Antireflection film
First Claim
Patent Images
1. An article including an antireflection composite material, the article comprising:
- a substrate;
an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm; and
a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm.
1 Assignment
0 Petitions
Accused Products
Abstract
An article includes an antireflection composite material, a substrate, and an inorganic layer deposited onto the substrate. The inorganic layer has a thickness of from about 1 nm to about 10 nm. The article includes a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material. The polymer layer has a thickness of from about 70 nm to about 120 nm.
-
Citations
32 Claims
-
1. An article including an antireflection composite material, the article comprising:
-
a substrate;
an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm; and
a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. An article including an antireflection composite material, the article consisting essentially of:
-
a substrate;
an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm; and
a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A method for providing an antireflection composite material on a substrate, the method comprising:
-
depositing an inorganic antireflection composite material on the substrate to create an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm;
depositing a layer of curable composition on the inorganic layer; and
effecting a curing of the deposited curable composition to form a polymer layer having a thickness of from about 70 nm to about 120 nm.
-
-
25. A method for providing an antireflection composite material on a substrate, the method consisting essentially of:
-
depositing an inorganic antireflection composite material on the substrate to form an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm;
depositing a layer of curable composition on the inorganic layer; and
effecting a curing of the deposited curable composition to form a polymer layer having a thickness of from about 70 nm to about 120 nm. - View Dependent Claims (26, 27, 28, 29, 30, 31)
-
-
32. An antireflection composite material that may be deposited on a substrate, the antireflection composite material consisting essentially of:
-
an inorganic metal or metal oxide layer having a thickness of from about 1 nm to about 10 nm; and
a polymer layer formed by curing a curable composition in situ on the inorganic layer, the polymer layer having a thickness of from about 70 nm to about 120 nm.
-
Specification