layer comprises MoCr.

5. The method of claim 1 wherein an internal stress gradient is on the order of 3 gigapascal across said stress gradient layer.

6. A method of making an array of structures, each structure including:

a silicon area having a reflective surface layer;

a plurality of metal suspension arms to which the silicon area is attached; and

a plurality of electrodes to create an electric field for producing deflective movement of the silicon area;

the silicon area, plurality of metal suspension arms, and plurality of electrodes being provided in accordance with claim 1.

7. The method of claim 6 wherein said array is a two dimensional rectilinear array.

11. The method of claim 1 wherein each of said plurality of electrodes has a substantially tapered shape.

16. The method of claim 1 in which each of the metal suspension arms extends away from the substrate to its second end, each arm'"'"'s internal stress gradient layer moving the arm away from the substrate;

the plurality of electrodes including, for each arm, an electrode that responds to an actuation signal by attracting the arm toward the substrate.

8. A method comprising:

providing a silicon on insulator substrate;

providing four metal suspension arms each comprising an internal stress gradient layer, each of said four metal suspension arms having a first end and a second end, said first end being attached to said silicon on insulator substrate;

providing a silicon area having a reflective gold surface layer, said silicon area being attached to said second end of said four metal suspension arms; and

providing four electrodes arranged on said silicon on insulator substrate adjacent to said four metal suspension arms, respectively, to create an electric field for producing deflective movement of said silicon area having said reflective gold surface layer.

9. A method of making an array of structures, each structure including:

a silicon area having a reflective surface layer;

four metal suspension arms to which the silicon area is attached; and

four electrodes to create an electric field for producing deflective movement of the silicon area;

the silicon area, four metal suspension arms, and four electrodes being provided in accordance with claim 8.

10. The method of claim 9 wherein said array is a two dimensional rectilinear array.

17. The method of claim 8 in which each of the metal suspension arms extends away from the substrate to its second end, each arm'"'"'s internal stress gradient layer moving the arm away from the substrate;

the plurality of electrodes including, for each arm, an electrode that responds to an actuation signal by attracting the arm toward the substrate.

12. A method comprising:

providing a silicon on insulator substrate having a cutout portion;

providing a plurality of metal suspension arms each comprising an internal stress gradient layer, each of said plurality of metal suspension arms having a first end and a second end, said first end being attached to said silicon on insulator substrate;

providing a silicon area having a reflective surface layer and positioned over said cutout portion, said silicon area being attached to said second end of said plurality of metal suspension arms; and

providing a plurality of electrodes arranged on said substrate adjacent to said plurality of metal suspension arms to create an electric field for producing deflective movement of said silicon area having said reflective surface layer.

13. The method of claim 12 wherein said reflective surface layer is gold.

14. A method of making an array of structures, each structure including:

a silicon area having a reflective surface layer;

a plurality of metal suspension arms to which the silicon area is attached; and

four electrodes to create an electric field for producing deflective movement of the silicon area;

the silicon area, four metal suspension arms, and four electrodes being provided in accordance with claim 12.

15. The method of claim 14 wherein said array is a two dimensional rectilinear array.

18. The method of claim 12 in which each of the metal suspension arms extends away from the substrate to its second end, each arm'"'"'s internal stress gradient layer moving the arm away from the substrate;

the plurality of electrodes including, for each arm, an electrode that responds to an actuation signal by attracting the arm toward the substrate.

19. A method performed on a substrate, comprising:

producing an array of at least one mirror structure at a surface of the substrate, each mirror structure including;

two or more suspension arms, each arm having an internal stress gradient, each arm further having an end attached to the substrate'"'"'s surface, the arm extending away from the substrate'"'"'s surface and extending to an attachment point;

a reflective area supported on the attachment points of the suspension arms; and

adjacent to each suspension arm, an electrode on the substrate'"'"'s surface, the electrode being operable to create an electric field to attract the suspension arm toward the substrate'"'"'s surface;

the electrodes adjacent to the suspension arms of each mirror structure being operable to tilt the reflective area by attracting the suspension arms.

20. The method of claim 19 in which the electrodes of each mirror structure are operable to tilt the reflective area about two non-collinear axes by attracting the suspension arms.

