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Antireflection film

  • US 6,632,513 B1
  • Filed: 05/15/2000
  • Issued: 10/14/2003
  • Est. Priority Date: 02/19/1998
  • Status: Expired due to Term
First Claim
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1. An article including an antireflection composite material, the article comprising:

  • a substrate;

    an inorganic metal or metal oxide layer deposited onto the substrate and having a thickness of from about 1 nm to about 10 nm; and

    a polymer layer in contact with the inorganic layer to form an outer surface of the antireflection composite material, the polymer layer having a thickness of from about 70 nm to about 120 nm.

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