×

Optical-electrical MEMS devices and method

  • US 6,633,426 B2
  • Filed: 05/10/2001
  • Issued: 10/14/2003
  • Est. Priority Date: 05/10/2001
  • Status: Active Grant
First Claim
Patent Images

1. An optical-electrical MEMS device carrying an electrical signal-controllable orientable mirror and covered by an optically transmissive substrate mounted spaced above the mirror;

  • and means for generating an upper electrical field in the space above the mirror and under said substrate for controlling the mirror orientation.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×