21. The method of claim 20 in which each mirror structure includes three of the suspension arms.

22. The method of claim 20 in which each mirror structure includes four of the suspension arms.

23. The method of claim 19 in which the act of producing the array comprises:

producing a first patterned layer over the substrate'"'"'s surface, the first patterned layer including the electrodes of the mirror structures;

producing a second patterned layer over the substrate'"'"'s surface, the second patterned layer including the reflective areas of the mirror structures; and

producing a third patterned layer over the first patterned layer, the third patterned layer including the suspension arms of the mirror structures.

24. The method of claim 23 in which the act of producing the third patterned layer comprises depositing and patterning a layer with an internal stress gradient, the layer with the internal stress gradient being present in the suspension arms.

25. The method of claim 24 in which the layer with the internal stress gradient includes MoCr or polysilicon.

26. The method of claim 23 in which each mirror structure includes a mirror support for the reflective area, the act of producing the array further comprising:

depositing and patterning a mirror support layer, the mirror support layer being present in the mirror supports; and

the act of producing the second patterned layer comprising;

depositing and patterning a layer of gold, the layer of gold being present in the reflective area on the mirror support of each mirror structure.

27. The method of claim 23 in which the act of producing the second patterned layer comprises:

depositing and patterning a layer of gold over the substrate'"'"'s surface, the layer of gold being present in the reflective area of each mirror structure;

the act of producing the array further comprising;

backside etching through the substrate around the reflective area of each mirror structure to produce a mirror support for the reflective area.

28. The method of claim 19, further comprising:

releasing the mirror structures to allow the internal stress gradients of the suspension arms to provide clearance between the reflective areas and the substrate'"'"'s surface.

29. A method performed on a substrate structure, comprising:

producing an array of at least one optical device on the substrate structure, go each optical device including;

two or more suspension arms, each arm extending from a first end attached to the substrate structure to a second end separated from the substrate structure;

each arm having an internal stress gradient moving the arm away from the substrate structure;

an optical element supported on the second ends of the suspension arms; and

for each suspension arm, an electrode on the substrate structure, the electrode responding to an actuation signal by attracting the suspension arm toward the substrate structure.

30. A method performed on a substrate structure, comprising:

producing an array of optical devices on the substrate structure, each optical device including;

two or more suspension arms, each arm having a length extending from a first end attached to the substrate structure to a second end that is not attached to the substrate structure;

each arm being movable between a first position in which the arm'"'"'s length has an initial separation from the substrate structure and a second position in which the arm'"'"'s length is drawn toward the substrate structure, decreasing separation;

each arm having an internal stress gradient moving the arm'"'"'s length toward the first position;

an optical element supported on the second ends of the suspension arms; and

for each suspension arm, an electrode under the suspension arm, the electrode responding to an actuation signal by deflecting the suspension arm from its first position toward its second position;

the electrodes responding individually to the actuation signals to tilt the optical element around two non-collinear axes.

31. A method performed on a silicon on insulator substrate structure, comprising:

producing an array of mirror structures on the substrate structure, each mirror structure including;

two or more metal suspension arms, each arm having a length extending from a first end attached to the substrate structure to a second end that is not attached to the substrate structure;

each arm being movable between a first position in which the arm'"'"'s length has an initial separation from the substrate structure and a second position in which the arm'"'"'s length is drawn toward the substrate structure, decreasing separation;

each arm having an Internal stress gradient moving the arm'"'"'s length toward the first position;

a mirror supported on the second ends of the suspension arms, the mirror including a silicon area and a reflective surface layer, and

for each suspension arm, an electrode under the suspension arm, the electrode responding to an actuation signal by creating an electric field that deflects the suspension arm from its first position toward its second position by beginning to decrease separation at the arm'"'"'s first end and proceeding to decrease separation along the length of the arm toward the arm'"'"'s second end;

the electrodes responding individually to the actuation signals to tilt the mirror around two non-collinear axes;

the act of producing the array of mirror structures comprising;

producing first, second, and third patterned layers over the substrate structure;

the first patterned layer including the electrodes of the mirror structures;

the second patterned layer being a metal layer over the first patterned layer and including the suspension arms of the mirror structures;

the third patterned layer including the reflective surface layers of the mirrors; and

releasing the mirror structures to allow the internal stress gradients of the metal suspension arms to move each suspension arm toward its first position.

32. The method of claim 31 which producing the first patterned layer comprises:

producing each electrode with a shape that is a function of distance from the first end of its suspension arm.

33. The method of claim 31 in which the act of producing the array of mirror structures further comprises, prior to releasing the mirror structures:

backside etching the silicon on insulator substrate structure to remove portions of the substrate structure around the silicon area.