Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

• US 6,632,549 B1
• Filed: 07/17/2000
• Issued: 10/14/2003
• Est. Priority Date: 07/15/1997
• Status: Expired due to Term

• Current Assignee: ExxonMobil Research & Engineering Company (Exxon Mobil Corporation)
• Original Assignee: NGK Insulators Limited
• Inventors: Shimura, Sadanori, Katsuda, Yuji, Araki, Kiyoshi, Ohashi, Tsuneaki
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US09/618,135
• Time in Patent Office: 1,184 Days
• Field of Search: 428/469, 428/457, 428/698, 428/336, 428/704
• US Class Current: 428/698
• CPC Class Codes: C04B 35/10 based on aluminium oxide
• CPC Class Codes: C04B 35/14 based on silica
• CPC Class Codes: C04B 35/563 based on boron carbide
• CPC Class Codes: C04B 35/565 based on silicon carbide
• CPC Class Codes: C04B 35/581 based on aluminium nitride
• CPC Class Codes: C04B 35/584 based on silicon nitride
• CPC Class Codes: C04B 41/0072 Heat treatment
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/4529 applied from the gas phase
• CPC Class Codes: C04B 41/4533 plasma assisted
• CPC Class Codes: C04B 41/4556 coating or impregnating with a product reacting with the substrate, e.g. generating a metal coating by surface reduction of a ceramic substrate
• CPC Class Codes: C04B 41/4558 Coating or impregnating involving the chemical conversion of an already applied layer, e.g. obtaining an oxide layer by oxidising an applied metal layer
• CPC Class Codes: C04B 41/5018 with fluorine compounds
• CPC Class Codes: C04B 41/5032 Aluminates aluminate spinels C04B41/5046
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C04B 41/85 with inorganic materials
• CPC Class Codes: C04B 41/89 for obtaining at least two superposed coatings having different compositions
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: Y10S 206/832 Semiconductor wafer boat
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10T 428/265 : 1 mil or less

Abstract

This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.

Claims

1. A corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, comprising (1) an aluminum nitride-base ceramic main body and (2) a corrosion-resistant uncovered top surface layer formed on a surface of the main body, in which the corrosion-resistant layer contains a fluoride of an alkaline earth element.

2. The corrosion-resistant member of claim 1, wherein the corrosion-resistant layer is a film of a fluoride.

3. The corrosion-resistant member of claim 1, wherein the fluoride is magnesium fluoride.

4. The corrosion-resistant member of claim 2, wherein the fluoride is magnesium fluoride.

5. The corrosion-resistant member of claim 1, wherein the main body is an aluminum nitride-base ceramic.

6. The corrosion-resistant member of claim 1, wherein the corrosion-resistant layer has a thickness of not less than 0.2 μ

m but not more than 10 μ

m.

7. The corrosion-resistant member of claim 1, wherein the corrosion-resistant layer is made of a particle substance including a fluoride of an alkaline earth element.

8. A corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, comprising (1) an aluminum nitride-base ceramic main body and (2) a corrosion-resistant uncovered top surface layer formed on a surface of the main body, in which the corrosion-resistant layer contains a fluoride of a rare earth element.