Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS

• US 6,632,698 B2
• Filed: 08/07/2001
• Issued: 10/14/2003
• Est. Priority Date: 08/07/2001
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Ives, Thomas W.
• Primary Examiner(s): Smith, Matthew
• Assistant Examiner(s): MALSAWMA, LALRINFAMKIM HMAR
• Application Number:
  US09/924,370
• Publication Number:
  US 20030032215A1
• Time in Patent Office: 798 Days
• Field of Search: 257/419, 257/417, 257/415, 257/420, 438/50, 438/52, 438/53
• US Class Current: 438/52
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: B81C 2201/0143 Focussed beam, i.e. laser, ion or e-beam
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum

Abstract

A microelectromechanical device (MEMD) defined within a substrate of a MEMS includes a mass element defining an area of interest. The device also includes a support beam supporting the mass element in spaced-apart relationship from the substrate. The support beam includes a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element. The support beam further includes a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element. The beam members are in spaced-apart relationship from one another. A first cross member connects the first beam member and the second beam member. Preferably, the support beam includes a plurality of cross members. Two such support beams can be used to support a mass element in a MEMD in a bridge configuration.

Claims

1. A microelectromechanical device defined within a substrate of a MEMS, comprising:

a mass element defining an area of interest;

a support beam supporting the mass element in spaced-apart relationship from the substrate, the support beam comprising;

a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element;

a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element, the second beam member being spaced apart from the first beam member;

a first cross member connecting the first beam member and the second beam member; and

wherein the beam members are each defined by a height, and wherein the first cross member is connected to the beam members across only a portion of the entire height.

2. A method of forming a microelectromechanical device comprising a mass element, the method comprising:

depositing a substrate layer;

forming the mass element by removing at least a portion of the substrate layer, the resulting mass element defining an area of interest free of contact with the substrate;

forming a first beam member by removing at least a portion of the substrate, the resulting first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element;

forming a second beam member by removing at least a portion of the substrate, the resulting second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element, the second beam member being spaced apart from the first beam member;

forming a cross member by removing at least a portion of the substrate, the first cross member connecting the first beam member and the second beam member; and

wherein the substrate is deposited as a plurality of layers, and wherein the first cross member comprises a boron diffusion in the substrate.

3. A microelectromechanical device defined within a substrate of a MEMS, comprising:

a mass element defining an area of interest;

a support beam supporting the mass element in spaced-apart relationship from the substrate, the support beam comprising;

a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element;

a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element, the second beam member being spaced apart from the first beam member;

wherein each of the beam members is defined by an upper edge and a lower edge;

a first cross member connecting the first beam member and the second beam member at the upper edge of the beam members, but not at the lower edge of the beam members; and

a second cross member connecting the first beam member and the second beam member at the lower edge of the beam members, but not at the upper edge of the beam members.

4. The microelectromechanical device of claim 3, and wherein at least one of the first and second cross members are formed from a boron diffusion in an oxide layer.

5. The microelectromechanical device of claim 3, and further comprising a plurality of first cross members connecting the first beam member and the second beam member at the upper edge of the beam members, but not at the lower edge of the beam members.

6. The microelectromechanical device of claim 5, and further comprising plurality of second cross members connecting the first beam member and the second beam member at the lower edge of the beam members, but not at the upper edge of the beam members.

7. The microelectromechanical device of claim 3, and further comprising a plurality of second cross members connecting the first beam member and the second beam member at the lower edge of the beam members, but not at the upper edge of the beam members.

8. A microelectromechanical device defined within a substrate of a MEMS, comprising:

a mass element defining an area of interest;

a support beam supporting the mass element in spaced-apart relationship from the substrate, the support beam comprising;

a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element;

a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element, the second beam member being spaced apart from the first beam member;

wherein each of the beam members is defined by an upper edge and a lower edge; and

a first cross member oriented proximate to only one of the upper edges or the lower edges of, and connecting, the first beam member and the second beam member.